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    • 8. 发明授权
    • Memory device and method of manufacturing memory device
    • 存储器件及其制造方法
    • US08963115B2
    • 2015-02-24
    • US14017703
    • 2013-09-04
    • Kabushiki Kaisha Toshiba
    • Kenichi Murooka
    • H01L27/24H01L45/00G11C13/00
    • H01L45/1641G11C13/0002G11C2213/71H01L27/2436H01L27/2454H01L27/2481H01L27/249H01L45/04H01L45/145H01L45/146H01L45/1616
    • According to one embodiment, a memory device includes a first conductive line extending in a first direction, second conductive lines each extending in a second direction intersect with the first direction, a third conductive line extending in a third direction intersect with the first and second directions, an insulating layer disposed between the second conductive lines and the third conductive line, resistance change elements each disposed on one of first and second surfaces of each of the second conductive lines in the third direction, and each connected to the third conductive line, a semiconductor layer connected between the first conductive line and one end of the third conductive line, and a select FET having a select gate electrode, and using the semiconductor layer as a channel.
    • 根据一个实施例,存储器件包括沿第一方向延伸的第一导电线,每条沿第二方向延伸的第二导线与第一方向交叉,第三导线沿着第三方向延伸,与第一和第二方向相交 设置在所述第二导线和所述第三导线之间的绝缘层,电阻变化元件,其各自设置在所述第三方向上的每个所述第二导线的第一表面和所述第二表面中的一个上,并且各自连接到所述第三导电线, 连接在第一导电线和第三导线的一端之间的半导体层,以及具有选择栅电极的选择FET,并且使用半导体层作为沟道。