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    • 5. 发明申请
    • METHOD FOR CALIBRATING AND OPERATING A MEASURING CELL ARRANGEMENT
    • 用于校准和操作测量细胞布置的方法
    • US20100198545A1
    • 2010-08-05
    • US12669740
    • 2008-06-09
    • Christian BergCarsten Strietzel
    • Christian BergCarsten Strietzel
    • G01L27/00
    • G01L27/005G01L21/00
    • Calibrating a measuring cell arrangement having a diaphragm vacuum measuring cell, a measuring connector connected to circuitry which has a memory, a control and an interface for exchange of data with peripheral devices and a programmable heater for heating the diaphragm vacuum measuring cell to a presettable temperature includes connecting the measuring cell arrangement to a calibration mechanism, connecting the measuring connector to a vacuum volume and connecting the measuring cell interface to a calibration procedure control, as well as switching on the measuring cell arrangement. The method includes setting a first heating temperature on the measuring cell arrangement to a preset constant value, performing a first calibration step of the measuring cell arrangement by generating at least one preset pressure in the vacuum volume with the simultaneous acquisition of vacuum measuring signals of the measuring cell arrangement and at least one reference measuring cell, as well as storage of the acquired pressure values in the memory, determining compensation values with a calibration processor from the determined difference values of the measuring cell arrangement and the reference measuring cell, as well as intermediate storage of these difference values in a calibration data memory of the calibration procedure control and gauging the measuring cell arrangement by transmitting the determined compensation values to the measuring cell data memory for the deviating values determined at the various preset working points for pressures and temperature in relation to the reference measuring cell.
    • 校准具有隔膜真空测量单元的测量单元布置,连接到具有存储器的电路的测量连接器,用于与外围设备交换数据的控制和接口以及用于将隔膜真空测量单元加热到预设温度的可编程加热器 包括将测量单元布置连接到校准机构,将测量连接器连接到真空容积并将测量单元接口连接到校准过程控制,以及接通测量单元布置。 该方法包括将测量单元布置上的第一加热温度设置为预定的恒定值,通过在真空容积中产生至少一个预定压力,同时获取测量单元布置的真空测量信号,执行测量单元布置的第一校准步骤 测量单元布置和至少一个参考测量单元,以及将所获取的压力值存储在存储器中,根据测量单元布置和参考测量单元的确定的差值,用校准处理器确定补偿值,以及 将这些差值中间存储在校准过程控制的校准数据存储器中,并通过将确定的补偿值发送到测量单元数据存储器,以测量在各种预设工作点处在压力和温度下确定的偏差值来测量测量单元布置 关系到r 参考测量池。
    • 6. 发明授权
    • Method for calibrating and operating a measuring cell arrangement
    • 用于校准和操作测量单元布置的方法
    • US08423311B2
    • 2013-04-16
    • US12669740
    • 2008-06-09
    • Christian BergCarsten Strietzel
    • Christian BergCarsten Strietzel
    • G01L27/00G01L19/04
    • G01L27/005G01L21/00
    • Calibrating a measuring cell arrangement having a diaphragm vacuum measuring cell having a programmable heater for heating the diaphragm vacuum measuring cell to a constant presettable temperature. The heater encompasses the measuring cells and is encompassed by an insulation jacket. The method includes setting a first heating temperature on the measuring cell to a constant preset value, performing a first calibration step by generating at least one preset pressure in a vacuum volume and obtaining vacuum measuring signals of the measuring cell and at least one reference measuring cell, storing pressure values in the memory, determining compensation values from the difference values of the measuring cell and the reference measuring cell, intermediately storing these difference values in a calibration data memory and gauging the measuring cell by transmitting the determined compensation values to the measuring cell data memory.
    • 校准具有具有可编程加热器的隔膜真空测量单元的测量单元布置,用于将隔膜真空测量单元加热到恒定的可预设温度。 加热器包括测量单元并被绝缘套包围。 该方法包括将测量单元上的第一加热温度设定为恒定的预设值,通过在真空容积中产生至少一个预设压力并获得测量单元和至少一个参考测量单元的真空测量信号来执行第一校准步骤 ,将压力值存储在存储器中,根据测量单元和参考测量单元的差值确定补偿值,将这些差值中间存储在校准数据存储器中,并通过将所确定的补偿值发送到测量单元来测量测量单元 数据存储器
    • 7. 发明授权
    • Diaphragm vacuum measuring cell and method for the production of such measuring cell
    • 隔膜真空测量池及其制造方法
    • US07536915B2
    • 2009-05-26
    • US11935874
    • 2007-11-06
    • Carsten StrietzelPer BjörkmanWalter Berner
    • Carsten StrietzelPer BjörkmanWalter Berner
    • G01L9/12
    • G01L9/0079G01L9/0075G01L19/0627
    • Introduced is a method for the production of a diaphragm vacuum measuring cell, wherein on the one side of the diaphragm (2) at a spacing a first housing plate (1) is disposed sealing in the margin region with a joining means (3), and that on the other side of the diaphragm (2) at a spacing a second housing plate (4) is disposed sealing in the margin region with a joining means (3), and that the second housing plate (4) has an opening at which a connection means (5) is disposed sealing with joining means (3) for the connection of the measuring cell (8) with the medium to be measured, wherein the diaphragm (2) and the two housing plates (1, 4) are comprised of a metal oxide. Using an ALD method, the measuring cell is coated in a vacuum chamber (64), in particular through the opening of the measuring cell, such that the inner wall of the measuring vacuum chamber (9) and the opening with the connection means (5) is covered with a protective layer (13) such that at least the joining means (3) for the diaphragm (2) is protectively covered against corrosion.
    • 介绍了一种用于制造隔膜真空测量池的方法,其中在隔膜的一侧以间隔设置第一外壳板(1),其通过接合装置(3)密封在边缘区域中, 并且在所述隔膜(2)的另一侧以间隔设置第二壳体板(4),所述第二壳体板(4)通过接合装置(3)密封在所述边缘区域中,并且所述第二壳体板(4)在 其中连接装置(5)被设置为用于连接测量单元(8)与待测量介质的接合装置(3)密封,其中隔膜(2)和两个壳板(1,4)是 由金属氧化物组成。 使用ALD方法,将测量单元特别是通过测量单元的开口涂覆在真空室(64)中,使得测量真空室(9)的内壁和具有连接装置(5)的开口 )被保护层(13)覆盖,使得至​​少用于隔膜(2)的接合装置(3)被保护地覆盖防腐蚀。