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1. 发明授权

US07773228B1 Surface plasmon noncontact electric field sensors and related methods 有权
标题翻译：表面等离子体非接触式电场传感器及相关方法
公开(公告)号：US07773228B1
公开(公告)日：2010-08-10
申请号：US12190419
申请日：2008-08-12
申请人： Russell E. Hollingsworth , Bruce Roy Lanning
发明人： Russell E. Hollingsworth , Bruce Roy Lanning
IPC分类号： G01N21/55 , G01J1/58 , G02B1/10
CPC分类号： G01N21/553 , A61B5/0059 , A61B5/0478 , A61B5/411 , G02B5/008
摘要： A surface-plasmon electric field sensor has a plasmonic portion having an electro-optic dielectric material coated on one side with a transparent conductive layer and on another side with a thin layer of conductive metallic layer. The metallic layer has alternating grating and smooth regions, the smooth regions being of length near a multiple of an effective wavelength of the light in the electro-optic layer, and the grating regions having lines on a pitch near the effective wavelength. The sensor has a light source for illuminating the plasmonic portion with plane-polarized light having a free-space wavelength and a photodetector.
摘要翻译：表面等离子体激元传感器具有等离子体激元部分，其具有在一侧上涂覆有透明导电层的电光介电材料，在另一侧上具有导电金属层的薄层。金属层具有交替的光栅和平滑区域，光滑区域的长度接近电光层中的光的有效波长的倍数，并且光栅区域在接近有效波长的间距上具有线。传感器具有用于利用具有自由空间波长的平面偏振光和光电检测器来照射等离子体激元部分的光源。

2. 发明授权

US5759745A Method of using amorphous silicon as a photoresist 失效
标题翻译：使用非晶硅作为光刻胶的方法
公开(公告)号：US5759745A
公开(公告)日：1998-06-02
申请号：US567758
申请日：1995-12-05
申请人： Russell E. Hollingsworth
发明人： Russell E. Hollingsworth
IPC分类号： G03F7/004 , G03F7/075 , G03F7/00
CPC分类号： G03F7/075 , G03F7/0042
摘要： A method of using amorphous silicon as a photoresist is disclosed herein. The photoresist is produced by first forming a thin film including at least an outermost layer which includes hydrogenated amorphous silicon onto a suitable surface. Predetermined areas of the outermost layer are then exposed to ultraviolet light. Following exposure, the unexposed areas of the outermost layer, along with any underlying associated portions of the film, are removed so as to reveal the surface in areas which underlie the unexposed outermost layer areas. In a first feature, the outermost layer is formed at a temperature no greater than about 100.degree. C. In a second feature, the predetermined areas of the outermost layer are exposed to ultraviolet light at a temperature no greater than about 100.degree. C. In a third feature, the film is formed entirely from hydrogenated amorphous silicon. In a fourth feature, the film is formed by first applying an amorphous silicon layer to the surface and, thereafter, hydrogenating the amorphous silicon layer to form the outermost layer.
摘要翻译：本文公开了使用非晶硅作为光致抗蚀剂的方法。光致抗蚀剂通过首先形成至少包括在适当表面上包括氢化非晶硅的最外层的薄膜来制造。然后将最外层的预定区域暴露于紫外光。曝光后，除去最外层的未曝光区域以及薄膜的任何下面的相关部分，以便在未曝光的最外层区域的底部的区域中露出表面。在第一特征中，最外层形成在不大于约100℃的温度。在第二特征中，最外层的预定区域暴露于不大于约100℃的紫外线。在第三个特征是膜完全由氢化非晶硅形成。在第四特征中，通过首先将非晶硅层施加到表面，然后将非晶硅层氢化以形成最外层来形成膜。

3. 发明授权

US07250598B2 Plasmon enhanced near-field optical probes 有权
标题翻译：等离子增强近场光学探针
公开(公告)号：US07250598B2
公开(公告)日：2007-07-31
申请号：US11072017
申请日：2005-03-04
申请人： Russell E. Hollingsworth , Reuben T. Collins
发明人： Russell E. Hollingsworth , Reuben T. Collins
IPC分类号： G11B11/00
CPC分类号： G01Q10/04 , G01Q60/22 , Y10S977/862
摘要： A plasmon enhanced near-field optical probe has an optical coupler with an end face and a metal coating forming at least one plasmon enhancement structure. An extension provides probe-to-sample separation feedback. A microscope cantilever has a lever arm with an aperture, a tip to provide tip-to-sample separation feedback, and a plasmon enhancement structure. An air bearing slider apparatus has a base, air bearing slider pads, and a metal film forming a plasmon enhancement structure about an aperture. A plasmon enhanced optical probe end cap has a socket with an entry aperture for an optical fiber and an exit aperture with a plasmon enhanced transmission structure. A positioning subsystem has a piezoelectric member that adjusts a length of the positioning subsystem, and a quadranted piezo device that adjusts a position of the positioning subsystem.
摘要翻译：等离子体增强近场光学探针具有光学耦合器，其具有端面和形成至少一个等离子体激元增强结构的金属涂层。扩展提供探针到样品分离反馈。显微镜悬臂具有带有孔的杠杆臂，提供尖端到样品分离反馈的尖端和等离子体增强结构。空气轴承滑块装置具有基座，空气轴承滑块和形成围绕孔的等离子体增强结构的金属膜。等离子体增强型光学探针端盖具有带有用于光纤的入口孔的插座和具有等离子体增强传输结构的出口孔。定位子系统具有调整定位子系统的长度的压电元件和调整定位子系统位置的四元压电器件。

4. 发明授权

US07772555B2 Plasmon coupling apparatus and method 有权
标题翻译：等离子体耦合装置及方法
公开(公告)号：US07772555B2
公开(公告)日：2010-08-10
申请号：US11671122
申请日：2007-02-05
申请人： Russell E. Hollingsworth
发明人： Russell E. Hollingsworth
IPC分类号： G01J5/00 , G01N23/00
CPC分类号： G01J5/20 , G01J5/08 , G01J5/0825 , G01Q60/22
摘要： Systems and apparatus enhance transmission of electromagnetic energy through a sub-wavelength aperture. A metal film has an input surface and an output surface and forms the sub-wavelength aperture between the input and output surfaces, a first plurality of grooves on the input surface, and a cavity around the sub-wavelength aperture. The width of the cavity determines a resonant wavelength of electromagnetic energy transmitted through the sub-wavelength aperture. The patterned metal film provides plasmon coupling of electromagnetic energy incident upon the input surface transmit electromagnetic energy through the sub-wavelength aperture.
摘要翻译：系统和装置通过亚波长孔径增强电磁能的传输。金属膜具有输入表面和输出表面，并且在输入和输出表面之间形成亚波长孔径，在输入表面上形成第一多个凹槽，并且在亚波长孔径周围形成空腔。空腔的宽度决定了透过亚波长孔径的电磁能的共振波长。图案化的金属膜提供入射到输入表面上的电磁能的等离子体耦合，通过亚波长孔传输电磁能。

5. 发明申请

US20080185521A1 PLASMON COUPLING APPARATUS AND METHOD 有权
标题翻译：等离子联轴器和方法
公开(公告)号：US20080185521A1
公开(公告)日：2008-08-07
申请号：US11671122
申请日：2007-02-05
申请人： Russell E. Hollingsworth
发明人： Russell E. Hollingsworth
IPC分类号： G01J5/00 , G02B27/09
CPC分类号： G01J5/20 , G01J5/08 , G01J5/0825 , G01Q60/22
摘要： Systems and apparatus enhance transmission of electromagnetic energy through a sub-wavelength aperture. A metal film has an input surface and an output surface and forms the sub-wavelength aperture between the input and output surfaces, a first plurality of grooves on the input surface, and a cavity around the sub-wavelength aperture. The width of the cavity determines a resonant wavelength of electromagnetic energy transmitted through the sub-wavelength aperture. The patterned metal film provides plasmon coupling of electromagnetic energy incident upon the input surface transmit electromagnetic energy through the sub-wavelength aperture.
摘要翻译：系统和装置通过亚波长孔径增强电磁能的传输。金属膜具有输入表面和输出表面，并且在输入和输出表面之间形成亚波长孔径，在输入表面上形成第一多个凹槽，并且在亚波长孔径周围形成空腔。空腔的宽度决定了透过亚波长孔径的电磁能的共振波长。图案化的金属膜提供入射到输入表面上的电磁能的等离子体耦合，通过亚波长孔传输电磁能。

6. 发明授权

US07176450B2 Long travel near-field scanning optical microscope 有权
标题翻译：长途近场扫描光学显微镜
公开(公告)号：US07176450B2
公开(公告)日：2007-02-13
申请号：US11028074
申请日：2005-01-03
申请人： Russell E. Hollingsworth
发明人： Russell E. Hollingsworth
IPC分类号： H01J3/14 , H01J5/16 , H01J40/14 , G01N23/00 , G21K7/00
CPC分类号： G01Q10/04 , G01Q60/22
摘要： A near-field scanning optical microscope system exposes photoresist on a substrate. The system includes an NSOM probe, and translational stages capable of moving one of the probe and the substrate such that the probe traverses, in continuous motion, over the entire substrate. Another near-field scanning optical microscope system exposes photoresist on a substrate using an array of NSOM probes. Methods for exposing photoresist on a substrate include the steps of translating a surface of the substrate across an NSOM probe (or an array of NSOM probes) in continuous motion.
摘要翻译：近场扫描光学显微镜系统在基板上曝光光致抗蚀剂。该系统包括NSOM探针和能够移动探针和基底之一的平移级，使得探针以连续运动方式遍及整个基底。另一个近场扫描光学显微镜系统使用NSOM探针阵列在基片上曝光光致抗蚀剂。用于在衬底上曝光光致抗蚀剂的方法包括以连续运动方式平移跨越NSOM探针（或NSOM探针阵列）的衬底的表面的步骤。

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