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1. 发明申请

US20180151331A1 Universal Non-Invasive Chamber Impedance Measurement System and Associated Methods 审中-公开
公开(公告)号：US20180151331A1
公开(公告)日：2018-05-31
申请号：US15365864
申请日：2016-11-30
申请人： Lam Research Corporation
发明人： Chin-Yi Liu , David Schaefer , Dan Marohl
IPC分类号： H01J37/32
CPC分类号： H01J37/32183 , H01J37/32155 , H01J37/3299 , H01J2237/24564 , H01J2237/327 , H01L21/26
摘要： A system is disclosed for measuring an impedance of a plasma processing chamber. The system includes a radiofrequency signal generator configured to output a radiofrequency signal based on a frequency setpoint and provide an indication of an actual frequency of the radiofrequency signal, where the actual frequency can be different than the frequency setpoint. The system includes an impedance control module including at least one variable impedance control device. A difference between the actual frequency of the radiofrequency signal as output by the radiofrequency signal generator and the frequency setpoint is partially dependent upon a setting of the at least one variable impedance control device and is partially dependent upon the impedance of the plasma processing chamber. The system includes a connector configured to connect with a radiofrequency signal supply line of the plasma processing chamber. The impedance control module is connected between the radiofrequency signal generator and the connector.

2. 发明授权

US09355884B2 Installation fixture for elastomer bands and methods of using the same 有权
标题翻译：用于弹性带的安装夹具及其使用方法
公开(公告)号：US09355884B2
公开(公告)日：2016-05-31
申请号：US14470477
申请日：2014-08-27
申请人： Lam Research Corporation
发明人： Rish Chhatre , David Schaefer , Sung Lee , Dan Haber
IPC分类号： H01L21/687 , H01L21/67
CPC分类号： H01L21/68735 , H01L21/67069 , H01L21/6719 , Y10T29/49826 , Y10T29/49863 , Y10T29/53 , Y10T29/53657
摘要： A kit comprising an installation fixture, a plurality of mechanical fasteners and an embedding tool is provided which allows for an elastomer band to be disposed in a mounting groove around a semiconductor substrate support in a manner that relieves the internal stresses of the elastomer band, leading to an elastomer band with a longer operational lifetime. The installation fixture is secured to a substrate support with mechanical fasteners. An elastomer band is placed around an outer circumference of the installation fixture and rotated back and forth to relieve internal stresses of the elastomer band. The fixture is inverted and the elastomer band is slid vertically off the fixture and into the mounting groove. An embedding tool can be used to completely insert the elastomer band into the mounting groove.
摘要翻译：提供一种包括安装夹具，多个机械紧固件和嵌入工具的套件，其允许弹性体带以减轻弹性体带的内部应力的方式设置在半导体衬底支撑件周围的安装槽中，引导到具有更长使用寿命的弹性体带。安装夹具用机械紧固件固定到基板支架上。弹性体带围绕安装夹具的外周放置并且来回旋转以减轻弹性体带的内应力。夹具被倒置，弹性体带从夹具垂直滑入安装槽。可以使用嵌入工具将弹性体带完全插入到安装槽中。

3. 发明申请

US20180106371A1 EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY 审中-公开
公开(公告)号：US20180106371A1
公开(公告)日：2018-04-19
申请号：US15843849
申请日：2017-12-15
申请人： Lam Research Corporation
发明人： David Schaefer , Ambarish Chhatre , Keith William Gaff , Sung Lee , Brooke Mesler Lai
IPC分类号： F16J15/02 , H01J37/32 , H02N13/00 , H01L21/683
摘要： An edge seal for sealing an outer surface of a lower electrode assembly configured to support a semiconductor substrate in a plasma processing chamber, the lower electrode assembly including an annular groove defined between a lower member and an upper member of the lower electrode assembly. The edge seal includes an elastomeric band configured to be arranged within the groove, the elastomeric band having an annular upper surface, an annular lower surface, an inner surface, and an outer surface. When the elastomeric band is in an uncompressed state, the outer surface of the elastomeric band is concave. When the upper and lower surfaces are axially compressed at least 1% such that the elastomeric band is in a compressed state, an outward bulging of the outer surface is not greater than a predetermined distance. The predetermined distance corresponds to a maximum outer diameter of the elastomeric band in the uncompressed state.

4. 发明授权

US09583377B2 Installation fixture for elastomer bands 有权
标题翻译：弹性带安装夹具
公开(公告)号：US09583377B2
公开(公告)日：2017-02-28
申请号：US14109400
申请日：2013-12-17
申请人： Lam Research Corporation
发明人： Rish Chhatre , David Schaefer
IPC分类号： B23Q1/70 , H01L21/70 , H01L21/67 , H01L21/687
CPC分类号： H01L21/70 , H01L21/67126 , H01L21/68785 , Y10T29/4987 , Y10T29/53657
摘要： An installation fixture adapted to mount an elastomer band in a mounting groove around a semiconductor substrate support used for supporting a semiconductor substrate in a plasma processing chamber is disclosed, which includes an annular ring having a vertically extending portion on an outer edge of the ring and adapted to receive the elastomer band, and a base plate configured to be attached to the annular ring, the base plate having a plurality of radially extending portions adapted to receive a plurality of mechanical fasteners at locations corresponding to mounting holes in the semiconductor substrate support.
摘要翻译：公开了一种适于将弹性体带安装在用于在等离子体处理室中用于支撑半导体衬底的半导体衬底支架周围的安装槽中的安装夹具，其包括在环的外边缘上具有垂直延伸部分的环形环，适于容纳弹性体带和配置成附接到环形圈的基板，所述基板具有多个径向延伸部分，其适于在对应于半导体衬底支撑件中的安装孔的位置处容纳多个机械紧固件。

5. 发明申请

US20150179412A1 EDGE RING DIMENSIONED TO EXTEND LIFETIME OF ELASTOMER SEAL IN A PLASMA PROCESSING CHAMBER 审中-公开
标题翻译：边缘环尺寸延长等离子体加工室中弹性体密封的寿命
公开(公告)号：US20150179412A1
公开(公告)日：2015-06-25
申请号：US14136953
申请日：2013-12-20
申请人： Lam Research Corporation
发明人： Ambarish Chhatre , David Schaefer , Keith Gaff
IPC分类号： H01J37/32 , H01L21/3065
CPC分类号： H01J37/32642 , H01J37/32477 , H01J37/32715
摘要： An edge ring configured to surround an outer periphery of a substrate support in a plasma processing chamber wherein plasma is generated and used to process a substrate is disclosed, the substrate support comprising a base plate, a top plate, an elastomer seal assembly between the base plate and the top plate, and an elastomer seal configured to surround the elastomer seal assembly. The edge ring includes an upper inner surface having an edge step directed towards an interior portion of the edge ring and arranged to extend from an outer periphery of a top surface of the top plate to an outer periphery of an upper surface of the base plate, a lower inner surface, an outer surface, a lower surface extending from the lower inner surface to the outer surface, and a top surface extending from the outer surface to the upper inner surface.
摘要翻译：公开了一种边缘环，其被配置为围绕等离子体处理室中的衬底支撑件的外周围，其中产生等离子体并用于处理衬底，所述衬底支撑件包括基板，顶板，基底之间的弹性体密封组件板和顶板，以及构造成围绕弹性体密封组件的弹性体密封件。边缘环包括上内表面，其具有朝向边缘环的内部的边缘台阶，并且布置成从顶板的顶表面的外周延伸到基板的上表面的外周，下内表面，外表面，从下内表面延伸到外表面的下表面，以及从外表面延伸到上内表面的顶表面。

6. 发明授权

US10804081B2 Edge ring dimensioned to extend lifetime of elastomer seal in a plasma processing chamber 有权
公开(公告)号：US10804081B2
公开(公告)日：2020-10-13
申请号：US14136953
申请日：2013-12-20
申请人： Lam Research Corporation
发明人： Ambarish Chhatre , David Schaefer , Keith Gaff
IPC分类号： H01J37/32 , H01L21/3065
摘要： An edge ring configured to surround an outer periphery of a substrate support in a plasma processing chamber wherein plasma is generated and used to process a substrate is disclosed, the substrate support comprising a base plate, a top plate, an elastomer seal assembly between the base plate and the top plate, and an elastomer seal configured to surround the elastomer seal assembly. The edge ring includes an upper inner surface having an edge step directed towards an interior portion of the edge ring and arranged to extend from an outer periphery of a top surface of the top plate to an outer periphery of an upper surface of the base plate, a lower inner surface, an outer surface, a lower surface extending from the lower inner surface to the outer surface, and a top surface extending from the outer surface to the upper inner surface.

7. 发明授权

US10109460B2 Universal non-invasive chamber impedance measurement system and associated methods 有权
公开(公告)号：US10109460B2
公开(公告)日：2018-10-23
申请号：US15365864
申请日：2016-11-30
申请人： Lam Research Corporation
发明人： Chin-Yi Liu , David Schaefer , Dan Marohl
IPC分类号： H01J37/32 , H01L21/26
摘要： A system is disclosed for measuring an impedance of a plasma processing chamber. The system includes a radiofrequency signal generator configured to output a radiofrequency signal based on a frequency setpoint and provide an indication of an actual frequency of the radiofrequency signal, where the actual frequency can be different than the frequency setpoint. The system includes an impedance control module including at least one variable impedance control device. A difference between the actual frequency of the radiofrequency signal as output by the radiofrequency signal generator and the frequency setpoint is partially dependent upon a setting of the at least one variable impedance control device and is partially dependent upon the impedance of the plasma processing chamber. The system includes a connector configured to connect with a radiofrequency signal supply line of the plasma processing chamber. The impedance control module is connected between the radiofrequency signal generator and the connector.

8. 发明申请

US20150235889A1 SYSTEM AND METHOD FOR PERFORMING HOT WATER SEAL ON ELECTROSTATIC CHUCK 审中-公开
标题翻译：用于在静电切割机上执行热水密封的系统和方法
公开(公告)号：US20150235889A1
公开(公告)日：2015-08-20
申请号：US14704602
申请日：2015-05-05
申请人： Lam Research Corporation
发明人： Hong Shih , Tuochuan Huang , David Schaefer , Ambarish Chhatre , John Daugherty , MingHang Wu , Clifford La Croix
IPC分类号： H01L21/683
CPC分类号： H01L21/6833 , B05D5/12 , B05D7/52 , C23C8/02 , C23C22/66 , H01L21/6831 , Y10T279/23
摘要： A method is provided for treating a bipolar ESC having a front surface and a back surface, the front surface including an anodized layer. The method includes eliminating the anodized layer, disposing a new anodized layer onto the front surface, and treating the new anodized layer with water to seal the new anodized layer.
摘要翻译：提供了一种用于处理具有前表面和后表面的双极ESC的方法，前表面包括阳极氧化层。该方法包括消除阳极氧化层，将新的阳极氧化层设置在前表面上，以及用水处理新的阳极氧化层以密封新的阳极氧化层。

9. 发明申请

US20150170942A1 INSTALLATION FIXTURE FOR ELASTOMER BANDS 有权
标题翻译：弹性体装置的安装
公开(公告)号：US20150170942A1
公开(公告)日：2015-06-18
申请号：US14109400
申请日：2013-12-17
申请人： Lam Research Corporation
发明人： Rish Chhatre , David Schaefer
IPC分类号： H01L21/67 , H01L21/70
CPC分类号： H01L21/70 , H01L21/67126 , H01L21/68785 , Y10T29/4987 , Y10T29/53657
摘要： An installation fixture adapted to mount an elastomer band in a mounting groove around a semiconductor substrate support used for supporting a semiconductor substrate in a plasma processing chamber is disclosed, which includes an annular ring having a vertically extending portion on an outer edge of the ring and adapted to receive the elastomer band, and a base plate configured to be attached to the annular ring, the base plate having a plurality of radially extending portions adapted to receive a plurality of mechanical fasteners at locations corresponding to mounting holes in the semiconductor substrate support.
摘要翻译：公开了一种适于将弹性体带安装在用于在等离子体处理室中用于支撑半导体衬底的半导体衬底支架周围的安装槽中的安装夹具，其包括在环的外边缘上具有垂直延伸部分的环形环，适于容纳弹性体带和配置成附接到环形圈的基板，所述基板具有多个径向延伸部分，其适于在对应于半导体衬底支撑件中的安装孔的位置处容纳多个机械紧固件。

10. 发明申请

US20140366360A1 INSTALLATION FIXTURE FOR ELASTOMER BANDS AND METHODS OF USING THE SAME 审中-公开
标题翻译：弹性体的安装方式及其使用方法
公开(公告)号：US20140366360A1
公开(公告)日：2014-12-18
申请号：US14470477
申请日：2014-08-27
申请人： Lam Research Corporation
发明人： Rish Chhatre , David Schaefer , Sung Lee , Dan Haber
IPC分类号： H01L21/687 , H01L21/67
CPC分类号： H01L21/68735 , H01L21/67069 , H01L21/6719 , Y10T29/49826 , Y10T29/49863 , Y10T29/53 , Y10T29/53657
摘要： A kit comprising an installation fixture, a plurality of mechanical fasteners and an embedding tool is provided which allows for an elastomer band to be disposed in a mounting groove around a semiconductor substrate support in a manner that relieves the internal stresses of the elastomer band, leading to an elastomer band with a longer operational lifetime. The installation fixture is secured to a substrate support with mechanical fasteners. An elastomer band is placed around an outer circumference of the installation fixture and rotated back and forth to relieve internal stresses of the elastomer band. The fixture is inverted and the elastomer band is slid vertically off the fixture and into the mounting groove. An embedding tool can be used to completely insert the elastomer band into the mounting groove.
摘要翻译：提供一种包括安装夹具，多个机械紧固件和嵌入工具的套件，其允许弹性体带以减轻弹性体带的内部应力的方式设置在半导体衬底支撑件周围的安装槽中，引导到具有更长使用寿命的弹性体带。安装夹具用机械紧固件固定到基板支架上。弹性体带围绕安装夹具的外周放置并且来回旋转以减轻弹性体带的内应力。夹具被倒置，弹性体带从夹具垂直滑入安装槽。可以使用嵌入工具将弹性体带完全插入到安装槽中。

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