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1. 发明申请

US20150170357A1 IMAGE SYNCHRONIZATION OF SCANNING WAFER INSPECTION SYSTEM 有权
标题翻译：扫描波形检测系统的图像同步
公开(公告)号：US20150170357A1
公开(公告)日：2015-06-18
申请号：US14634372
申请日：2015-02-27
申请人： KLA-Tencor Corporation
发明人： Kai Cao , Dennis G. Emge , Zhiqin Wang , Jamie M. Sullivan , Wenjian Cai , Henrik Nielsen
IPC分类号： G06T7/00
CPC分类号： G06T7/0004 , G01N21/9501
摘要： An inspection system comprises a beam generator module for deflecting spots across scan portions of a specimen. The system also includes detection channels for sensing light emanating from a specimen in response to an incident beam directed towards such specimen and generating a detected image for each scan portion. The system comprises a synchronization system comprising clock generator modules for generating timing signals for deflectors of the beam generator module to scan the spots across the scan portions at a specified frequency and each of the detection channels to generate the corresponding detected image at a specified sampling rate. The timing signals are generated based on a common system clock and cause the deflectors to scan the spots and the detection channels to generate a detected image at a synchronized timing so as to minimize jitter between the scan portions in the response image.
摘要翻译：检查系统包括用于偏转样本的扫描部分上的斑点的束发生器模块。该系统还包括用于响应于朝向这种样本的入射光束感测从样本发出的光的检测通道，并且为每个扫描部分生成检测到的图像。该系统包括同步系统，其包括用于产生用于波束发生器模块的偏转器的定时信号的时钟发生器模块，以扫描指定频率的扫描部分上的点和每个检测通道，以指定的采样率产生相应的检测图像。基于公共系统时钟生成定时信号，并且使得偏转器扫描点和检测通道，以在同步定时产生检测图像，以使响应图像中的扫描部分之间的抖动最小化。

2. 发明申请

US20140240562A1 Integrated Multi-Channel Analog Front End And Digitizer For High Speed Imaging Applications 有权
标题翻译：用于高速成像应用的集成多通道模拟前端和数字转换器
公开(公告)号：US20140240562A1
公开(公告)日：2014-08-28
申请号：US14272454
申请日：2014-05-07
申请人： KLA-Tencor Corporation
发明人： David L. Brown , Mansour Kermat , Lance Glasser , Henrik Nielsen , Guowu Zheng , Kurt Lehman , Kenneth F. Hatch , Yung-Ho Chuang , Venkatraman Iyer
IPC分类号： H04N5/378
CPC分类号： H04N5/378 , H01L27/14634 , H04N5/3694 , H04N5/37206 , H04N5/37213
摘要： A module for high speed image processing includes an image sensor for generating a plurality of analog outputs representing an image and a plurality of HDDs for concurrently processing the plurality of analog outputs. Each HDD is an integrated circuit configured to process in parallel a predetermined set of the analog outputs. Each channel of the HDD can include an AFE for conditioning a signal representing one sensor analog output, an ADC for converting a conditioned signal into a digital signal, and a data formatting block for calibrations and formatting the digital signal for transport to an off-chip device. The HDDs and drive electronics are combined with the image sensor into one package to optimize signal integrity and high dynamic range, and to achieve high data rates through use of synchronized HDD channels. Combining multiple modules results in a highly scalable imaging subsystem optimized for inspection and metrology applications.
摘要翻译：用于高速图像处理的模块包括用于产生表示图像的多个模拟输出的图像传感器和用于同时处理多个模拟输出的多个HDD。每个HDD是被配置为并行处理预定的一组模拟输出的集成电路。 HDD的每个通道可以包括用于调节表示一个传感器模拟输出的信号的AFE，用于将经调节的信号转换成数字信号的ADC，以及用于校准和格式化数字信号以传送到芯片外的数据格式化块设备。 HDD和驱动电子设备与图像传感器组合成一个封装，以优化信号完整性和高动态范围，并通过使用同步的HDD通道实现高数据速率。组合多个模块可实现高度可扩展的成像子系统，以优化检测和计量应用。

3. 发明授权

US09208553B2 Image synchronization of scanning wafer inspection system 有权
公开(公告)号：US09208553B2
公开(公告)日：2015-12-08
申请号：US14634372
申请日：2015-02-27
申请人： KLA-Tencor Corporation
发明人： Kai Cao , Dennis G. Emge , Zhiqin Wang , Jamie M. Sullivan , Wenjian Cai , Henrik Nielsen
IPC分类号： G06K9/00 , G06T7/00 , G01N21/95
CPC分类号： G06T7/0004 , G01N21/9501
摘要： An inspection system comprises a beam generator module for deflecting spots across scan portions of a specimen. The system also includes detection channels for sensing light emanating from a specimen in response to an incident beam directed towards such specimen and generating a detected image for each scan portion. The system comprises a synchronization system comprising clock generator modules for generating timing signals for deflectors of the beam generator module to scan the spots across the scan portions at a specified frequency and each of the detection channels to generate the corresponding detected image at a specified sampling rate. The timing signals are generated based on a common system clock and cause the deflectors to scan the spots and the detection channels to generate a detected image at a synchronized timing so as to minimize jitter between the scan portions in the response image.

4. 发明授权

US08995746B2 Image synchronization of scanning wafer inspection system 有权
标题翻译：扫描晶片检测系统的图像同步
公开(公告)号：US08995746B2
公开(公告)日：2015-03-31
申请号：US13898736
申请日：2013-05-21
申请人： KLA-Tencor Corporation
发明人： Kai Cao , Dennis G. Emge , Zhiqin Wang , Jamie M. Sullivan , Wenjian Cai , Henrik Nielsen
IPC分类号： G06T9/00 , G06T7/00
CPC分类号： G06T7/0004 , G01N21/9501
摘要： An inspection system comprises a beam generator module for deflecting spots across scan portions of a specimen. The system also includes detection channels for sensing light emanating from a specimen in response to an incident beam directed towards such specimen and generating a detected image for each scan portion. The system comprises a synchronization system comprising clock generator modules for generating timing signals for deflectors of the beam generator module to scan the spots across the scan portions at a specified frequency and each of the detection channels to generate the corresponding detected image at a specified sampling rate. The timing signals are generated based on a common system clock and cause the deflectors to scan the spots and the detection channels to generate a detected image at a synchronized timing so as to minimize jitter between the scan portions in the response image.
摘要翻译：检查系统包括用于偏转样本的扫描部分上的斑点的束发生器模块。该系统还包括用于响应于朝向这种样本的入射光束感测从样本发出的光的检测通道，并且为每个扫描部分生成检测到的图像。该系统包括同步系统，其包括用于产生用于波束发生器模块的偏转器的定时信号的时钟发生器模块，以扫描指定频率的扫描部分上的点和每个检测通道，以指定的采样率产生相应的检测到的图像。基于公共系统时钟生成定时信号，并且使得偏转器扫描点和检测通道，以在同步定时产生检测图像，以使响应图像中的扫描部分之间的抖动最小化。

5. 发明申请

US20140270471A1 IMAGE SYNCHRONIZATION OF SCANNING WAFER INSPECTION SYSTEM 有权
标题翻译：扫描波形检测系统的图像同步
公开(公告)号：US20140270471A1
公开(公告)日：2014-09-18
申请号：US13898736
申请日：2013-05-21
申请人： KLA-Tencor Corporation
发明人： Kai Cao , Dennis G. Emge , Zhiqin Wang , Jamie M. Sullivan , Wenjian Cai , Henrik Nielsen
IPC分类号： G06T7/00
CPC分类号： G06T7/0004 , G01N21/9501
摘要： An inspection system comprises a beam generator module for deflecting spots across scan portions of a specimen. The system also includes detection channels for sensing light emanating from a specimen in response to an incident beam directed towards such specimen and generating a detected image for each scan portion. The system comprises a synchronization system comprising clock generator modules for generating timing signals for deflectors of the beam generator module to scan the spots across the scan portions at a specified frequency and each of the detection channels to generate the corresponding detected image at a specified sampling rate. The timing signals are generated based on a common system clock and cause the deflectors to scan the spots and the detection channels to generate a detected image at a synchronized timing so as to minimize jitter between the scan portions in the response image.
摘要翻译：检查系统包括用于偏转样本的扫描部分上的斑点的束发生器模块。该系统还包括用于响应于朝向这种样本的入射光束感测从样本发出的光的检测通道，并且为每个扫描部分生成检测到的图像。该系统包括同步系统，其包括用于产生用于波束发生器模块的偏转器的定时信号的时钟发生器模块，以扫描指定频率的扫描部分上的点和每个检测通道，以指定的采样率产生相应的检测图像。基于公共系统时钟生成定时信号，并且使得偏转器扫描点和检测通道，以在同步定时产生检测图像，以使响应图像中的扫描部分之间的抖动最小化。

6. 发明授权

US09462206B2 Integrated multi-channel analog front end and digitizer for high speed imaging applications 有权
标题翻译：集成多通道模拟前端和数字化仪，用于高速成像应用
公开(公告)号：US09462206B2
公开(公告)日：2016-10-04
申请号：US14272454
申请日：2014-05-07
申请人： KLA-Tencor Corporation
发明人： David L. Brown , Mansour Kermat , Lance Glasser , Henrik Nielsen , Guowu Zheng , Kurt Lehman , Kenneth F. Hatch , Yung-Ho Chuang , Venkatraman Iyer
IPC分类号： H04N5/335 , H04N5/228 , H04N5/378 , H04N5/372 , H01L27/146 , H04N5/369
CPC分类号： H04N5/378 , H01L27/14634 , H04N5/3694 , H04N5/37206 , H04N5/37213
摘要： A module for high speed image processing includes an image sensor for generating a plurality of analog outputs representing an image and a plurality of HDDs for concurrently processing the plurality of analog outputs. Each HDD is an integrated circuit configured to process in parallel a predetermined set of the analog outputs. Each channel of the HDD can include an AFE for conditioning a signal representing one sensor analog output, an ADC for converting a conditioned signal into a digital signal, and a data formatting block for calibrations and formatting the digital signal for transport to an off-chip device. The HDDs and drive electronics are combined with the image sensor into one package to optimize signal integrity and high dynamic range, and to achieve high data rates through use of synchronized HDD channels. Combining multiple modules results in a highly scalable imaging subsystem optimized for inspection and metrology applications.
摘要翻译：用于高速图像处理的模块包括用于产生表示图像的多个模拟输出的图像传感器和用于同时处理多个模拟输出的多个HDD。每个HDD是被配置为并行处理预定的一组模拟输出的集成电路。 HDD的每个通道可以包括用于调节表示一个传感器模拟输出的信号的AFE，用于将经调节的信号转换成数字信号的ADC，以及用于校准和格式化数字信号以传送到芯片外的数据格式化块设备。 HDD和驱动电子设备与图像传感器组合成一个封装，以优化信号完整性和高动态范围，并通过使用同步的HDD通道实现高数据速率。组合多个模块可实现高度可扩展的成像子系统，以优化检测和计量应用。

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