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    • 6. 发明授权
    • MOS device with isolated drain and method for fabricating the same
    • 具有隔离漏极的MOS器件及其制造方法
    • US09006825B1
    • 2015-04-14
    • US14039161
    • 2013-09-27
    • MediaTek Inc.
    • Puo-Yu ChiangYan-Liang Ji
    • H01L29/66H01L29/78
    • H01L29/66659H01L21/266H01L29/0646H01L29/0653H01L29/1083H01L29/42368H01L29/7835
    • A MOS device with an isolated drain includes: a semiconductor substrate having a first conductivity type; a first well region embedded in a first portion of the semiconductor substrate, having a second conductivity type; a second well region disposed in a second portion of the semiconductor substrate, overlying the first well region and having the first conductivity type; a third well region disposed in a third portion of the semiconductor substrate, overlying the first well region having the second conductivity type; a fourth well region disposed in a fourth portion of the semiconductor substrate between the first and third well regions, having the first conductivity type; a gate stack formed over the semiconductor substrate; a source region disposed in a portion of the second well region, having the second conductivity type; and a drain region disposed in a portion of the fourth well region, having the second conductivity type.
    • 具有隔离漏极的MOS器件包括:具有第一导电类型的半导体衬底; 嵌入在半导体衬底的第一部分中的第一阱区,具有第二导电类型; 第二阱区,设置在所述半导体衬底的第二部分中,覆盖所述第一阱区并且具有所述第一导电类型; 设置在半导体衬底的第三部分中的第三阱区,覆盖具有第二导电类型的第一阱区; 第四阱区,设置在具有第一导电类型的第一和第三阱区之间的半导体衬底的第四部分中; 形成在半导体衬底上的栅叠层; 源区域,其设置在所述第二阱区域的具有所述第二导电类型的部分中; 以及设置在具有第二导电类型的第四阱区域的一部分中的漏极区域。
    • 9. 发明授权
    • MOS device with isolated drain and method for fabricating the same
    • 具有隔离漏极的MOS器件及其制造方法
    • US09006068B1
    • 2015-04-14
    • US14582626
    • 2014-12-24
    • MediaTek Inc
    • Puo-Yu ChiangYan-Liang Ji
    • H01L21/266H01L29/66H01L29/78
    • H01L29/66659H01L21/266H01L29/0646H01L29/0653H01L29/1083H01L29/42368H01L29/7835
    • A method for fabricating a metal-oxide-semiconductor (MOS) device, performing operations of: forming a first well region embedded in a portion of a semiconductor substrate; forming a first patterned mask layer over the semiconductor substrate; performing a first ion implant process on two portions of the semiconductor substrate exposed by the first patterned mask layer; removing the first patterned mask layer and forming a second patterned mask layer over the semiconductor substrate, exposing a portion of the third well region; performing a second ion implant process to the portion of the third well region exposed by the second patterned mask layer; performing a third implant process to the portion of the third well region exposed by the second patterned mask layer; forming a source region in a portion of the third well region; and forming a drain region in a portion of the fifth well region.
    • 一种制造金属氧化物半导体(MOS)器件的方法,执行以下操作:形成嵌入在半导体衬底的一部分中的第一阱区; 在所述半导体衬底上形成第一图案化掩模层; 在由第一图案化掩模层曝光的半导体衬底的两个部分上执行第一离子注入工艺; 去除所述第一图案化掩模层并在所述半导体衬底上形成第二图案化掩模层,暴露所述第三阱区域的一部分; 对由第二图案化掩模层暴露的第三阱区的部分执行第二离子注入工艺; 对由第二图案化掩模层暴露的第三阱区的部分执行第三注入工艺; 在所述第三阱区域的一部分中形成源极区域; 以及在所述第五阱区的一部分中形成漏极区。