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1. 发明申请

US20140224027A1 Method and Apparatus for Damping Diaphragm Vibration in Capacitance Diaphragm Gauges 有权
标题翻译：电容式隔膜计阻尼膜振动的方法与装置
公开(公告)号：US20140224027A1
公开(公告)日：2014-08-14
申请号：US14106700
申请日：2013-12-13
申请人： Reno Sub-Systems Canada Incorporated
发明人： Robert J. Ferran
IPC分类号： G01L9/12
CPC分类号： G01L9/0072 , G01L9/0016 , G01L9/12 , G01L27/005
摘要： A system and method mitigate the effects of these external vibrations on a capacitance diaphragm gauge by sensing the motion of the diaphragm at the first natural frequency of the diaphragm of the CDG. The presence of the natural frequency signals superimposed on the pressure signal is determined by sensing variations in the output of a sensor at or near the known natural frequency of the diaphragm and filtering that known low frequency from the output. The filtered signal is used in a feedback circuit to impose electrostatic forces on the diaphragm. The imposed electrostatic forces oppose the motion created by the external vibration to suppress the effects of the vibration on the pressure measured by the CDG.
摘要翻译：系统和方法通过在CDG的隔膜的第一固有频率处感测隔膜的运动来减轻这些外部振动对电容隔膜计的影响。叠加在压力信号上的固有频率信号的存在是通过感测传感器在等离子体的已知固有频率处或附近的输出的变化来确定的，并且从输出中滤出已知的低频。滤波后的信号用于反馈电路，以对隔膜施加静电力。施加的静电力与外部振动产生的运动相反，以抑制振动对CDG测量压力的影响。

2. 发明授权

US08760221B1 Method and apparatus for acquiring noise reduced high frequency signals 有权
公开(公告)号：US08760221B1
公开(公告)日：2014-06-24
申请号：US14145831
申请日：2013-12-31
申请人： Reno Sub-Systems Canada, Incorporated
发明人： Robert J. Ferran
IPC分类号： H03B1/00
CPC分类号： H03K5/1252 , G01L9/0072 , G01L9/12
摘要： A system and method receive the output signal from a capacitance diaphragm gauge (CDG) and generate a noise reduced output signal. An input signal processing circuit receives an input signal from a signal source that drives the CDG. The input signal processing circuit generates a segment of N normalized digital samples of the input signal. An output signal processing circuit receives the output signal from the CDG and generates M segments of N digital samples of the CDG output signal and averages the corresponding samples in the M segments to generate a signal segment of N averaged samples. Each of the N averaged samples is multiplied by a corresponding one of the N normalized samples to generate N products. The N products are averaged to generate an average product, which is multiplied by a constant to generate a system output signal with reduced noise.

3. 发明申请

US20140368265A1 Method and Apparatus for Acquiring Noise Reduced High Frequency Signals 有权
标题翻译：用于获取噪声降低的高频信号的方法和装置
公开(公告)号：US20140368265A1
公开(公告)日：2014-12-18
申请号：US14308359
申请日：2014-06-18
申请人： Reno Sub-Systems Canada, Incorporated
发明人： Robert J. Ferran
IPC分类号： H03K5/1252
CPC分类号： H03K5/1252 , G01L9/0072 , G01L9/12
摘要： A system and method receive the output signal from a capacitance diaphragm gauge (CDG) and generate a noise reduced output signal. An input signal processing circuit receives an input signal from a signal source that drives the CDG. The input signal processing circuit generates a segment of N normalized digital samples of the input signal. An output signal processing circuit receives the output signal from the CDG and generates M segments of N digital samples of the CDG output signal and averages the corresponding samples in the M segments to generate a signal segment of N averaged samples. Each of the N averaged samples is multiplied by a corresponding one of the N normalized samples to generate N products. The N products are averaged to generate an average product, which is multiplied by a constant to generate a system output signal with reduced noise.
摘要翻译：一种系统和方法从电容式隔膜计（CDG）接收输出信号并产生噪声降低的输出信号。输入信号处理电路从驱动CDG的信号源接收输入信号。输入信号处理电路产生输入信号的N个归一化数字采样的一部分。输出信号处理电路接收来自CDG的输出信号并产生CDG输出信号的N个数字样本的M个段，并平均M个段中的相应采样以产生N个平均采样的信号段。将N个平均样本中的每一个乘以N个归一化样本中的相应一个以产生N个乘积。 N个产品被平均以产生平均乘积，其乘以常数以产生具有降低的噪声的系统输出信号。

4. 发明申请

US20140222363A1 Multi-Axis Tilt Sensor for Correcting Gravitational Effects on the Measurement of Pressure by a Capacitance Diaphragm Gauge 有权
标题翻译：多轴倾斜传感器用于校正重力对电容式隔膜计压力测量的影响
公开(公告)号：US20140222363A1
公开(公告)日：2014-08-07
申请号：US14155321
申请日：2014-01-14
申请人： Reno Sub-Systems Canada, Incorporated
发明人： David J. Ferran , Robert J. Ferran
IPC分类号： G01L27/00 , G01L9/00
CPC分类号： G01L27/005 , G01L9/0005 , G01L9/0072 , G01L19/02 , G01L27/002
摘要： A system and method compensate for effects of gravity on the diaphragm of a capacitance diaphragm gauge (CDG). The CDG generates a measured absolute pressure value in response to an applied absolute pressure on an input of the CDG. The CDG is subjected to a variable orientation of the CDG with respect to the earth's surface that can cause inaccurate pressure measurements. A pressure measuring circuit generates a measured value of an applied absolute pressure provided to an input of the CDG. A tilt sensor generates at least one tilt sensor output value that is responsive to an orientation of the CDG with respect to the earth's surface. A processing system adjusts the measured absolute pressure value by a calibration factor to generate a calibrated absolute pressure value representing the applied absolute pressure, wherein the calibration factor is selected in response to the at least one tilt sensor output value.
摘要翻译：系统和方法补偿重力对电容式隔膜计（CDG）的隔膜的影响。 CDG响应于对CDG的输入端的施加的绝对压力产生测量的绝对压力值。 CDG相对于地球表面经受可变取向的CDG，这可能导致不准确的压力测量。压力测量电路产生提供给CDG的输入端的施加的绝对压力的测量值。倾斜传感器产生响应于CDG相对于地球表面的取向的至少一个倾斜传感器输出值。处理系统通过校准因子来调节所测量的绝对压力值，以产生表示施加的绝对压力的校准绝对压力值，其中响应于至少一个倾斜传感器输出值选择校准因子。

5. 发明申请

US20140222362A1 Automatic Calibration Adjustment of Capacitance Diaphragm Gauges to Compensate for Errors Due to Changes in Atmospheric Pressure 有权
标题翻译：自动校准调整电容式隔膜计，以补偿由于大气压力变化引起的错误
公开(公告)号：US20140222362A1
公开(公告)日：2014-08-07
申请号：US14145800
申请日：2013-12-31
申请人： Reno Sub-Systems Canada, Incorporated
发明人： David J. Ferran , Robert J. Ferran
IPC分类号： G01L27/00
CPC分类号： G01L27/002 , G01L9/0072 , G01L27/005
摘要： In order to mitigate the negative effects of a change in atmospheric pressure, an improved capacitance diaphragm gauge (CDG) sensor incorporates an independent ambient atmospheric pressure sensor near the CDG sensor body. The ambient atmospheric sensor is located outside the CDG sensor body to sense the ambient atmospheric pressure surrounding the CDG sensor body. The ambient atmospheric sensor provides an output that represents the ambient atmospheric pressure. A sensor output processing circuit receives the output of the ambient atmospheric sensor as well as the output of the CDG sensor. The processing circuit utilizes the output from the ambient atmospheric pressure sensor to fine tune the CDG measurement of pressure by executing an in situ, real time, automatic calibration adjustment of the CDG.
摘要翻译：为了减轻大气压力变化的负面影响，改进的电容式隔膜计（CDG）传感器在CDG传感器主体附近集成了独立的环境大气压力传感器。环境大气传感器位于CDG传感器主体外部，以感测CDG传感器主体周围的环境大气压力。环境大气传感器提供表示环境大气压力的输出。传感器输出处理电路接收环境大气传感器的输出以及CDG传感器的输出。处理电路利用环境大气压力传感器的输出通过执行CDG的原位实时自动校准调整来微调CDG的压力测量。

6. 发明申请

US20140208822A1 Apparatus and Method for Automatic Detection of Diaphragm Coating or Surface Contamination for Capacitance Diaphragm Gauges 有权
标题翻译：自动检测电磁隔膜计的隔膜涂层或表面污染的装置和方法
公开(公告)号：US20140208822A1
公开(公告)日：2014-07-31
申请号：US14061726
申请日：2013-10-23
申请人： Reno Sub-Systems Canada, Incorporated
发明人： David J. Ferran , Robert J. Ferran
IPC分类号： G01L27/00
CPC分类号： G01L27/005 , G01L9/0072 , G01L21/00 , G01L27/002 , G01L27/007
摘要： A system and a method detect contamination of a diaphragm in a capacitance diaphragm gauge wherein a contaminated diaphragm deflects less in the presence of pressure than an uncontaminated diaphragm. The system and method measure a base pressure. A DC voltage is applied between the diaphragm and a fixed electrode to cause the diaphragm to deflect to simulate an effective pressure. The system and method measure a combined pressure caused by the base pressure and the effective pressure. The system and method subtract the base pressure to determine the effective pressure caused by the static diaphragm deflection. If the measured effective pressure is less than an acceptable effective pressure, the system and method determine that the diaphragm is contaminated.
摘要翻译：系统和方法检测电容膜片中的隔膜的污染物，其中污染的膜片在压力存在下比未污染的膜片偏转更少。系统和方法测量基础压力。在隔膜和固定电极之间施加一个直流电压，以使膜片偏转以模拟有效的压力。系统和方法测量由基础压力和有效压力引起的组合压力。系统和方法减去基础压力，以确定由静态隔膜偏转引起的有效压力。如果测量的有效压力小于可接受的有效压力，则系统和方法确定隔膜受到污染。

7. 发明申请

US20140202254A1 Integrity Monitor for Reference Cavity of Capacitance Diaphragm Gauge 有权
标题翻译：电容式隔膜计参考腔的完整性监视器
公开(公告)号：US20140202254A1
公开(公告)日：2014-07-24
申请号：US14155294
申请日：2014-01-14
申请人： Reno Sub-Systems Canada, Incorporated
发明人： David J. Ferran , Robert J. Ferran
IPC分类号： G01L9/00 , G01L9/12
CPC分类号： G01L9/0072 , G01L9/0075 , G01L9/14 , G01L21/00 , G01L21/34
摘要： A system and method detect the presence of an unacceptable quantity of gas molecules in the reference vacuum cavity of a capacitance diaphragm gauge (CDG). An independent pressure transducer has an active portion exposed to the reference vacuum cavity. The transducer includes a ring anode, a cylindrical inner wall surface that forms at least one cathode, and a magnet positioned with respect to the ring anode such that the magnetic flux of the magnet is generally aligned with the central axis of the ring anode. A high voltage source applies a voltage between the ring anode and the cathode. A current sensor senses a magnitude of any current flowing between the ring anode and the cathode via ionized gas molecules. A monitoring unit monitors the magnitude of the current sensed by the current sensor and activates an alarm when the magnitude of the current exceeds an acceptable magnitude.
摘要翻译：系统和方法检测在电容式隔膜计（CDG）的参考真空腔中存在不可接受量的气体分子。独立的压力传感器具有暴露于参考真空腔的有效部分。换能器包括环形阳极，形成至少一个阴极的圆柱形内壁表面和相对于环形阳极定位的磁体，使得磁体的磁通量大致与环形阳极的中心轴线对齐。高电压源在环形阳极和阴极之间施加电压。电流传感器感测通过电离气体分子在环形阳极和阴极之间流动的任何电流的大小。监测单元监测由电流传感器感测的电流的大小，并且当电流的大小超过可接受的幅度时激活警报。

8. 发明申请

US20150012235A1 Multi-Axis Tilt Sensor for Correcting Gravitational Effects on the Measurement of Pressure by a Capacitance Diaphragm Gauge 有权
标题翻译：多轴倾斜传感器用于校正重力对电容式隔膜计压力测量的影响
公开(公告)号：US20150012235A1
公开(公告)日：2015-01-08
申请号：US14497134
申请日：2014-09-25
申请人： Reno Sub-Systems Canada, Incorporated
发明人： David J. Ferran , Robert J. Ferran
IPC分类号： G01L27/00 , G01L19/02 , G01L9/00
CPC分类号： G01L27/005 , G01L9/0005 , G01L9/0072 , G01L19/02 , G01L27/002
摘要： A system and method compensate for effects of gravity on the diaphragm of a capacitance diaphragm gauge (CDG). The CDG generates a measured absolute pressure value in response to an applied absolute pressure on an input of the CDG. The CDG is subjected to a variable orientation of the CDG with respect to the earth's surface that can cause inaccurate pressure measurements. A pressure measuring circuit generates a measured value of an applied absolute pressure provided to an input of the CDG. A tilt sensor generates at least one tilt sensor output value that is responsive to an orientation of the CDG with respect to the earth's surface. A processing system adjusts the measured absolute pressure value by a calibration factor to generate a calibrated absolute pressure value representing the applied absolute pressure, wherein the calibration factor is selected in response to the at least one tilt sensor output value.
摘要翻译：系统和方法补偿重力对电容式隔膜计（CDG）的隔膜的影响。 CDG响应于对CDG的输入端的施加的绝对压力产生测量的绝对压力值。 CDG相对于地球表面经受可变取向的CDG，这可能导致不准确的压力测量。压力测量电路产生提供给CDG的输入端的施加的绝对压力的测量值。倾斜传感器产生响应于CDG相对于地球表面的取向的至少一个倾斜传感器输出值。处理系统通过校准因子来调节所测量的绝对压力值，以产生表示施加的绝对压力的校准绝对压力值，其中响应于至少一个倾斜传感器输出值选择校准因子。

9. 发明授权

US08901993B1 Method and apparatus for acquiring noise reduced high frequency signals 有权
标题翻译：用于获取降噪高频信号的方法和装置
公开(公告)号：US08901993B1
公开(公告)日：2014-12-02
申请号：US14308359
申请日：2014-06-18
申请人： Reno Sub-Systems Canada, Incorporated
发明人： Robert J. Ferran
IPC分类号： H03B1/00 , H03K5/1252
CPC分类号： H03K5/1252 , G01L9/0072 , G01L9/12
摘要： A system and method receive the output signal from a capacitance diaphragm gauge (CDG) and generate a noise reduced output signal. An input signal processing circuit receives an input signal from a signal source that drives the CDG. The input signal processing circuit generates a segment of N normalized digital samples of the input signal. An output signal processing circuit receives the output signal from the CDG and generates M segments of N digital samples of the CDG output signal and averages the corresponding samples in the M segments to generate a signal segment of N averaged samples. Each of the N averaged samples is multiplied by a corresponding one of the N normalized samples to generate N products. The N products are averaged to generate an average product, which is multiplied by a constant to generate a system output signal with reduced noise.
摘要翻译：一种系统和方法从电容式隔膜计（CDG）接收输出信号并产生噪声降低的输出信号。输入信号处理电路从驱动CDG的信号源接收输入信号。输入信号处理电路产生输入信号的N个归一化数字采样的一部分。输出信号处理电路接收来自CDG的输出信号并产生CDG输出信号的N个数字样本的M个段，并平均M个段中的相应采样以产生N个平均采样的信号段。将N个平均样本中的每一个乘以N个归一化样本中的相应一个以产生N个乘积。 N个产品被平均以产生平均乘积，其乘以常数以产生具有降低的噪声的系统输出信号。

10. 发明授权

US08862420B2 Multi-axis tilt sensor for correcting gravitational effects on the measurement of pressure by a capacitance diaphragm gauge 有权
标题翻译：多轴倾斜传感器，用于通过电容隔膜计校正重力测量压力的重力
公开(公告)号：US08862420B2
公开(公告)日：2014-10-14
申请号：US14155321
申请日：2014-01-14
申请人： Reno Sub-Systems Canada, Incorporated
发明人： David J. Ferran , Robert J. Ferran
IPC分类号： G01L27/00 , G01L9/00
CPC分类号： G01L27/005 , G01L9/0005 , G01L9/0072 , G01L19/02 , G01L27/002
摘要： A system and method compensate for effects of gravity on the diaphragm of a capacitance diaphragm gauge (CDG). The CDG generates a measured absolute pressure value in response to an applied absolute pressure on an input of the CDG. The CDG is subjected to a variable orientation of the CDG with respect to the earth's surface that can cause inaccurate pressure measurements. A pressure measuring circuit generates a measured value of an applied absolute pressure provided to an input of the CDG. A tilt sensor generates at least one tilt sensor output value that is responsive to an orientation of the CDG with respect to the earth's surface. A processing system adjusts the measured absolute pressure value by a calibration factor to generate a calibrated absolute pressure value representing the applied absolute pressure, wherein the calibration factor is selected in response to the at least one tilt sensor output value.
摘要翻译：系统和方法补偿重力对电容式隔膜计（CDG）的隔膜的影响。 CDG响应于对CDG的输入端的施加的绝对压力产生测量的绝对压力值。 CDG相对于地球表面经受可变取向的CDG，这可能导致不准确的压力测量。压力测量电路产生提供给CDG的输入端的施加的绝对压力的测量值。倾斜传感器产生响应于CDG相对于地球表面的取向的至少一个倾斜传感器输出值。处理系统通过校准因子来调节所测量的绝对压力值，以产生表示施加的绝对压力的校准绝对压力值，其中响应于至少一个倾斜传感器输出值选择校准因子。

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