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    • 1. 发明授权
    • Method for producing photoelectric converter and phtotelectric converter
    • 光电转换器和电介质转换器的制造方法
    • US09171972B2
    • 2015-10-27
    • US14375537
    • 2013-01-30
    • KYOCERA Corporation
    • Shiro MiyazakiTomofumi HonjoKoji NiwaHironori KiiShigeo AonoYosuke Nishioka
    • H01L31/00H01L31/0216H01L31/0224H01L31/18
    • H01L31/0216H01L31/02167H01L31/0224H01L31/022425H01L31/1804Y02E10/547Y02P70/521
    • The method for producing a photoelectric converter of the present invention comprises a preparation step for preparing a substrate (2) formed from silicon; a first film-formation step for the formation of a first protective film (3) by deposition of aluminum oxide on a top surface (2B) of the substrate (2) using the atom deposition method or chemical vapor deposition method in an atmosphere containing hydrogen; and a second film-formation step for forming a second protective film (4) by deposition of aluminum oxide on the first protective film (3) using sputtering after the first film-formation step. Moreover, the photoelectric converter of the present invention comprises a substrate formed from silicon; a first protective film formed from aluminum oxide; and a second protective film formed from aluminum oxide, wherein the concentration of hydrogen contained in the first protective film is higher than the concentration of hydrogen contained in the second protective film.
    • 本发明的光电转换器的制造方法包括:准备由硅形成的基板(2)的准备工序; 第一成膜步骤,用于通过使用原子沉积法或化学气相沉积法在含氢气氛中沉积氧化铝在基底(2)的顶表面(2B)上形成第一保护膜(3) ; 以及第二成膜步骤,用于通过在第一成膜步骤之后使用溅射在第一保护膜(3)上沉积氧化铝来形成第二保护膜(4)。 此外,本发明的光电转换器包括由硅形成的基板; 由氧化铝形成的第一保护膜; 以及由氧化铝形成的第二保护膜,其中所述第一保护膜中所含的氢浓度高于所述第二保护膜中所含的氢浓度。
    • 3. 发明申请
    • METHOD FOR PRODUCING PHOTOELECTRIC CONVERTER AND PHOTOELECTRIC CONVERTER
    • 生产光电转换器和光电转换器的方法
    • US20150001657A1
    • 2015-01-01
    • US14375537
    • 2013-01-30
    • KYOCERA Corporation
    • Shiro MiyazakiTomofumi HonjoKoji NiwaHironori KiiShigeo AonoYosuke Nishioka
    • H01L31/0216H01L31/0224H01L31/18
    • H01L31/0216H01L31/02167H01L31/0224H01L31/022425H01L31/1804Y02E10/547Y02P70/521
    • The method for producing a photoelectric converter of the present invention comprises a preparation step for preparing a substrate (2) that has a photoelectric conversion layer (2a) and is formed from silicon; a first film-formation step for the formation of a first protective film (3) by deposition of aluminum oxide on a top surface (2B) of the substrate (2) using the atom deposition method or chemical vapor deposition method in an atmosphere containing hydrogen; and a second film-formation step for forming a second protective film (4) by deposition of aluminum oxide on the first protective film (3) using sputtering after the first film-formation step. Moreover, the photoelectric converter of the present invention comprises a substrate that has a photoelectric conversion layer and is formed from silicon; a first protective film that is deposited on the substrate and is formed from aluminum oxide; and a second protective film that is deposited on the first protective film and is formed from aluminum oxide, wherein the concentration of hydrogen contained in the first protective film is higher than the concentration of hydrogen contained in the second protective film.
    • 本发明的光电转换器的制造方法包括:制备具有光电转换层(2a)并由硅形成的基板(2)的准备工序; 第一成膜步骤,用于通过使用原子沉积法或化学气相沉积法在含氢气氛中沉积氧化铝在基底(2)的顶表面(2B)上形成第一保护膜(3) ; 以及第二成膜步骤,用于通过在第一成膜步骤之后使用溅射在第一保护膜(3)上沉积氧化铝来形成第二保护膜(4)。 此外,本发明的光电转换器包括具有光电转换层并由硅形成的基板; 沉积在基板上并由氧化铝形成的第一保护膜; 以及沉积在第一保护膜上并由氧化铝形成的第二保护膜,其中包含在第一保护膜中的氢的浓度高于第二保护膜中包含的氢的浓度。