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    • 5. 发明申请
    • MANUFACTURING METHOD OF SEMICONDUCTOR PHOTONIC DEVICE SUBSTRATE
    • 半导体光电器件基板的制造方法
    • US20110003413A1
    • 2011-01-06
    • US12766684
    • 2010-04-23
    • Toshihiro MorisawaTakehiko TaniHisataka NagaiTakashi Furuya
    • Toshihiro MorisawaTakehiko TaniHisataka NagaiTakashi Furuya
    • H01L21/20
    • C23C16/56H01L21/02395H01L21/02543H01L33/007H01L33/46
    • In a manufacturing method of a semiconductor photonic device substrate, before multi-layer films different in material composition are successively and gradually crystal-grown in one chamber, an inter-layer growth rate model showing a relation in growth rate between each layer is defined, a growth rate of a film corresponding to at least one or more layers is obtained by actual crystal growth using an individual substrate, a growth rate of a film corresponding to other layers is estimated from the obtained growth rate by the inter-layer growth rate model, and a growth time is determined in accordance with a film thickness of each layer of the semiconductor photonic device substrate based on the actually obtained growth rate and the estimated growth rate. These steps are carried out by using a computer system connected to an MOCVD equipment, and then, a crystal growth of the semiconductor photonic device substrate is performed.
    • 在半导体光子器件衬底的制造方法中,在不同材料组成的多层膜在一个室中连续逐渐晶体生长的情况下,定义表示各层之间的生长速度关系的层间生长速率模型, 通过使用单个基板的实际晶体生长获得对应于至少一个或多个层的膜的生长速率,通过层间生长速率模型从获得的生长速率估计与其它层相对应的膜的生长速率 根据实际获得的生长速度和估计的生长速度,根据半导体光子器件基板的各层的膜厚确定生长时间。 这些步骤通过使用连接到MOCVD设备的计算机系统进行,然后执行半导体光子器件衬底的晶体生长。
    • 6. 发明授权
    • Light-emitting element
    • 发光元件
    • US08120050B2
    • 2012-02-21
    • US12585494
    • 2009-09-16
    • Taichiroo KonnoTakehiko Tani
    • Taichiroo KonnoTakehiko Tani
    • H01L33/00
    • H01L33/10
    • A light-emitting element includes a semiconductor substrate, a light emitting layer portion including an active layer on the semiconductor substrate, a first reflective layer between the semiconductor substrate and the active layer for reflecting light emitted from the active layer; and a second reflective layer between the semiconductor substrate and the first reflective layer for reflecting light with a wavelength different from that of the light reflected by the first reflective layer. The second reflective layer reflects light with a wavelength longer than that of the light reflected by the first reflective layer.
    • 发光元件包括半导体衬底,在半导体衬底上包括有源层的发光层部分,在半导体衬底和有源层之间的第一反射层,用于反射从有源层发射的光; 以及在所述半导体衬底和所述第一反射层之间的第二反射层,用于反射与由所述第一反射层反射的光的波长不同的波长的光。 第二反射层反射的波长比由第一反射层反射的光的波长长。
    • 7. 发明申请
    • Light-emitting element
    • 发光元件
    • US20100252849A1
    • 2010-10-07
    • US12585494
    • 2009-09-16
    • Taichiroo KonnoTakehiko Tani
    • Taichiroo KonnoTakehiko Tani
    • H01L33/00
    • H01L33/10
    • A light-emitting element includes a semiconductor substrate, a light emitting layer portion including an active layer on the semiconductor substrate, a first reflective layer between the semiconductor substrate and the active layer for reflecting light emitted from the active layer; and a second reflective layer between the semiconductor substrate and the first reflective layer for reflecting light with a wavelength different from that of the light reflected by the first reflective layer. The second reflective layer reflects light with a wavelength longer than that of the light reflected by the first reflective layer.
    • 发光元件包括半导体衬底,在半导体衬底上包括有源层的发光层部分,在半导体衬底和有源层之间的第一反射层,用于反射从有源层发射的光; 以及在所述半导体衬底和所述第一反射层之间的第二反射层,用于反射与由所述第一反射层反射的光的波长不同的波长的光。 第二反射层反射的波长比由第一反射层反射的光的波长长。
    • 9. 发明授权
    • Manufacturing method of semiconductor photonic device substrate
    • 半导体光子器件衬底的制造方法
    • US08367431B2
    • 2013-02-05
    • US12766684
    • 2010-04-23
    • Toshihiro MorisawaTakehiko TaniHisataka NagaiTakashi Furuya
    • Toshihiro MorisawaTakehiko TaniHisataka NagaiTakashi Furuya
    • G01R31/26
    • C23C16/56H01L21/02395H01L21/02543H01L33/007H01L33/46
    • In a manufacturing method of a semiconductor photonic device substrate, before multi-layer films different in material composition are successively and gradually crystal-grown in one chamber, an inter-layer growth rate model showing a relation in growth rate between each layer is defined, a growth rate of a film corresponding to at least one or more layers is obtained by actual crystal growth using an individual substrate, a growth rate of a film corresponding to other layers is estimated from the obtained growth rate by the inter-layer growth rate model, and a growth time is determined in accordance with a film thickness of each layer of the semiconductor photonic device substrate based on the actually obtained growth rate and the estimated growth rate. These steps are carried out by using a computer system connected to an MOCVD equipment, and then, a crystal growth of the semiconductor photonic device substrate is performed.
    • 在半导体光子器件衬底的制造方法中,在不同材料组成的多层膜在一个室中连续逐渐晶体生长的情况下,定义表示各层之间的生长速度关系的层间生长速率模型, 通过使用单个基板的实际晶体生长获得对应于至少一个或多个层的膜的生长速率,通过层间生长速率模型从获得的生长速率估计与其它层相对应的膜的生长速率 根据实际获得的生长速度和估计的生长速度,根据半导体光子器件基板的各层的膜厚确定生长时间。 这些步骤通过使用连接到MOCVD设备的计算机系统进行,然后执行半导体光子器件衬底的晶体生长。