专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US10217742B2 Semiconductor device having dummy active fin patterns 有权
公开(公告)号：US10217742B2
公开(公告)日：2019-02-26
申请号：US15902025
申请日：2018-02-22
申请人： SAMSUNG ELECTRONICS CO., LTD.
发明人： In Wook Oh , Jae Seok Yang , Jong Hyun Lee , Hyun Jae Lee , Sung Wook Hwang
IPC分类号： H01L27/08 , H01L27/02 , H01L23/52 , G06F17/50 , H01L27/088 , H01L23/528
摘要： A semiconductor device includes circuit active fin lines and circuit gate lines intersecting each other in a circuit active region, dummy active fin lines and dummy gate lines intersecting each other in a dummy active region, the active fin lines and the dummy active fin lines having same width and pitch, and the circuit gate lines and the dummy gate lines having same width and pitch, wherein at least some of the dummy active fin lines are aligned with and collinear with respective circuit active fin lines, and at least some of the dummy gate lines are aligned with and collinear with respective circuit gate lines.

2. 发明授权

US09151962B2 Position detector and autofocus control apparatus using focal point deviation detector 有权
标题翻译：位置检测器和使用焦点偏差检测器的自动对焦控制装置
公开(公告)号：US09151962B2
公开(公告)日：2015-10-06
申请号：US13773736
申请日：2013-02-22
申请人： Samsung Electronics Co., Ltd.
发明人： Hyun Jae Lee , Myoung Ki Ahn , Kwang Soo Kim , In Ho Seo , Chang Hoon Choi
IPC分类号： G02B27/40 , G02B7/38 , G02B3/10
CPC分类号： G02B27/40 , G02B3/10 , G02B7/38
摘要： An autofocus control apparatus includes a beam splitter, a condenser lens and a detector. The beam splitter directs light beams from a light source toward a sample and passes light beams reflected from the sample to the condenser lens. The condenser lens condenses the light beams, and the detector detects a focal point deviation of the sample relative to a focal point of the condenser lens. The focal point deviation is detected based on an intersection of a focal line passing through different focal points of the condenser lens and a light receiving plane configured to receive the light beams passing through the condenser lens.
摘要翻译：自动对焦控制装置包括分束器，聚光透镜和检测器。分束器将来自光源的光束引向样品，并将从样品反射的光束传递到聚光透镜。聚光透镜冷凝光束，并且检测器检测样品相对于聚光透镜的焦点的焦点偏差。基于通过聚光透镜的不同焦点的焦点线和被配置为接收通过聚光透镜的光束的受光面的交点，检测焦点偏差。

3. 发明授权

US09812356B2 Method for manufacturing a semiconductor device 有权
公开(公告)号：US09812356B2
公开(公告)日：2017-11-07
申请号：US15405762
申请日：2017-01-13
申请人： SAMSUNG ELECTRONICS CO., LTD.
发明人： Sung Wook Hwang , Jong Hyun Lee , Jae Seok Yang , In Wook Oh , Hyun Jae Lee
IPC分类号： H01L23/528 , H01L21/768 , G06F17/50
CPC分类号： H01L21/0337 , H01L21/76802 , H01L23/481
摘要： A method for manufacturing a semiconductor device includes generating a layout including a first conductive pattern region and a second conductive pattern region. A first interlayer insulating film is formed on a substrate, the first interlayer insulating film including a first region corresponding to the first conductive pattern region, a second region corresponding to the second conductive pattern region, and a third region spaced apart from the first and second regions and disposed between the first and second regions. First, second and third lower metal wirings are formed to respectively fill the first, second and third recesses of the first interlayer insulating film. A second interlayer insulating film is formed on the first interlayer insulating film. A first dummy via hole is formed in the second interlayer insulating film to expose the third lower metal wiring. The third lower metal wiring is electrically isolated.

4. 发明申请

US20140002829A1 OPTICAL MEASUREMENT APPARATUS AND METHOD OF CONTROLLING THE SAME 审中-公开
标题翻译：光学测量装置及其控制方法
公开(公告)号：US20140002829A1
公开(公告)日：2014-01-02
申请号：US13927843
申请日：2013-06-26
申请人： Samsung Electronics Co., Ltd.
发明人： Kwang Soo KIM , Hyun Jae Lee , Byeong Hwan Jeon , Chang Hoon Choi
IPC分类号： G01B11/28
CPC分类号： G01B11/00 , G01B11/24 , G01B11/28 , G01B2210/56
摘要： According to example embodiments, an optical measurement apparatus may include: a station configured to support a measurement target; an image acquisition unit configured to acquire a one-dimensional (1D) line image of the measurement target; a driver configured to move the station and the image acquisition unit; and a controller. The controller may be configured to control the driver and the image acquisition unit to acquire a plurality of 1D line images of the measurement target while varying a distance between the image acquisition unit and the measurement target to generate a two-dimensional (2D) scan image from combining the plurality of 1D line images; and to detect a pattern of the measurement target based on comparing a plurality of 2D reference images and the 2D scan image. The optical measurement apparatus may measure critical dimensions of non-repeating ultrafine patterns at high speed.
摘要翻译：根据示例实施例，光学测量装置可以包括：被配置为支持测量目标的站; 图像获取单元，被配置为获取所述测量对象的一维（1D）线图像; 驱动器，被配置为移动所述站和所述图像获取单元; 和控制器。控制器可以被配置为控制驱动器和图像获取单元，以在改变图像获取单元和测量对象之间的距离的同时获取测量对象的多个1D线图像，以生成二维（2D）扫描图像从组合多个1D线图像; 并且基于比较多个2D参考图像和2D扫描图像来检测测量对象的图案。光学测量装置可以高速度地测量非重复超细纹图案的临界尺寸。

5. 发明授权

US11094693B2 Layout method 有权
公开(公告)号：US11094693B2
公开(公告)日：2021-08-17
申请号：US16255519
申请日：2019-01-23
申请人： SAMSUNG ELECTRONICS CO., LTD.
发明人： In Wook Oh , Jae Seok Yang , Jong Hyun Lee , Hyun Jae Lee , Sung Wook Hwang
IPC分类号： H01L27/088 , G06F30/39 , G06F30/392 , H01L23/528 , H01L27/02
摘要： A semiconductor device includes circuit active fin lines and circuit gate lines intersecting each other in a circuit active region, dummy active fin lines and dummy gate lines intersecting each other in a dummy active region, the active fin lines and the dummy active fin lines having same width and pitch, and the circuit gate lines and the dummy gate lines having same width and pitch, wherein at least some of the dummy active fin lines are aligned with and collinear with respective circuit active fin lines, and at least some of the dummy gate lines are aligned with and collinear with respective circuit gate lines.

6. 发明授权

US09929156B2 Semiconductor device having dummy active fin patterns 有权
公开(公告)号：US09929156B2
公开(公告)日：2018-03-27
申请号：US15372840
申请日：2016-12-08
申请人： SAMSUNG ELECTRONICS CO., LTD.
发明人： In Wook Oh , Jae Seok Yang , Jong Hyun Lee , Hyun Jae Lee , Sung Wook Hwang
IPC分类号： H01L27/08 , H01L27/02 , H01L23/52 , H01L29/66 , G06F17/50 , H01L27/088 , H01L23/528
CPC分类号： H01L27/0886 , G06F17/5072 , H01L23/528 , H01L27/0207
摘要： A semiconductor device includes circuit active fin lines and circuit gate lines intersecting each other in a circuit active region, dummy active fin lines and dummy gate lines intersecting each other in a dummy active region, the active fin lines and the dummy active fin lines having same width and pitch, and the circuit gate lines and the dummy gate lines having same width and pitch, wherein at least some of the dummy active fin lines are aligned with and collinear with respective circuit active fin lines, and at least some of the dummy gate lines are aligned with and collinear with respective circuit gate lines.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式