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1. 发明授权

US6074885A Lead titanate isolation layers for use in fabricating PZT-based capacitors and similar structures 失效
标题翻译：用于制造基于PZT的电容器和类似结构的钛酸铅绝缘层
公开(公告)号：US6074885A
公开(公告)日：2000-06-13
申请号：US978308
申请日：1997-11-25
申请人： Leonard L. Boyer , Joseph T. Evans, Jr. , Naomi B. Velasquez
发明人： Leonard L. Boyer , Joseph T. Evans, Jr. , Naomi B. Velasquez
IPC分类号： H01L21/02 , H01L29/94 , H01L21/314
CPC分类号： H01L28/55 , H01L28/60
摘要： A method for constructing a device having a bottom electrode in contact with a layer of a ferroelectric dielectric material. In the method of the present invention, a layer of a field ferroelectric material is deposited on a substrate and etched to form a trench in which the bottom electrode is constructed. The bottom electrode is then deposited and a layer of the ferroelectric dielectric material is deposited over the bottom electrode and at least a portion of the field ferroelectric material. The ferroelectric layers are deposited in a perovskite state. These layers are etched back to the substrate in those areas that are outside of the device.
摘要翻译：一种用于构造具有与铁电介质材料层接触的底部电极的器件的方法。在本发明的方法中，将场强铁电材料层沉积在衬底上并被蚀刻以形成其中构成底电极的沟槽。然后沉积底部电极，并且铁电介质材料层沉积在底部电极和场致密铁电材料的至少一部分上。铁电层以钙钛矿状态沉积。这些层在设备外部的那些区域被回蚀刻到基底。

2. 发明申请

US20130133693A1 Side Edge Cleaning Methods and Apparatus for Thin Film Photovoltaic Devices 审中-公开
标题翻译：薄膜光伏器件的侧边清洁方法和装置
公开(公告)号：US20130133693A1
公开(公告)日：2013-05-30
申请号：US13308288
申请日：2011-11-30
申请人： Joe Hunter , Leonard L. Boyer , Robert A. Garber , Donald F. Foust
发明人： Joe Hunter , Leonard L. Boyer , Robert A. Garber , Donald F. Foust
IPC分类号： B08B1/04 , A47L7/00 , B08B5/04
CPC分类号： B08B3/022 , B08B1/02 , H01L31/18
摘要： Methods for cleaning a side edge of a thin film photovoltaic substrate are provided. A cleaning solution can be applied to a cleaning wheel that has a cleaning surface and is rotatable about an axis. The substrate can then be transported in a machine direction to move the substrate past the cleaning wheel such that the cleaning surface of the cleaning wheel contacts the side edge of the substrate allowing the cleaning solution to remove any thin film present on the side edge of the substrate. Apparatus is also generally provided for cleaning a side edge of a thin film photovoltaic substrate.
摘要翻译：提供了用于清洁薄膜光伏基板的侧边缘的方法。清洁溶液可以应用于具有清洁表面并且可绕轴线旋转的清洁轮。然后可以在机器方向上输送基板以使基板移动通过清洁轮，使得清洁轮的清洁表面接触基板的侧边缘，从而允许清洁溶液去除存在于所述清洁轮的侧边缘上的任何薄膜基质。通常还提供了用于清洁薄膜光伏基板的侧边缘的装置。

3. 发明授权

US06417110B1 Method for constructing heat resistant electrode structures on silicon substrates 失效
标题翻译：硅衬底上耐热电极结构的制造方法
公开(公告)号：US06417110B1
公开(公告)日：2002-07-09
申请号：US08918598
申请日：1997-08-23
申请人： Leonard L. Boyer
发明人： Leonard L. Boyer
IPC分类号： H01L21311
CPC分类号： H01L28/60
摘要： A method for constructing an electrode on a silicon substrate in which the electrode will be subjected to high temperatures during subsequent processing steps. A titanium oxide layer is deposited on the silicon substrate and annealed at a temperature higher than any subsequent temperature to which the titanium oxide layer will be subjected. The electrode is then deposited on the titanium oxide layer. The electrode is preferably platinum or a titanium/platinum composition. The platinum is also annealed to a temperature higher than any subsequent temperature to which the electrode will be subjected. In the preferred embodiment of the present invention, the electrode is constructed in a trench that is etched in a layer of metallic titanium that is deposited over the titanium oxide layer.
摘要翻译：一种用于在硅衬底上构造电极的方法，其中在随后的处理步骤期间电极将经受高温。氧化钛层沉积在硅衬底上并在高于氧化钛层将要经受的任何后续温度的温度下退火。然后将电极沉积在氧化钛层上。电极优选为铂或钛/铂组合物。铂还退火到高于电极将经受的任何随后的温度的温度。在本发明的优选实施例中，电极被构造成在被沉积在氧化钛层上的金属钛层中被蚀刻的沟槽中。

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