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1. 发明申请

US20190081232A1 Method of Manufacturing a Multi-Layer PZT Microactuator Using Wafer-Level Processing 审中-公开
公开(公告)号：US20190081232A1
公开(公告)日：2019-03-14
申请号：US16186408
申请日：2018-11-09
申请人： Magnecomp Corporation
发明人： Christopher Dunn , Peter Hahn
IPC分类号： H01L41/27 , H01L41/273 , H01L41/09 , H01L41/083 , H03H3/08 , H01L41/23 , H01L41/277 , H01L41/053 , H01L41/338
摘要： A multi-level piezoelectric actuator is manufactured using wafer level processing. Two PZT wafers are formed and separately metallized for electrodes. The metallization on the second wafer is patterned, and holes that will become electrical vias are formed in the second wafer. The wafers are then stacked and sintered, then the devices are poled as a group and then singulated to form nearly complete individual PZT actuators. Conductive epoxy is added into the holes at the product placement step in order to both adhere the actuator within its environment and to complete the electrical via thus completing the device. Alternatively: the first wafer is metallized; then the second wafer having holes therethrough but no metallization is stacked and sintered to the first wafer; and patterned metallization is applied to the second wafer to both form electrodes and to complete the vias. The devices are then poled as a group, and singulated.

2. 发明授权

US09431041B1 Comb structure for a disk drive suspension piezoelectric microactuator operating in the D33 mode, and method of manufacturing the same 有权
标题翻译：用于以D33模式工作的盘驱动悬架压电微致动器的梳结构及其制造方法
公开(公告)号：US09431041B1
公开(公告)日：2016-08-30
申请号：US14619946
申请日：2015-02-11
申请人： Magnecomp Corporation
发明人： Christopher Schreiber , Christopher Dunn , Peter Hahn , Kuen Chee Ee
IPC分类号： G11B5/54 , G11B5/48
CPC分类号： G11B5/4833 , G11B5/483 , G11B5/4873
摘要： A microactuator assembly is formed by depositing PZT material over electrode gaps, the electrode gaps being defined by the spaces between interleaved fingers of metal that define alternating plus and minus electrodes. The PZT material is hardened and poled. The PZT material may be deposited and poled either as isolated islands of PZT material across respective electrode gaps, or as a continuous sheet of PZT material with localized areas of that material being poled and then activated. The individual PZT elements are arranged such that successive PZT elements extend in the same direction as across the electrode gaps. The resulting microactuator assembly acts in the d33 direction of the PZT elements. The electrodes have raised or recessed features such as ribs or castellations, with the PZT material mating with those features, thus anchoring the PZT material to the electrodes.
摘要翻译：通过在电极间隙上沉积PZT材料形成微致动器组件，电极间隙由限定交替的正和负电极的金属交替指状物之间的空间限定。 PZT材料硬化和极化。可以将PZT材料沉积和极化，作为隔离的PZT材料岛横跨各自的电极间隙，或作为PZT材料的连续片材，该材料的局部区域被极化并然后被激活。单独的PZT元件被布置成使得连续的PZT元件沿与电极间隙横向相同的方向延伸。所得到的微致动器组件作用在PZT元件的d33方向上。电极具有凸起或凹陷的特征，例如肋或窖，PZT材料与这些特征配合，从而将PZT材料锚固到电极上。

3. 发明授权

US09330699B1 Piezoelectric actuator with wrap-around electrode on inactive constraining layer 有权
标题翻译：压电致动器，在非活动约束层上具有环绕电极
公开(公告)号：US09330699B1
公开(公告)日：2016-05-03
申请号：US14720827
申请日：2015-05-24
申请人： Magnecomp Corporation
发明人： Peter Hahn , Kuen Chee Ee , Christopher Dunn
IPC分类号： G11B5/56 , G11B5/48 , G11B5/55
CPC分类号： G11B5/56 , G11B5/4806 , G11B5/483 , G11B5/4873 , G11B5/5552
摘要： A piezoelectric actuator such as for a hard disk drive or other application has a restraining layer on its side that is opposite the side on which the PZT is mounted. The restraining layer is a stiff material. The restraining layer reduces bending of the PZT as mounted and hence increases effective stroke length, or reverses the sign of the bending which increases the effective stroke length of the PZT even further. For simplicity of construction and assembly to the suspension, the PZT actuator may be a multi-layer PZT with the top layer being unpoled or otherwise inactive PZT material, and having a wrap-around electrode so that the actuator can be mechanically and electrically bonded to the suspension or other environment using a single adhesive dispense and cure step.
摘要翻译：诸如用于硬盘驱动器或其他应用的压电致动器在其侧面上具有与安装PZT的一侧相对的限制层。限制层是硬质材料。限制层减少了PZT的安装弯曲，从而增加了有效的行程长度，或者反转了弯曲的符号，这进一步提高了PZT的有效行程长度。为了简化构造和组装到悬架，PZT致动器可以是多层PZT，其顶层是未涂覆的或者其它不活泼的PZT材料，并且具有环绕电极，使得致动器可以机械地和电气地结合到悬浮液或其他环境使用单一的粘合剂分配和固化步骤。

4. 发明授权

US11588098B2 Method of manufacturing a multi-layer PZT microactuator using wafer-level processing 有权
公开(公告)号：US11588098B2
公开(公告)日：2023-02-21
申请号：US16186408
申请日：2018-11-09
申请人： Magnecomp Corporation
发明人： Christopher Dunn , Peter Hahn
IPC分类号： H01L41/27 , H01L41/338 , H01L41/273 , H01L41/09 , H01L41/053 , H01L41/277 , H01L41/23 , H03H3/08 , H01L41/312
摘要： A multi-level piezoelectric actuator is manufactured using wafer level processing. Two PZT wafers are formed and separately metallized for electrodes. The metallization on the second wafer is patterned, and holes that will become electrical vias are formed in the second wafer. The wafers are then stacked and sintered, then the devices are poled as a group and then singulated to form nearly complete individual PZT actuators. Conductive epoxy is added into the holes at the product placement step in order to both adhere the actuator within its environment and to complete the electrical via thus completing the device. Alternatively: the first wafer is metallized; then the second wafer having holes therethrough but no metallization is stacked and sintered to the first wafer; and patterned metallization is applied to the second wafer to both form electrodes and to complete the vias. The devices are then poled as a group, and singulated.

5. 发明授权

US10128431B1 Method of manufacturing a multi-layer PZT microactuator using wafer-level processing 有权
公开(公告)号：US10128431B1
公开(公告)日：2018-11-13
申请号：US14745417
申请日：2015-06-20
申请人： Magnecomp Corporation
发明人： Christopher Dunn , Peter Hahn
IPC分类号： H01L41/27 , H01L41/338 , H01L41/273 , H01L41/083 , H01L41/09 , H01L41/053 , H01L41/277 , H01L41/23 , H03H3/08
摘要： A multi-level piezoelectric actuator is manufactured using wafer level processing. Two PZT wafers are formed and separately metallized for electrodes. The metallization on the second wafer is patterned, and holes that will become electrical vias are formed in the second wafer. The wafers are then stacked and sintered, then the devices are poled as a group and then singulated to form nearly complete individual PZT actuators. Conductive epoxy is added into the holes at the product placement step in order to both adhere the actuator within its environment and to complete the electrical via thus completing the device. Alternatively: the first wafer is metallized; then the second wafer having holes therethrough but no metallization is stacked and sintered to the first wafer; and patterned metallization is applied to the second wafer to both form electrodes and to complete the vias. The devices are then poled as a group, and singulated.

6. 发明授权

US09070394B1 Suspension microactuator with wrap-around electrode on inactive constraining layer 有权
标题翻译：悬挂式微型致动器，带有非活动约束层的环绕电极
公开(公告)号：US09070394B1
公开(公告)日：2015-06-30
申请号：US14620120
申请日：2015-02-11
申请人： Magnecomp Corporation
发明人： Peter Hahn , Kuen Chee Ee , Christopher Dunn
IPC分类号： G11B5/48
CPC分类号： G11B5/56 , G11B5/4806 , G11B5/483 , G11B5/4873 , G11B5/5552
摘要： A PZT microactuator such as for a hard disk drive has a restraining layer on its side that is opposite the side on which the PZT is mounted. The restraining layer is a stiff material. The restraining layer reduces bending of the PZT as mounted and hence increases effective stroke length, or reverses the sign of the bending which increases the effective stroke length of the PZT even further. For simplicity of construction and assembly to the suspension, the PZT microactuator may be a multi-layer PZT with the top layer being unpoled or otherwise inactive PZT material, and having a wrap-around electrode so that the microactuator can be mechanically and electrically bonded to the suspension using a single adhesive dispense and cure step.
摘要翻译：诸如用于硬盘驱动器的PZT微致动器在其侧面上具有与安装PZT的一侧相对的限制层。限制层是硬质材料。限制层减少了PZT的安装弯曲，从而增加了有效的行程长度，或者反转了弯曲的符号，这进一步提高了PZT的有效行程长度。为了简化构造和组装到悬浮液，PZT微致动器可以是多层PZT，其顶层是未被净化的或者不活泼的PZT材料，并且具有环绕电极，使得微致动器可以机械地和电气地结合到该悬浮液使用单一的粘合剂分配和固化步骤。

7. 发明授权

US08564909B1 Multilayer bond pads for hard disk drive suspensions 有权
标题翻译：用于硬盘驱动器悬架的多层接合垫
公开(公告)号：US08564909B1
公开(公告)日：2013-10-22
申请号：US13657478
申请日：2012-10-22
申请人： Magnecomp Corporation
发明人： Christopher Dunn , Peter Hahn
IPC分类号： G11B5/48
CPC分类号： G11B5/4826
摘要： A method is presented for creating multilayer bond pads for bonding a disk drive suspension circuit to a read-write head slider. The multilayer bond pads eliminate the need for vias to transition signals between metallization layers within a suspension circuit. The method includes the steps of forming an aperture through an insulating material that has a metalized first side, depositing a second metal layer on the second side and within the aperture, the second metal layer forming an electrical contact with the first metal layer, selectively removing portions of the second metal layer within the aperture and corresponding adjacent portions of the first metal layer thereby dividing the second metal layer and respectively adjacent portions of the first metal layer into a plurality of electrically separated circuit bond pads, each bond pad including respective portions of the first metal layer and respectively adjacent portions of the second metal layer.
摘要翻译：提出了一种用于创建用于将磁盘驱动器悬架电路接合到读写头滑块的多层接合焊盘的方法。多层接合焊盘消除了在悬挂电路内的金属化层之间过渡信号的通孔的需要。该方法包括以下步骤：通过具有金属化第一侧的绝缘材料形成孔，在第二侧和孔内沉积第二金属层，第二金属层与第一金属层形成电接触，选择性地去除孔内的第二金属层的部分和第一金属层的对应的相邻部分，从而将第二金属层和第一金属层的相邻部分分成多个电分离的电路接合焊盘，每个接合焊盘包括第一金属层和第二金属层的相邻部分。

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