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    • 1. 发明申请
    • Threshold voltage modulation image sensor
    • 阈值电压调制图像传感器
    • US20050285165A1
    • 2005-12-29
    • US11089366
    • 2005-03-25
    • Narumi OhkawaMasayoshi AsanoToshio Nomura
    • Narumi OhkawaMasayoshi AsanoToshio Nomura
    • H01L27/146H01L31/062H04N5/335H04N5/369H04N5/374
    • H01L27/14609H01L27/14603H01L27/1463H01L27/14689
    • An image sensor has a plurality of pixels each with a photoelectric conversion element and a detection transistor the threshold voltage of which fluctuates in accordance with electrical charge generated in the photoelectric conversion element. The image sensor includes a second conductivity type shield region and a first conductivity type photoelectric conversion region; a first conductivity type well region linked to the photoelectric conversion region; a ring-like gate electrode; a second conductivity type source region at the inside of the ring-like gate electrode; a second conductivity type drain region. The image sensor further includes a potential pocket region that is formed in the well region below the ring-like gate electrode and accumulates the electrical charge, wherein the width of the gate electrode is formed narrower in the part adjacent to the photoelectric conversion region than in other parts.
    • 图像传感器具有多个像素,每个像素具有光电转换元件和阈值电压根据光电转换元件中产生的电荷而波动的检测晶体管。 图像传感器包括第二导电类型屏蔽区域和第一导电类型光电转换区域; 连接到光电转换区的第一导电类型阱区; 环状栅电极; 位于环状栅电极内部的第二导电型源区; 第二导电类型漏极区域。 图像传感器还包括形成在环状栅极电极下方的阱区中的电势袋区域,并蓄积电荷,其中栅电极的宽度在与光电转换区相邻的部分形成得比在 其他部分。
    • 2. 发明授权
    • Threshold voltage modulation image sensor
    • 阈值电压调制图像传感器
    • US07683452B2
    • 2010-03-23
    • US11089366
    • 2005-03-25
    • Narumi OhkawaMasayoshi AsanoToshio Nomura
    • Narumi OhkawaMasayoshi AsanoToshio Nomura
    • H01L27/146
    • H01L27/14609H01L27/14603H01L27/1463H01L27/14689
    • An image sensor has a plurality of pixels each with a photoelectric conversion element and a detection transistor the threshold voltage of which fluctuates in accordance with electrical charge generated in the photoelectric conversion element. The image sensor includes a second conductivity type shield region and a first conductivity type photoelectric conversion region; a first conductivity type well region linked to the photoelectric conversion region; a ring-like gate electrode; a second conductivity type source region at the inside of the ring-like gate electrode; a second conductivity type drain region. The image sensor further includes a potential pocket region that is formed in the well region below the ring-like gate electrode and accumulates the electrical charge, wherein the width of the gate electrode is formed narrower in the part adjacent to the photoelectric conversion region than in other parts.
    • 图像传感器具有多个像素,每个像素具有光电转换元件和阈值电压根据光电转换元件中产生的电荷而波动的检测晶体管。 图像传感器包括第二导电类型屏蔽区域和第一导电类型光电转换区域; 连接到光电转换区的第一导电类型阱区; 环状栅电极; 位于环状栅电极内部的第二导电型源区; 第二导电类型漏极区域。 图像传感器还包括形成在环状栅极电极下方的阱区中的电势袋区域,并蓄积电荷,其中栅电极的宽度在与光电转换区相邻的部分形成得比在 其他部分。
    • 9. 发明申请
    • Semiconductor device and its manufacture method
    • 半导体器件及其制造方法
    • US20060084208A1
    • 2006-04-20
    • US11242648
    • 2005-10-04
    • Masayoshi AsanoToshio NomuraTaiji Ema
    • Masayoshi AsanoToshio NomuraTaiji Ema
    • H01L21/337
    • H01L21/82385H01L21/823814H01L21/823857
    • A simplified method of manufacturing a multi-voltage semiconductor integrated circuit device. A method of manufacturing a semiconductor device includes the steps of: forming a first gate insulating film with a first thickness in a first area of a semiconductor substrate: forming a second gate insulating film with a second thickness thinner than the first thickness in a second area of the semiconductor substrate; forming on gate electrodes on the first and second gate insulating films and leaving the first and second gate insulating films in the first and second areas; implanting impurity ions into the first and second areas via the first and second gate insulating films to dope impurities into the first area at a first low impurity concentration and into the second area at a second impurity concentration higher than the first impurity concentration; removing the first and second gate insulating films at least in an area where contacts are formed; and doping impurities at a high impurity concentration in an area including the area where contacts are formed, in the first and second areas.
    • 一种制造多电压半导体集成电路器件的简化方法。 一种制造半导体器件的方法包括以下步骤:在半导体衬底的第一区域中形成具有第一厚度的第一栅极绝缘膜:在第二区域中形成具有比第一厚度更薄的第二厚度的第二栅极绝缘膜 的半导体衬底; 在所述第一和第二栅极绝缘膜上的栅电极上形成并且在所述第一和第二区域中留下所述第一和第二栅极绝缘膜; 通过第一和第二栅极绝缘膜将杂质离子注入到第一和第二区域中,以在第一低杂质浓度下杂质掺杂到第一区域,并以高于第一杂质浓度的第二杂质浓度进入第二区域; 至少在形成接触的区域中去除第一和第二栅极绝缘膜; 并且在第一和第二区域中在包括形成接触的区域的区域中掺杂高杂质浓度的杂质。