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    • 7. 发明授权
    • Heating device
    • 加热装置
    • US07390990B2
    • 2008-06-24
    • US11689654
    • 2007-03-22
    • Mitsuru OhtaMasao Nishioka
    • Mitsuru OhtaMasao Nishioka
    • F27D11/00H05B3/68
    • H05B3/143H01L21/67103H05B2214/04
    • A heating device is provided, including an insulating ceramic base having a heating surface for heating an object. A high frequency electrode is embedded in the insulating ceramic base in the vicinity of the heating surface, and a heating body is embedded in the base in a location that is further from the heating surface than the location of the high frequency electrode. A low resistance ceramic member is provided so as to be exposed to a part of the heating surface of the insulating ceramic base and to be connected to a conductive member inside of the insulating ceramic base. A main component of the material of the low resistance ceramic member is common to that of the insulating ceramic base, and the respective thermal expansion coefficients are equivalent.
    • 提供一种加热装置,包括具有用于加热物体的加热表面的绝缘陶瓷基座。 高频电极埋设在加热面附近的绝缘陶瓷基体中,并且加热体嵌入在比加热面更靠近高频电极的位置的基部。 提供低电阻陶瓷部件,以暴露于绝缘陶瓷基体的加热面的一部分,并与绝缘陶瓷基体内部的导电部件连接。 低电阻陶瓷元件材料的主要成分与绝缘陶瓷基体的材料相同,各自的热膨胀系数相等。