会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 6. 发明申请
    • Capacitive Pressure Sensor
    • 电容式压力传感器
    • US20070209443A1
    • 2007-09-13
    • US11597110
    • 2005-05-12
    • Yasuhide YoshikawaYoshiyuki IshikuraToru Yamaguchi
    • Yasuhide YoshikawaYoshiyuki IshikuraToru Yamaguchi
    • G01L9/12
    • G01L9/0075G01L9/125
    • In a capacitance type pressure sensor (1) including capacitance detecting portions formed in opposed regions in a capacitance chamber which is at least partially formed of a diaphragm, the capacitance detecting portions being a pressure-sensitive capacitance detecting portion (101) formed in a region of the diaphragm having large sensitivity with respect to a pressure and a reference capacitance detecting portion (102) formed in a region of the diaphragm having small sensitivity with respect to a pressure, there is provided the capacitance type pressure sensor which is entirely small in size and superior in reliability by independently detecting a signal output value of the reference capacitance detecting portion (102).
    • 在电容式压力传感器(1)中,电容式检测部分形成在至少部分地由隔膜形成的电容室的相对区域中形成的电容检测部分,电容检测部分是形成在区域中的压敏电容检测部分 相对于压力具有较大灵敏度的膜片和形成在相对于压力的灵敏度小的膜片的区域中的参考电容检测部分(102),提供了尺寸完全小的电容式压力传感器 并且通过独立地检测参考电容检测部分(102)的信号输出值而具有优异的可靠性。
    • 10. 发明授权
    • Capacitive pressure sensor isolating electrodes from external environment
    • 电容式压力传感器隔离电极与外部环境
    • US5479827A
    • 1996-01-02
    • US319532
    • 1994-10-07
    • Shigeo KimuraYoshiyuki IshikuraTakashi KiharaTakashi Masuda
    • Shigeo KimuraYoshiyuki IshikuraTakashi KiharaTakashi Masuda
    • G01L9/00G01L13/06
    • G01L9/0075
    • A capacitive pressure sensor is provided which is capable of highly accurately and reliably measuring pressure over a wide range from an extremely low level to a high level without being affected by environmental changes. The capacitive pressure sensor is constructed of a first diaphragm; a second diaphragm arranged in parallel with the first diagram; a diaphragm support arranged between the first and second diaphragms for supporting the first and second diaphragms along the periphery thereof to define a space isolated from the outside; a plurality of pillars having respective ends fixed on the opposing surfaces of the first and second diaphragms for securely supporting the first and second diaphragms; a movable electrode formed on one of the opposing surfaces of the first and second diaphragms; and a fixed electrode formed in the space without contacting with the plurality of pillars and securely supported by the diaphragm support. Pressure values measured by the capacitive pressure sensor are substantially free from errors due to fluctuations in atmospheric pressure and errors caused by aging changes of residual stress on the bonding interface.
    • 提供一种电容式压力传感器,其能够在不受环境变化影响的情况下,从极低水平到高水平的高范围高度准确可靠地测量压力。 电容式压力传感器由第一隔膜构成; 与第一图平行设置的第二隔膜; 隔膜支撑件,布置在第一和第二隔膜之间,用于沿其周边支撑第一和第二隔膜以限定与外部隔离的空间; 多个支柱,其各自的端部固定在第一和第二隔膜的相对表面上,用于牢固地支撑第一和第二隔膜; 形成在所述第一和第二隔膜的相对表面之一上的可动电极; 以及固定电极,其形成在所述空间中,而不与所述多个支柱接触并且被所述隔膜支撑件牢固地支撑。 由电容压力传感器测量的压力值基本上没有由于大气压力的波动和由接合界面上的残余应力的老化变化引起的误差的误差。