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1. 发明申请

US20120057273A1 NANOSTRUCTURE ELECTRODE FOR PSEUDOCAPACITIVE ENERGY STORAGE 有权
标题翻译：用于消除能量储存的纳米结构电极
公开(公告)号：US20120057273A1
公开(公告)日：2012-03-08
申请号：US12876441
申请日：2010-09-07
申请人： Richard A. Haight , Stephen M. Rossnagel
发明人： Richard A. Haight , Stephen M. Rossnagel
IPC分类号： H01G9/00 , B05D5/12
CPC分类号： H01G11/26 , H01G11/36 , H01G11/46 , Y02E60/13
摘要： A nanoporous templating substrate, which is an anodically oxidized alumina (AAO) substrate, is employed to form a pseudocapacitor having high stored energy density. A pseudocapacitive material is deposited conformally along the sidewalls of the AAO substrate by atomic layer deposition, chemical vapor deposition), and/or electrochemical deposition employing a nucleation layer. The thickness of the pseudocapacitive material on the walls can be precisely controlled in the deposition process. The AAO is etched to form an array of nanotubes of the PC material that are cylindrical and structurally robust with cavities therein. Because the AAO substrate that acts as scaffolding is removed, only the active PC material is left behind, thereby maximizing the energy per mass. In addition, nanotubes may be de-anchored from a substrate so that free-standing nanotubes having randomized orientations may be deposited on a conductive substrate to form an electrode of a pseudocapacitor.
摘要翻译：使用作为阳极氧化的氧化铝（AAO）底物的纳米多孔模板基板来形成具有高储能能量密度的假电容器。通过原子层沉积，化学气相沉积）和/或使用成核层的电化学沉积，沿着AAO基板的侧壁共形沉积假电容材料。在沉积过程中可以精确地控制壁上的假电容材料的厚度。蚀刻AAO以形成PC材料的纳米管阵列，其为圆柱形且结构坚固且其中具有空腔。由于去除了充当脚手架的AAO基板，所以只剩下活性PC材料，从而最大化每质量的能量。此外，可以从衬底去除锚定纳米管，使得具有随机取向的自立式纳米管可以沉积在导电衬底上以形成假电容器的电极。

2. 发明申请

US20120293915A1 HIGH ENERGY DENSITY STORAGE MATERIAL DEVICE USING NANOCHANNEL STRUCTURE 有权
标题翻译：使用纳米通道结构的高能量密度存储材料设备
公开(公告)号：US20120293915A1
公开(公告)日：2012-11-22
申请号：US13559095
申请日：2012-07-26
申请人： Richard A. Haight , Stephen M. Rossnagel
发明人： Richard A. Haight , Stephen M. Rossnagel
IPC分类号： H01G9/07 , B82Y99/00
CPC分类号： H01G9/145 , B82Y99/00 , H01G9/004 , H01G9/155 , Y02E60/13
摘要： A capacitor includes a plurality of nanochannels formed in a dielectric material. A conductive film is formed over interior surfaces of the nanochannels, and a charge barrier is formed over the conductive film. An electrolytic solution is disposed in the nanochannels. An electrode is coupled to the electrolytic solution in the nanochannels to form the capacitor.
摘要翻译：电容器包括形成在电介质材料中的多个纳米通道。在纳米通道的内表面上形成导电膜，并且在导电膜上形成电荷势垒。在纳米通道中设置电解液。电极与纳米通道中的电解液结合形成电容器。

3. 发明授权

US08599533B2 Nanostructure electrode for pseudocapacitive energy storage 有权
标题翻译：用于假电容储能的纳米结构电极
公开(公告)号：US08599533B2
公开(公告)日：2013-12-03
申请号：US12876441
申请日：2010-09-07
申请人： Richard A. Haight , Stephen M. Rossnagel
发明人： Richard A. Haight , Stephen M. Rossnagel
IPC分类号： H01G9/155 , H01G9/00
CPC分类号： H01G11/26 , H01G11/36 , H01G11/46 , Y02E60/13
摘要： A nanoporous templating substrate, which is an anodically oxidized alumina (AAO) substrate, is employed to form a pseudocapacitor having high stored energy density. A pseudocapacitive material is deposited conformally along the sidewalls of the AAO substrate by atomic layer deposition, chemical vapor deposition), and/or electrochemical deposition employing a nucleation layer. The thickness of the pseudocapacitive material on the walls can be precisely controlled in the deposition process. The AAO is etched to form an array of nanotubes of the PC material that are cylindrical and structurally robust with cavities therein. Because the AAO substrate that acts as scaffolding is removed, only the active PC material is left behind, thereby maximizing the energy per mass. In addition, nanotubes may be de-anchored from a substrate so that free-standing nanotubes having randomized orientations may be deposited on a conductive substrate to form an electrode of a pseudocapacitor.
摘要翻译：使用作为阳极氧化的氧化铝（AAO）底物的纳米多孔模板基板来形成具有高储能能量密度的假电容器。通过原子层沉积，化学气相沉积）和/或使用成核层的电化学沉积，沿着AAO基板的侧壁共形沉积假电容材料。在沉积过程中可以精确地控制壁上的假电容材料的厚度。蚀刻AAO以形成PC材料的纳米管阵列，其为圆柱形且结构坚固且其中具有空腔。由于去除了充当脚手架的AAO基板，所以只剩下活性PC材料，从而最大化每质量的能量。此外，可以从衬底去除锚定纳米管，使得具有随机取向的自立式纳米管可以沉积在导电衬底上以形成假电容器的电极。

4. 发明申请

US20110188172A1 HIGH ENERGY DENSITY STORAGE MATERIAL DEVICE USING NANOCHANNEL STRUCTURE 有权
标题翻译：使用纳米通道结构的高能量密度存储材料设备
公开(公告)号：US20110188172A1
公开(公告)日：2011-08-04
申请号：US12699411
申请日：2010-02-03
申请人： Richard A. Haight , Stephen M. Rossnagel
发明人： Richard A. Haight , Stephen M. Rossnagel
IPC分类号： H01G9/00
CPC分类号： H01G9/145 , B82Y99/00 , H01G9/004 , H01G9/155 , Y02E60/13
摘要： A capacitor includes a plurality of nanochannels formed in a dielectric material. A conductive film is formed over interior surfaces of the nanochannels, and a charge barrier is formed over the conductive film. An electrolytic solution is disposed in the nanochannels. An electrode is coupled to the electrolytic solution in the nanochannels to form the capacitor.
摘要翻译：电容器包括形成在电介质材料中的多个纳米通道。在纳米通道的内表面上形成导电膜，并且在导电膜上形成电荷势垒。在纳米通道中设置电解液。电极与纳米通道中的电解液结合形成电容器。

5. 发明授权

US08390987B2 High energy density storage material device using nanochannel structure 有权
标题翻译：高能量密度储存材料器件采用纳米通道结构
公开(公告)号：US08390987B2
公开(公告)日：2013-03-05
申请号：US13559095
申请日：2012-07-26
申请人： Richard A. Haight , Stephen M. Rossnagel
发明人： Richard A. Haight , Stephen M. Rossnagel
IPC分类号： H01G9/00
CPC分类号： H01G9/145 , B82Y99/00 , H01G9/004 , H01G9/155 , Y02E60/13
摘要： A capacitor includes a plurality of nanochannels formed in a dielectric material. A conductive film is formed over interior surfaces of the nanochannels, and a charge barrier is formed over the conductive film. An electrolytic solution is disposed in the nanochannels. An electrode is coupled to the electrolytic solution in the nanochannels to form the capacitor.
摘要翻译：电容器包括形成在电介质材料中的多个纳米通道。在纳米通道的内表面上形成导电膜，并且在导电膜上形成电荷势垒。在纳米通道中设置电解液。电极与纳米通道中的电解液结合形成电容器。

6. 发明授权

US08287604B2 High energy density storage material device using nanochannel structure 有权
标题翻译：高能量密度储存材料器件采用纳米通道结构
公开(公告)号：US08287604B2
公开(公告)日：2012-10-16
申请号：US12699411
申请日：2010-02-03
申请人： Richard A. Haight , Stephen M. Rossnagel
发明人： Richard A. Haight , Stephen M. Rossnagel
IPC分类号： H01G9/00
CPC分类号： H01G9/145 , B82Y99/00 , H01G9/004 , H01G9/155 , Y02E60/13
摘要： A capacitor includes a plurality of nanochannels formed in a dielectric material. A conductive film is formed over interior surfaces of the nanochannels, and a charge barrier is formed over the conductive film. An electrolytic solution is disposed in the nanochannels. An electrode is coupled to the electrolytic solution in the nanochannels to form the capacitor.
摘要翻译：电容器包括形成在电介质材料中的多个纳米通道。在纳米通道的内表面上形成导电膜，并且在导电膜上形成电荷势垒。在纳米通道中设置电解液。电极与纳米通道中的电解液结合形成电容器。

7. 发明授权

US08791355B2 Homogenizing light-pipe for solar concentrators 有权
标题翻译：太阳能集热器均质光管
公开(公告)号：US08791355B2
公开(公告)日：2014-07-29
申请号：US13090304
申请日：2011-04-20
申请人： Richard A. Haight , Yves C. Martin , Theodore G. van Kessel
发明人： Richard A. Haight , Yves C. Martin , Theodore G. van Kessel
IPC分类号： H01L31/042
CPC分类号： G02B3/08 , F24S23/10 , F24S23/30 , G02B3/0056 , G02B5/1876 , G02B5/1885 , G02B5/32 , G02B19/0028 , G02B19/0042 , H01L31/0543 , H01L31/0547 , Y02E10/40 , Y02E10/52
摘要： A light pipe that can be employed for a Concentrator Photo-Voltaic (CPV) system is provided. The light pipe homogenizes light by diffusion and/or refraction, and can be embodied in a structure that has a low aspect ratio. The diffusion and/or refraction can be effected by concave or convex surfaces of a transparent medium that forms a body of the light pipe, by light diffracting particles, and/or by a diffracting surface. Optionally, multiple transparent media can be employed with a refracting and/or diffracting interface therebetween. The reduced aspect ratio of the light pipe can improve reliability of mechanical alignment in the CPV system as well as reducing the cost of manufacturing and/or aligning the light pipe within the CPV system.
摘要翻译：提供可用于集中器光伏（CPV）系统的光管。光管通过扩散和/或折射使光均匀化，并且可以以具有低纵横比的结构体现。扩散和/或折射可以通过形成光管的主体，通过光衍射颗粒和/或衍射表面的透明介质的凹面或凸面实现。可选地，可以使用多个透明介质，其间具有折射和/或衍射界面。光管的减小的纵横比可以提高CPV系统中的机械对准的可靠性，并且降低CPV系统内的光管的制造和/或对准的成本。

8. 发明授权

US07170030B2 Method and apparatus for repair of reflective photomasks 有权
标题翻译：用于修复反光光掩模的方法和装置
公开(公告)号：US07170030B2
公开(公告)日：2007-01-30
申请号：US10660477
申请日：2003-09-12
申请人： Richard A. Haight , Peter P. Longo , Alfred Wagner
发明人： Richard A. Haight , Peter P. Longo , Alfred Wagner
IPC分类号： B23K26/38
CPC分类号： B82Y40/00 , B23K26/0624 , B23K26/361 , B23K26/40 , B23K2101/35 , B23K2103/50 , B82Y10/00 , G03F1/24 , G03F1/72
摘要： A method of selectively ablating an undesired material from a substrate includes providing a substrate with two regions; providing laser pulses; tuning a wavelength of the laser pulses to match a desired wavelength characteristic of a material and directing the tuned laser pulses onto the substrate; and controlling a pulse duration, wavelength, or both, of the laser pulses to ablate the undesired material without damaging the substrate or any adjacent material. In another embodiment, an apparatus for repairing a defect on a reflective photomask includes a femtosecond pulse width laser; a harmonic conversion cell; a filter for passing a selected EUV harmonic of the laser light; a lens arrangement configured to direct the selected EUV harmonic of the laser light onto the photomask; and a control unit connected to the laser to control an ablation of the defect on the reflective photomask.
摘要翻译：从衬底中选择性地烧蚀不需要的材料的方法包括提供具有两个区域的衬底; 提供激光脉冲; 调整激光脉冲的波长以匹配材料的期望波长特性并将调谐的激光脉冲引导到衬底上; 并且控制激光脉冲的脉冲持续时间，波长或两者，以消除不需要的材料，而不会损坏衬底或任何相邻的材料。在另一个实施例中，用于修复反射光掩模上的缺陷的装置包括飞秒脉冲宽度激光器; 谐波转换电池; 用于通过激光的所选EUV谐波的滤波器; 透镜装置，被配置为将所选择的激光的EUV谐波引导到光掩模上; 以及连接到激光器以控制反射光掩模上的缺陷的消融的控制单元。

9. 发明授权

US06591154B2 System and method for modifying enclosed areas for ion beam and laser beam bias effects 失效
标题翻译：用于修改离子束封闭区域和激光束偏置效应的系统和方法
公开(公告)号：US06591154B2
公开(公告)日：2003-07-08
申请号：US09737398
申请日：2000-12-15
申请人： Richard A. Haight , Peter P. Longo , Alfred Wagner
发明人： Richard A. Haight , Peter P. Longo , Alfred Wagner
IPC分类号： H04N121
CPC分类号： H01L21/67288
摘要： A system and method for repairing defects in semiconductor wafers utilizing a repair tool including a device for applying energy to obliterate defects at locations on the wafer, the method being a graphical approach implementing a graphical user interface (GUI) comprising a pixel screen display and comprising the steps of: via the interface, identifying a wafer defect to repair and enclosing the defect within a polygonal repair outline drawn using a default line thickness; graphically adjusting the line thickness to modify the enclosed polygonal repair outline area; automatically detecting one or more areas within an interior region of the modified polygonal repair outline area; and, scanning the modified polygonal repair outline, and for each pixel location inside the one or more detected areas, applying energy to the wafer coordinated to the pixel location for repairing the defect, whereby the identification of said pixel location is accomplished using standard graphical tools with minimal operator intervention.
摘要翻译：一种利用修复工具修复半导体晶片缺陷的系统和方法，所述修复工具包括用于施加能量以消除晶片上位置处的缺陷的装置，所述方法是实现包括像素屏幕显示并且包括以下步骤：通过接口，识别晶片缺陷以修复并将缺陷包围在使用默认线厚度绘制的多边形修复轮廓内; 以图形方式调整线条厚度以修改封闭的多边形修复轮廓区域; 自动检测修改的多边形修复轮廓区域的内部区域内的一个或多个区域; 以及扫描所述修改的多边形修复轮廓，以及对于所述一个或多个检测区域内的每个像素位置，向与所述像素位置协调的晶片施加能量以修复所述缺陷，由此使用标准图形工具来实现所述像素位置的识别以最小的操作员干预。

10. 发明授权

US09102008B2 Debris minimization and improved spatial resolution in pulsed laser ablation of materials 有权
标题翻译：碎片最小化和改善材料脉冲激光烧蚀中的空间分辨率
公开(公告)号：US09102008B2
公开(公告)日：2015-08-11
申请号：US12241274
申请日：2008-09-30
申请人： Richard A. Haight , Peter P. Longo , Alfred Wagner
发明人： Richard A. Haight , Peter P. Longo , Alfred Wagner
IPC分类号： B23K26/00 , B23K26/06 , B23K26/03 , B23K26/073 , B23K26/14 , B23K26/16 , B23K26/36 , B23K26/40 , G03F1/82 , B41M5/24
CPC分类号： B23K26/0635 , B23K26/032 , B23K26/0624 , B23K26/066 , B23K26/0732 , B23K26/142 , B23K26/146 , B23K26/147 , B23K26/1476 , B23K26/16 , B23K26/361 , B23K26/40 , B23K2101/42 , B23K2103/50 , B41M5/24 , G03F1/82
摘要： A method of minimizing the deposition of debris onto a sample being ablated. The method comprises: 1) reducing a laser pulse energy to approximately a threshold level for ablation; 2) focusing the energy using an immersion object lens having a final element and 3) ablating a region of the sample using a multitude of laser pulses, each pulse being sufficiently separated in time to reduce a concentration of ablation products in a gas phase.
摘要翻译：将碎屑沉积最小化到被烧蚀的样品上的方法。该方法包括：1）将激光脉冲能量降低到近似于消融的阈值水平; 2）使用具有最终元件的浸没物镜聚焦能量; 3）使用多个激光脉冲消融样品的区域，每个脉冲在时间上充分分离，以降低气相中消融产物的浓度。

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