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1. 发明授权

US08810799B2 Height-measuring method and height-measuring device 有权
标题翻译：高度测量方法和高度测量装置
公开(公告)号：US08810799B2
公开(公告)日：2014-08-19
申请号：US13670133
申请日：2012-11-06
申请人： Nikon Corporation
发明人： Takashi Nishikawa
IPC分类号： G01B11/24
CPC分类号： G01B11/06 , G01B11/0608 , G06T7/55
摘要： A height-measuring device (100) in which the focal position of an image-forming optical system (20) is moved in relative fashion in the direction of an optical axis with respect to an object (10) to be measured; scanning is performed; images of the object (10) to be measured, which are formed by the image-forming optical system (20), are obtained in order; and the focal position for individual pixels of the images is found, thereby yielding a relative height value of the object to be measured (10) at positions corresponding to the pixels; wherein a second function (g) is defined on the basis of a first function (f) fitted to a numerical value sequence comprising a coordinate value on the optical axis and a light intensity value for the pixels of a plurality of the images obtained by the scanning, or the coordinate value and a numerical value obtained by processing the light intensity value; and positions on the optical axis at which a correlation value between the numerical value sequence and the second function (g) becomes a maximum value or a minimum value serve as the relative height values of the object to be measured at the positions corresponding to the pixels.
摘要翻译：一种高度测量装置（100），其中成像光学系统（20）的焦点位置相对于被测量物体（10）在光轴方向上相对移动; 执行扫描; 依次获得由图像形成光学系统（20）形成的被测量物体（10）的图像; 并且找到图像的各个像素的焦点位置，从而在对应于像素的位置产生待测量对象（10）的相对高度值; 其中第二函数（g）基于拟合到包括光轴上的坐标值的数值序列的第一函数（f）和由所述光轴获得的多个图像的像素的光强度值来定义扫描或坐标值和通过处理光强度值获得的数值; 以及在数值序列与第二函数（g）之间的相关值变为最大值或最小值的光轴上的位置用作在与像素对应的位置处的被测量物体的相对高度值。

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