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1. 发明公开

US20230369015A1 COVERAGE CALCULATING METHOD, CHARGED PARTICLE BEAM WRITING METHOD, COVERAGE CALCULATING DEVICE, CHARGED PARTICLE BEAM WRITING APPARATUS, AND COMPUTER-READABLE STORAGE MEDIUM 审中-公开
公开(公告)号：US20230369015A1
公开(公告)日：2023-11-16
申请号：US18299749
申请日：2023-04-13
申请人： NuFlare Technology, Inc.
发明人： Kenichi YASUI , Yasuo KATO
IPC分类号： H01J37/317 , H01J37/302 , H01J37/04
CPC分类号： H01J37/3177 , H01J37/3026 , H01J37/045 , H01J2237/31762
摘要： In one embodiment, a coverage calculating method is for calculating a coverage of a pattern in each of pixel regions obtained by dividing a writing region onto which the pattern is to be written by irradiation with a charged particle beam. Each of the pixel regions has a predetermined size. The method includes generating a plurality of first pixel regions by virtually dividing the writing region, the first pixel regions each having a first size, calculating a coverage of a pattern in the first pixel region, generating a plurality of second pixel regions by virtually dividing the first pixel region, the second pixel regions each having a second size smaller than the first size, selecting a second pixel region approximating a pattern shape in the first pixel region, and calculating a coverage in the selected second pixel region.

2. 发明申请

US20160103945A1 METHOD OF GENERATING WRITE DATA, MULTI CHARGED PARTICLE BEAM WRITING APPARATUS, AND PATTERN INSPECTION APPARATUS 有权
标题翻译：生成数据的方法，多重粒子束写入装置和图案检查装置
公开(公告)号：US20160103945A1
公开(公告)日：2016-04-14
申请号：US14794060
申请日：2015-07-08
申请人： NuFlare Technology, Inc.
发明人： Kenichi YASUI , Shigehiro HARA
IPC分类号： G06F17/50 , H01J37/302 , H01J37/26 , H01J37/317
CPC分类号： G06F17/5081 , G06F17/5072 , H01J37/3026 , H01J37/3177 , H01J2237/31764
摘要： In one embodiment, a method of generating write data generates write data for a multi charged particle beam writing apparatus. The method includes dividing a polygonal figure included in design data into a plurality of figure segments including trapezoids each having a pair of parallel opposite sides extending in a first direction, the trapezoids being connected in a second direction orthogonal to the first direction such that adjacent trapezoids share the side extending in the first direction as a common side, and generates the write data including position information of a common vertex of a first trapezoid and a second trapezoid next to the first trapezoid expressed by a displacement in the first and second directions from a position of a common vertex of the second trapezoid and a third trapezoid next to the second trapezoid.
摘要翻译：在一个实施例中，生成写入数据的方法产生用于多带电粒子束写入装置的写入数据。该方法包括将包括在设计数据中的多边形图形分成多个图形段，每个图形段包括梯形，每个梯形具有沿第一方向延伸的一对平行的相对侧，所述梯形沿与第一方向正交的第二方向连接，使得相邻的梯形共享作为公共侧在第一方向上延伸的一侧，并且生成写入数据，其包括由第一和第二方向上的位移表示的第一梯形旁边的第一梯形和第二梯形的公共顶点的位置信息，第二梯形的公共顶点的位置和与第二梯形相邻的第三梯形。

3. 发明申请

US20220093360A1 DATA GENERATION METHOD AND CHARGED PARTICLE BEAM IRRADIATION DEVICE 有权
公开(公告)号：US20220093360A1
公开(公告)日：2022-03-24
申请号：US17412775
申请日：2021-08-26
申请人： NuFlare Technology, Inc.
发明人： Kenichi YASUI
IPC分类号： H01J37/304
摘要： In one embodiment, a data generation method is for calculating a coverage of a polygon in each of a plurality of pixels obtained by dividing a target to be irradiated with a charged particle beam into predetermined sizes. The method includes dividing a parametric curve that defines a pattern shape into a plurality of parametric curves, calculating, for each of the plurality of parametric curves, an area of a region surrounded by a segment connecting end points among control points of the parametric curve and the parametric curve, calculating positions of vertexes of a figure having an area equivalent to the calculated area and having, as one side thereof, the segment connecting the end points, and generating the polygon by using the vertexes.

4. 发明申请

US20150279617A1 CHARGED PARTICLE BEAM DRAWING APPARATUS, INFORMATION PROCESSING APPARATUS AND PATTERN INSPECTION APPARATUS 有权
标题翻译：充电颗粒光束装置，信息处理装置和图案检查装置
公开(公告)号：US20150279617A1
公开(公告)日：2015-10-01
申请号：US14619281
申请日：2015-02-11
申请人： NuFlare Technology, Inc.
发明人： Kenichi YASUI
IPC分类号： H01J37/30 , H01J37/317
CPC分类号： H01J37/3005 , G03F1/84 , H01J37/3026 , H01J37/3174 , H01J2237/22 , H01J2237/3175 , H01J2237/31762 , H01J2237/31764 , H01J2237/31776 , H01J2237/31798
摘要： A charged particle beam drawing apparatus of an embodiment includes: a graphic information file for storing graphic information for each of elements (for example, patterns) at a level underlying an element (for example, a cell) at a particular level in hierarchically-structured drawing data which has elements at each level; and an attribute information file for storing attribute information to be given to each of the elements at the underlying level in association with information (for example, an index number) on the element at the particular level.
摘要翻译：实施例的带电粒子束描绘装置包括：图形信息文件，用于在分层结构化的特定级别的元素（例如，单元）的下层的级别存储用于每个元素（例如，图案）的图形信息绘制在每个级别具有元素的数据; 以及属性信息文件，用于存储要在特定级别的元素上与信息（例如，索引号）相关联地提供给基础级别的每个元素的属性信息。

5. 发明申请

US20230053272A1 DATA GENERATION METHOD, CHARGED PARTICLE BEAM IRRADIATION DEVICE, AND COMPUTER-READABLE RECORDING MEDIUM 有权
公开(公告)号：US20230053272A1
公开(公告)日：2023-02-16
申请号：US17844360
申请日：2022-06-20
申请人： NuFlare Technology, Inc.
发明人： Kenichi YASUI
IPC分类号： H01J37/302 , H01J37/317
摘要： In one embodiment, a data generation method includes generating a plurality of parametric elements by dividing, at positions of an extremum and an inflection point, a parametric curve that expresses a shape of a writing pattern and is defined by a plurality of control points arranged in order in a predetermined direction, generating a polygon by extracting, for each of the parametric elements, one or some of the plurality of control points and connecting the extracted control points in order in the predetermined direction, calculating a coverage by the polygon in each of a plurality of rectangular segmented regions obtained by dividing a target to be irradiated with a charged particle beam into a predetermined size, and calculating a coverage of each segmented region in a peripheral part of the writing pattern by finding intersections of each of the plurality of parametric elements and four sides of each of the plurality of segmented regions.

6. 发明申请

US20220100099A1 WRITING DATA GENERATING METHOD, MULTI CHARGED PARTICLE BEAM WRITING APPARATUS, PATTERN INSPECTING APPARATUS, AND COMPUTER-READABLE RECORDING MEDIUM 有权
公开(公告)号：US20220100099A1
公开(公告)日：2022-03-31
申请号：US17545134
申请日：2021-12-08
申请人： NuFlare Technology, Inc.
发明人： Kenichi YASUI , Noriaki NAKAYAMADA
IPC分类号： G03F7/20 , H01J37/30 , H01J37/305 , H01J37/317 , H01J37/302
摘要： According to the present invention, writing data capable of suppressing a data amount and a calculation amount in a multi charged particle beam writing apparatus is generated from design data including a figure having a curve. The present embodiment relates to a writing data generating method for generating writing data used in a multi charged particle beam writing apparatus. The method includes calculating a pair of curves each representing a curve portion of a figure included in design data, the curves each being defined by a plurality of control points, and generating the writing data by expressing a position of a second control point adjacent in a traveling direction of the curve to a first control point of the plurality of control points as a displacement from the first control point in the traveling direction of the curve and a displacement from the first control point in a direction orthogonal to the traveling direction.

7. 发明申请

US20140319384A1 CHARGED PARTICLE BEAM DRAWING APPARATUS, FORMAT CHECK APPARATUS AND FORMAT CHECK METHOD 有权
标题翻译：充电颗粒光束绘图装置，格式检查装置和格式检查方法
公开(公告)号：US20140319384A1
公开(公告)日：2014-10-30
申请号：US14263160
申请日：2014-04-28
申请人： NuFlare Technology, Inc
发明人： Kenichi YASUI
IPC分类号： H01J37/317
CPC分类号： H01J37/3174 , H01J37/3023 , H01J2237/31762 , H01J2237/31776
摘要： A charged particle beam drawing apparatus in an embodiment includes an information generation part to generate encoded information on drawing data having a layered structure and check information on the format check, if the drawing data passes the check by the format check part; an information storage part to store the encoded information and the check information; a code inspection part to inspect the drawing data by using the encoded information in the information storage part, when the drawing data is to be rechecked in the format check based on the check details; an information inspection part to inspect the check information in the information storage part while omitting the format check, if the drawing data passes the inspection by the code inspection part; and a check execution part to execute check with processing details of the format check changed according to the inspection result.
摘要翻译：一个实施例的带电粒子束描绘装置包括一个信息生成部分，用于在绘图数据通过格式检查部分的检查时，生成具有分层结构的绘制数据的编码信息和关于格式检查的检查信息; 信息存储部分，用于存储编码信息和检查信息; 代码检查部件，用于根据检查细节在格式检查中重新检查绘图数据时，通过使用信息存储部分中的编码信息来检查绘图数据; 信息检查部件，在省略格式检查的情况下检查信息存储部中的检查信息，如果图形数据通过代码检查部分的检查; 以及检查执行部分，根据检查结果改变格式检查的处理细节执行检查。

8. 发明申请

US20180366297A1 DATA PROCESSING METHOD, CHARGED PARTICLE BEAM WRITING APPARATUS, AND CHARGED PARTICLE BEAM WRITING SYSTEM 审中-公开
公开(公告)号：US20180366297A1
公开(公告)日：2018-12-20
申请号：US16000946
申请日：2018-06-06
申请人： NuFlare Technology, Inc.
发明人： Kenichi YASUI
IPC分类号： H01J37/317 , H01J37/30
摘要： In one embodiment, a data processing method is provided for generating writing data from design data and registering the writing data in a charged particle beam writing apparatus. The method includes generating the writing data by performing a plurality of conversion processes on a plurality of pieces of first frame data obtained through division of the design data corresponding to one chip, and performing a plurality of preprocessing processes on a plurality of pieces of second frame data obtained through division of the writing data of the chip, and registering the writing data of the chip in the charged particle beam writing apparatus. The plurality of conversion processes are performed in frame-basis pipeline processing, and the plurality of preprocessing processes are performed in frame-basis pipeline processing. The writing data is registered in the charged particle beam writing apparatus on a frame basis.

9. 发明申请

US20180060474A1 GENERATING METHOD OF DRAWING DATA AND CHARGED PARTICLE BEAM DRAWING METHOD 审中-公开
公开(公告)号：US20180060474A1
公开(公告)日：2018-03-01
申请号：US15691951
申请日：2017-08-31
申请人： NuFlare Technology, Inc.
发明人： Shigehiro HARA , Kenichi YASUI
IPC分类号： G06F17/50
CPC分类号： G06F17/5045 , G03F1/78 , G06K9/4604 , G06K9/4647 , G06K9/52 , H01J37/3026 , H01J37/3177 , H01J2237/31762 , H01J2237/31764
摘要： In one embodiment, a generating method of drawing data includes generating a pixel map that includes dose amount information on each of pixels obtained by dividing a drawing area on an object into a mesh, extracting, from the pixel map, an island-shaped pixel map which is a group of multiple pixels in which the dose amount information is not zero, determining an order of definition of the dose amount information on the pixels in the island-shaped pixel map, and generating a compressed pixel map including a size of the pixels, information indicating the order of definition, coordinates of a pixel which is first in the order of definition in the island-shaped pixel map, and the dose amount information on the pixels in the island-shaped pixel map, the dose amount information being continuously defined based on the order of definition.

10. 发明申请

US20170018404A1 DRAWING DATA CREATION METHOD AND CHARGED PARTICLE BEAM DRAWING APPARATUS 审中-公开
标题翻译：绘制数据创建方法和充电颗粒光束绘图设备
公开(公告)号：US20170018404A1
公开(公告)日：2017-01-19
申请号：US15203994
申请日：2016-07-07
申请人： NUFLARE TECHNOLOGY, INC.
发明人： Shigehiro HARA , Kenichi YASUI , Yasuo KATO
IPC分类号： H01J37/302 , H01J37/317 , H01J37/20
CPC分类号： H01J37/3026 , H01J37/3174 , H01J2237/31764 , H01J2237/31766
摘要： In one embodiment, a drawing data creation method includes inputting correction-map-including drawing data having a correction map to a converter, the correction map including dose amount information for each mesh area obtained by dividing a drawing area on a target drawn by a charged particle beam drawing apparatus, the drawing area being divided in a mesh shape, converting dose amount information in a second mesh area adjacent to a first mesh area to a representation based on dose amount information in the first mesh area to compress data of the dose amount information in the second mesh area, and outputting compressed-correction-map-including drawing data having a compressed correction map to a controller, the compressed correction map including dose amount information in which data in each of the plurality of mesh areas has been compressed.
摘要翻译：在一个实施例中，绘图数据创建方法包括将具有校正图的修正图包括绘图数据输入到转换器，该校正图包括通过将由被充电的绘制的目标划分的绘图区域划分的每个网格区域的剂量量信息粒子束描绘装置，绘制区域被划分为网格形状，基于第一网格区域中的剂量量信息将与第一网格区域相邻的第二网格区域中的剂量量信息转换为表示，以压缩剂量的数据信息，并且将具有压缩校正图的压缩校正图包含绘制数据输出到控制器，所述压缩校正图包括其中已经压缩了多个网格区域中的每一个中的数据的剂量量信息。

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