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    • 1. 发明授权
    • Active pad patterns for gate alignment marks
    • 栅极对准标记的主动焊盘图案
    • US08956946B2
    • 2015-02-17
    • US13721611
    • 2012-12-20
    • Ming Hao TangMichael HsiehFrank Kahlenberg
    • Ming Hao TangMichael HsiehFrank Kahlenberg
    • H01L23/544G03F9/00
    • H01L23/544G03F9/7073G03F9/7084H01L2924/0002H01L2924/00
    • Methods for forming RX pads having gate alignment marks configured to enable noise reduction between layers while resulting in little or no non-uniformity of CMP processes for the IC, and the resulting devices, are disclosed. Embodiments include: providing, on a substrate, a RX pad having a SPM with a SPM horizontal and vertical positions at horizontal and vertical midpoints, respectively, of the first RX pad; providing a second RX pad abutting the first RX pad and a first STI pad abutting the second RX pad, each having a vertical midpoint at the SPM vertical position; forming a first gate alignment mark on the second RX pad and having vertical endpoints horizontally aligned with vertical endpoints of the second RX pad; and forming a second gate alignment mark on the first STI pad and having vertical endpoints horizontally aligned with vertical endpoints of the first STI pad.
    • 用于形成具有栅极对准标记的RX焊盘的方法,其被配置为使得能够降低层之间的噪声,同时导致IC的CMP工艺和所得到的器件几乎不或不均匀。 实施例包括:在衬底上分别在第一RX垫的水平和垂直中点处提供具有SPM的SPM水平和垂直位置的RX垫的RX垫; 提供邻接所述第一RX垫的第二RX垫和邻接所述第二RX垫的第一STI垫,每个具有在所述SPM垂直位置处的垂直中点; 在所述第二RX焊盘上形成第一栅极对准标记,并且具有与所述第二RX焊盘的垂直端点水平对准的垂直端点; 以及在所述第一STI焊盘上形成第二栅极对准标记,并且具有与所述第一STI焊盘的垂直端点水平对准的垂直端点。
    • 3. 发明授权
    • Proton-conductive membranes and layers and methods for their production
    • 质子导电膜及其制备方法
    • US07470761B2
    • 2008-12-30
    • US11208553
    • 2005-08-23
    • Stéphane JacobLothar FröhlichKonrad OlmaMichael PopallFrank Kahlenberg
    • Stéphane JacobLothar FröhlichKonrad OlmaMichael PopallFrank Kahlenberg
    • C08F30/08
    • C08L83/08B01D71/70C08G77/26C08G77/28H01M8/1037H01M8/1048H01M8/1074Y02P70/56
    • This invention relates to a silane-resin composition that can be obtained by at least partial hydrolytic condensation of at least the following components: (1) one or more sulfonic acid group-containing silane(s) with at least one group that can be cleaved under hydrolytic conditions, (2) one or more styryl-functionalized silane(s) and (3) one or more silane(s) that carry a nitrogen-containing heterocyclic compound, an amine group or a sulfonamide group with at least one group that can be cleaved under hydrolytic conditions, and mixing of the components before, during or after the hydrolytic condensation, as well as a process for the production of this composition. With the silane resin that is obtained, proton-conductive, organically cross-linked heteropolysiloxanes can be produced that are suitable for PEMFC in a layer or membrane form as proton-conductive systems. Their proton conductivity can be further increased by the addition of suitable liquids.
    • 本发明涉及可以通过至少以下组分至少部分水解缩合获得的硅烷 - 树脂组合物:(1)一种或多种含有磺酸基的硅烷与至少一个可被切割的基团 在水解条件下,(2)一种或多种苯乙烯基官能化的硅烷和(3)一种或多种含有至少一个基团的含氮杂环化合物,胺基或磺酰胺基团的硅烷, 可以在水解条件下裂解,并且在水解缩合之前,期间或之后混合组分,以及制备该组合物的方法。 使用得到的硅烷树脂,可以制备质子传导性有机交联杂多硅氧烷,其适用于作为质子传导系统的层或膜形式的PEMFC。 通过加入合适的液体可以进一步提高其质子传导性。