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1. 发明授权

US11366070B2 Pulsed light generation device, pulsed light generation method, exposure apparatus having pulsed light generation device and inspection apparatus having pulsed light generation device 有权
公开(公告)号：US11366070B2
公开(公告)日：2022-06-21
申请号：US16200166
申请日：2018-11-26
申请人： NIKON CORPORATION
发明人： Akira Tokuhisa
IPC分类号： G03F1/84 , H01S3/10 , G01N21/956 , G03F7/20 , H01S3/00 , G02F1/21 , H01S5/00
摘要： A pulsed light generation device includes: an optical coupler having four input/output ports including a first port, a second port, a third port and a fourth port; a connection optical path that connects the third port with the fourth port; and a phase modulation element disposed in the connection optical path. The optical coupler branches pulsed light input to the first port and outputs the branched input pulsed light as first-direction pulsed light and second-direction pulsed light to the third port and to the fourth port. The modulation element applies phase modulation to either one of the first-direction pulsed light and the second-direction pulsed light, thereby outputs output pulsed lights through the first port and the second port, wherein a waveform of one of the pulsed lights output through the first port is different from a waveform of the other of the output pulsed lights output through the second port.

2. 发明授权

US09608400B2 Laser device, and exposure device and inspection device provided with laser device 有权
公开(公告)号：US09608400B2
公开(公告)日：2017-03-28
申请号：US14417986
申请日：2013-07-31
申请人： NIKON CORPORATION
发明人： Akira Tokuhisa
IPC分类号： G03B27/54 , G03B27/74 , H01S3/23 , H01S5/00 , H01S5/0683 , G01N21/88 , G03F7/20 , H01S3/067 , H01S3/16 , H01S5/062 , H01S5/40
CPC分类号： H01S3/2391 , G01N21/88 , G01N2201/06113 , G03F7/70058 , H01S3/06754 , H01S3/1618 , H01S5/0092 , H01S5/06216 , H01S5/06246 , H01S5/0683 , H01S5/4087
摘要： A laser device, includes: a laser light generating unit generates laser lights with first and second wavelengths; an amplifying unit amplifies the lights with first and second wavelengths the first and the second amplified lights; a wavelength converting unit that generates a light output, either of first converted light wavelength conversion of the first amplified light and the second amplified light, or of the first converted light and the second converted light wavelength conversion of the second amplified light; and a control unit that controls operation of the laser light generating unit, wherein: the control unit controls an output condition of the light output by adjusting a temporal overlap, of the first converted light and the second amplified light, or the first and second converted lights, through control of relative timings of the laser light with the first and second wavelengths.

3. 发明授权

US11303091B2 Pulsed light generation device, pulsed light generation method, exposure apparatus having pulsed light generation device and inspection apparatus having pulsed light generation device 有权
公开(公告)号：US11303091B2
公开(公告)日：2022-04-12
申请号：US16733534
申请日：2020-01-03
申请人： NIKON CORPORATION
发明人： Akira Tokuhisa
IPC分类号： H01S3/10 , H01S5/40 , H01S5/00 , G01N21/956 , G02F1/35 , G03F7/20 , H01S3/067 , H01S3/094 , H01S5/12 , G02F1/355
摘要： A pulsed light generation device, includes: a first optical fiber through which first pulsed light and second pulsed light, having an intensity that decreases while an intensity of the first pulsed light increases, and increases while the intensity of the first pulsed light decreases, having been multiplexed and entered therein, are propagated; and a second optical fiber at which the first pulsed light, having exited the first optical fiber and entered therein, is amplified while being propagated therein, wherein: at the first optical fiber, phase modulation occurs in the first pulsed light due to cross phase modulation caused by the second pulsed light; and self-phase modulation occurring in the first pulsed light at the second optical fiber is diminished by the phase modulation having occurred at the first optical fiber.

4. 发明授权

US10559937B2 Pulsed light generation device, pulsed light generation method, exposure apparatus having pulsed light generation device and inspection apparatus having pulsed light generation device 有权
公开(公告)号：US10559937B2
公开(公告)日：2020-02-11
申请号：US16200106
申请日：2018-11-26
申请人： NIKON CORPORATION
发明人： Akira Tokuhisa
IPC分类号： H01S3/10 , G01N21/956 , G02F1/35 , G03F7/20 , H01S3/067 , H01S3/094 , G02F1/355
摘要： A pulsed light generation device, includes: a first optical fiber through which first pulsed light and second pulsed light, having an intensity that decreases while an intensity of the first pulsed light increases, and increases while the intensity of the first pulsed light decreases, having been multiplexed and entered therein, are propagated; and a second optical fiber at which the first pulsed light, having exited the first optical fiber and entered therein, is amplified while being propagated therein, wherein: at the first optical fiber, phase modulation occurs in the first pulsed light due to cross phase modulation caused by the second pulsed light; and self-phase modulation occurring in the first pulsed light at the second optical fiber is diminished by the phase modulation having occurred at the first optical fiber.

5. 发明申请

US20150116680A1 ULTRAVIOLET LASER DEVICE, AND EXPOSURE DEVICE AND INSPECTION DEVICE PROVIDED WITH ULTRAVIOLET LASER DEVICE 有权
标题翻译：超紫外线激光装置，以及具有紫外线激光装置的曝光装置和检查装置
公开(公告)号：US20150116680A1
公开(公告)日：2015-04-30
申请号：US14382093
申请日：2013-03-05
申请人： NIKON CORPORATION
发明人： Akira Tokuhisa
IPC分类号： G03F7/20
CPC分类号： G03F7/70191 , G02F1/353 , G02F1/3534 , G02F2001/3507 , G03F7/70025 , H01S3/0092 , H01S3/06754 , H01S3/1608 , H01S3/1618 , H01S3/2391
摘要： An ultraviolet laser device, includes: a first laser light output unit outputs a first infrared laser light; a second laser light output unit outputs a second infrared laser light; a first wavelength conversion optical system generates a first ultraviolet laser light of a fifth harmonic of the first infrared laser light; and a second wavelength conversion optical system to which the first ultraviolet laser light and the second infrared laser light enter, wherein the second wavelength conversion optical system includes a first wavelength conversion optical element which generates a second ultraviolet laser light by sum frequency generation of the first ultraviolet laser light and the second infrared laser light, and a second wavelength conversion optical element which generates a deep ultraviolet laser light by sum frequency generation of the second ultraviolet laser light and the second infrared laser light.
摘要翻译：一种紫外线激光装置，包括：第一激光输出部，输出第一红外线激光; 第二激光输出单元输出第二红外激光; 第一波长转换光学系统产生第一红外激光的五次谐波的第一紫外激光; 以及第一波长转换光学系统，其中所述第一紫外激光和所述第二红外激光入射到所述第二波长转换光学系统，其中所述第二波长转换光学系统包括通过所述第一波长转换光学系统的和频产生产生第二紫外激光紫外线激光和第二红外激光，以及通过第二紫外激光和第二红外激光的和频产生产生深紫外线激光的第二波长转换光学元件。

6. 发明授权

US10044160B2 Pulsed light generating method, pulse laser apparatus, exposure apparatus having pulse laser apparatus, and inspection apparatus having pulse laser apparatus 有权
公开(公告)号：US10044160B2
公开(公告)日：2018-08-07
申请号：US15238064
申请日：2016-08-16
申请人： NIKON CORPORATION
发明人： Naoto Inaba , Akira Tokuhisa
IPC分类号： G03B27/72 , H01S3/00 , G03F7/20
摘要： A pulsed light generating method for generating a pulsed light by cutting out a laser light outputted from a laser light source with an intensity modulation type electro optic modulator, wherein: the electro optic modulator is driven by use of a drive signal that changes a voltage applied to the electro optic modulator between a voltage lower than a reference voltage and a voltage higher than the reference voltage, the reference voltage being a voltage applied to the electro optic modulator at which a transmittance of the laser light transmitting through the electro optic modulator is local maximum.

7. 发明授权

US09383653B2 Ultraviolet laser device, and exposure device and inspection device provided with ultraviolet laser device 有权
标题翻译：紫外线激光装置，以及配有紫外线激光装置的曝光装置和检查装置
公开(公告)号：US09383653B2
公开(公告)日：2016-07-05
申请号：US14382093
申请日：2013-03-05
申请人： NIKON CORPORATION
发明人： Akira Tokuhisa
IPC分类号： G03B27/54 , G03F7/20 , H01S3/23 , H01S3/00 , G02F1/35 , H01S3/067 , H01S3/16
CPC分类号： G03F7/70191 , G02F1/353 , G02F1/3534 , G02F2001/3507 , G03F7/70025 , H01S3/0092 , H01S3/06754 , H01S3/1608 , H01S3/1618 , H01S3/2391
摘要： An ultraviolet laser device, includes: a first laser light output unit outputs a first infrared laser light; a second laser light output unit outputs a second infrared laser light; a first wavelength conversion optical system generates a first ultraviolet laser light of a fifth harmonic of the first infrared laser light; and a second wavelength conversion optical system to which the first ultraviolet laser light and the second infrared laser light enter, wherein the second wavelength conversion optical system includes a first wavelength conversion optical element which generates a second ultraviolet laser light by sum frequency generation of the first ultraviolet laser light and the second infrared laser light, and a second wavelength conversion optical element which generates a deep ultraviolet laser light by sum frequency generation of the second ultraviolet laser light and the second infrared laser light.
摘要翻译：一种紫外线激光装置，包括：第一激光输出部，输出第一红外线激光; 第二激光输出单元输出第二红外激光; 第一波长转换光学系统产生第一红外激光的五次谐波的第一紫外激光; 以及第一波长转换光学系统，其中所述第一紫外激光和所述第二红外激光入射到所述第二波长转换光学系统，其中所述第二波长转换光学系统包括通过所述第一波长转换光学系统的和频产生产生第二紫外激光紫外线激光和第二红外激光，以及通过第二紫外激光和第二红外激光的和频产生产生深紫外线激光的第二波长转换光学元件。

8. 发明授权

US09882340B2 Laser device, and exposure device and inspection device provided with the laser device 有权
公开(公告)号：US09882340B2
公开(公告)日：2018-01-30
申请号：US15137630
申请日：2016-04-25
申请人： NIKON CORPORATION
发明人： Akira Tokuhisa
IPC分类号： H01S3/067 , G03F7/20 , H01S3/10 , H01S3/23 , H01S3/16 , H01S3/00
CPC分类号： H01S3/06754 , G02F1/353 , G02F2001/354 , G03F7/70025 , H01S3/0085 , H01S3/0092 , H01S3/10015 , H01S3/1003 , H01S3/1618 , H01S3/2391
摘要： A laser device includes: a laser light source which generates a laser light in a pulse waveform of preset predetermined frequency; intensity modulator which is driven with a transmittance waveform wherein transmittance changes at either the predetermined frequency or an integer-multiple frequency thereof and which extracts and outputs the laser light which is outputted from the laser light source; control unit which controls an operation of the intensity modulator; an amplifier which amplifies the laser light which is outputted from the intensity modulator; and a wavelength conversion optical element which converts a wavelength of the laser light which is amplified by the amplifier, wherein the control unit changes relative timing of the transmittance waveform with respect to the pulse waveform, thereby changing the pulse waveform of the laser light which is emitted from the intensity modulator, to output a pulse light of predetermined waveform from the wavelength conversion optical element.

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