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    • 1. 发明申请
    • VAPORIZATION APPARATUS WITH PRECISE POWDER METERING
    • 具有精密粉末计量的蒸发装置
    • US20110076403A1
    • 2011-03-31
    • US12959803
    • 2010-12-03
    • Michael LONGThomas W. PaloneBruce E. KoppeMichael L. Boroson
    • Michael LONGThomas W. PaloneBruce E. KoppeMichael L. Boroson
    • C23C16/02
    • C23C14/246C23C16/4486
    • Apparatus for vaporizing a particulate material, comprising a metering apparatus including: a reservoir; a housing having an internal volume and first and second openings for respectively receiving and discharging the particulate material; a rotatable shaft disposed in the internal volume, the shaft having a smooth surface and a circumferential groove for receiving particulate material from the reservoir and for discharging the particulate material; the rotatable shaft and the internal volume cooperating such that the particulate material is transported by the circumferential groove and not along the remainder of the rotatable shaft; a scraper disposed in relation to the second opening, having at its end substantially the same cross section as the groove in the rotating shaft, the scraper cooperating with the groove to dislodge particulate material retained therein, and in response to the shaft rotating, delivers metered amounts of particulate material through the second opening; to the flash evaporator.
    • 用于蒸发颗粒材料的装置,包括计量装置,包括:储存器; 具有内部体积的壳体和用于分别接收和排出颗粒材料的第一和第二开口; 设置在所述内部容积中的可旋转轴,所述轴具有光滑表面和用于从所述储存器接收颗粒材料并用于排出所述颗粒材料的周向槽; 所述可旋转轴和所述内部容积协调使得所述颗粒材料由所述圆周凹槽而不是沿着所述可旋转轴的其余部分输送; 相对于第二开口设置的刮刀,其端部与旋转轴中的槽基本相同的横截面,刮刀与槽配合以移除保留在其中的颗粒材料,并且响应于轴旋转,传送计量 通过第二开口的颗粒材料的量; 到闪蒸器。
    • 3. 发明授权
    • Vaporization apparatus with precise powder metering
    • 具有精密粉末计量的气化装置
    • US07883583B2
    • 2011-02-08
    • US11970548
    • 2008-01-08
    • Michael LongThomas W. PaloneBruce E. KoppeMichael L. Boroson
    • Michael LongThomas W. PaloneBruce E. KoppeMichael L. Boroson
    • C23C16/448C23F1/00H01L21/306C23C16/06C23C16/22
    • C23C14/246C23C16/4486
    • Apparatus for vaporizing a particulate material, comprising a metering apparatus including: a reservoir; a housing having an internal volume and first and second openings for respectively receiving and discharging the particulate material; a rotatable shaft disposed in the internal volume, the shaft having a smooth surface and a circumferential groove for receiving particulate material from the reservoir and for discharging the particulate material; the rotatable shaft and the internal volume cooperating such that the particulate material is transported by the circumferential groove and not along the remainder of the rotatable shaft; a scraper disposed in relation to the second opening, having at its end substantially the same cross section as the groove in the rotating shaft, the scraper cooperating with the groove to dislodge particulate material retained therein, and in response to the shaft rotating, delivers metered amounts of particulate material through the second opening; to the flash evaporator.
    • 用于蒸发颗粒材料的装置,包括计量装置,包括:储存器; 具有内部体积的壳体和用于分别接收和排出颗粒材料的第一和第二开口; 设置在所述内部容积中的可旋转轴,所述轴具有光滑表面和用于从所述储存器接收颗粒材料并用于排出所述颗粒材料的周向槽; 所述可旋转轴和所述内部容积协调使得所述颗粒材料由所述圆周凹槽而不是沿着所述可旋转轴的其余部分输送; 相对于第二开口设置的刮刀,其端部与旋转轴中的槽基本相同的横截面,刮刀与槽配合以移除保留在其中的颗粒材料,并且响应于轴旋转,传送计量 通过第二开口的颗粒材料的量; 到闪蒸器。
    • 5. 发明授权
    • Vaporization apparatus with precise powder metering
    • 具有精密粉末计量的气化装置
    • US08101235B2
    • 2012-01-24
    • US12959803
    • 2010-12-03
    • Michael LongThomas W. PaloneBruce E. KoppeMichael L. Boroson
    • Michael LongThomas W. PaloneBruce E. KoppeMichael L. Boroson
    • C23C16/02C23C16/448C23C16/54C23C16/00C23C16/06C23C16/22
    • C23C14/246C23C16/4486
    • Apparatus for vaporizing a particulate material, comprising a metering apparatus including: a reservoir; a housing having an internal volume and first and second openings for respectively receiving and discharging the particulate material; a rotatable shaft disposed in the internal volume, the shaft having a smooth surface and a circumferential groove for receiving particulate material from the reservoir and for discharging the particulate material; the rotatable shaft and the internal volume cooperating such that the particulate material is transported by the circumferential groove and not along the remainder of the rotatable shaft; a scraper disposed in relation to the second opening, having at its end substantially the same cross section as the groove in the rotating shaft, the scraper cooperating with the groove to dislodge particulate material retained therein, and in response to the shaft rotating, delivers metered amounts of particulate material through the second opening; to the flash evaporator.
    • 用于蒸发颗粒材料的装置,包括计量装置,包括:储存器; 具有内部体积的壳体和用于分别接收和排出颗粒材料的第一和第二开口; 设置在所述内部容积中的可旋转轴,所述轴具有光滑表面和用于从所述储存器接收颗粒材料并用于排出所述颗粒材料的周向槽; 所述可旋转轴和所述内部容积协调使得所述颗粒材料由所述圆周凹槽而不是沿着所述可旋转轴的其余部分输送; 相对于第二开口设置的刮刀,其端部与旋转轴中的槽基本相同的横截面,刮刀与槽配合以移除保留在其中的颗粒材料,并且响应于轴旋转,传送计量 通过第二开口的颗粒材料的量; 到闪蒸器。
    • 8. 发明申请
    • VAPORIZATION APPARATUS WITH PRECISE POWDER METERING
    • 具有精密粉末计量的蒸发装置
    • US20090176016A1
    • 2009-07-09
    • US11970548
    • 2008-01-08
    • Michael LongThomas W. PaloneBurce E. KoppeMichael L. Boroson
    • Michael LongThomas W. PaloneBurce E. KoppeMichael L. Boroson
    • C23C16/448C23C16/54
    • C23C14/246C23C16/4486
    • Apparatus for vaporizing a particulate material, comprising a metering apparatus including: a reservoir; a housing having an internal volume and first and second openings for respectively receiving and discharging the particulate material; a rotatable shaft disposed in the internal volume, the shaft having a smooth surface and a circumferential groove for receiving particulate material from the reservoir and for discharging the particulate material; the rotatable shaft and the internal volume cooperating such that the particulate material is transported by the circumferential groove and not along the remainder of the rotatable shaft; a scraper disposed in relation to the second opening, having at its end substantially the same cross section as the groove in the rotating shaft, the scraper cooperating with the groove to dislodge particulate material retained therein, and in response to the shaft rotating, delivers metered amounts of particulate material through the second opening; to the flash evaporator.
    • 用于蒸发颗粒材料的装置,包括计量装置,包括:储存器; 具有内部体积的壳体和用于分别接收和排出颗粒材料的第一和第二开口; 设置在所述内部容积中的可旋转轴,所述轴具有光滑表面和用于从所述储存器接收颗粒材料并用于排出所述颗粒材料的周向槽; 所述可旋转轴和所述内部容积协调使得所述颗粒材料由所述圆周凹槽而不是沿着所述可旋转轴的其余部分输送; 相对于第二开口设置的刮刀,其端部与旋转轴中的槽基本相同的横截面,刮刀与槽配合以移除保留在其中的颗粒材料,并且响应于轴旋转,传送计量 通过第二开口的颗粒材料的量; 到闪蒸器。