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1. 发明申请

US20160351214A1 NEAR FIELD TRANSDUCERS (NFTS) AND METHODS OF MAKING 有权
标题翻译：近场传感器（NFTS）和制造方法
公开(公告)号：US20160351214A1
公开(公告)日：2016-12-01
申请号：US15167622
申请日：2016-05-27
申请人： SEAGATE TECHNOLOGY LLC
发明人： Michael C. Kautzky , Mark H. Ostrowski , David Michael Grundman , Martin Blaber
IPC分类号： G11B5/31
CPC分类号： G11B5/3169 , G11B5/3109 , G11B5/3133 , G11B5/314 , G11B5/3163 , G11B5/6088 , G11B2005/0021
摘要： Methods of forming a NFT the methods including forming a hard mask positioned over at least a portion of the rod, the hard mask including at least one layer; patterning a resist mask over the hard mask, the resist mask having an edge positioned over at least a portion of the rod; etching a portion of the hard mask to expose a back edge of the rod and to form a back edge of the hard mask, wherein the back edge of the rod is equivalent to the back edge of the peg; and wherein a forward portion of the rod which is the portion of the rod forward of the back edge is covered by the hard mask; forming a disc mask including a void configured to form a disc of a NFT, the disc mask being formed over at least a portion of the hard mask so that the exposed back edge of the rod is within the void configured to form the disc; etching an area exposed in the void of the disc mask to remove both a rear portion of the rod and the surrounding dielectric up to the back edge of the hard mask edge; depositing a disc material in the etched void, wherein the back edge of the hard mask defines the front edge of the disc and the back edge of the rod is in contact with the front edge of the disc; and polishing the deposited disc material to form a top surface substantially planar with the top of the forward rod portion.
摘要翻译：形成NFT的方法包括形成位于杆的至少一部分上方的硬掩模，所述硬掩模包括至少一层; 在所述硬掩模上形成抗蚀剂掩模，所述抗蚀剂掩模具有位于所述杆的至少一部分上方的边缘; 蚀刻硬掩模的一部分以露出杆的后边缘并形成硬掩模的后边缘，其中杆的后边缘等同于钉的后边缘; 并且其中所述杆的前部部分是所述后缘的前部的所述部分被所述硬掩模覆盖; 形成包括构造成形成NFT的盘的空隙的盘掩模，所述盘掩模形成在所述硬掩模的至少一部分上，使得所述杆的暴露的后边缘在被构造成形成所述盘的所述空间内; 蚀刻暴露在盘掩模的空隙中的区域，以将杆的后部和周围的电介质移除到硬掩模边缘的后边缘; 将光盘材料沉积在蚀刻的空隙中，其中硬掩模的后边缘限定盘的前边缘，并且杆的后边缘与盘的前边缘接触; 并抛光沉积的盘材料以形成与前杆部分的顶部基本平面的顶表面。

2. 发明授权

US09928859B2 Near field transducers (NFTS) and methods of making 有权
公开(公告)号：US09928859B2
公开(公告)日：2018-03-27
申请号：US15481866
申请日：2017-04-07
申请人： SEAGATE TECHNOLOGY LLC
发明人： Michael C. Kautzky , Mark H. Ostrowski , David Michael Grundman , Martin Blaber
IPC分类号： G11B5/02 , G11B11/00 , G11B5/31 , G11B5/127 , G11B5/60 , G11B5/48
CPC分类号： G11B5/3163 , G11B5/1272 , G11B5/3133 , G11B5/314 , G11B5/3169 , G11B5/4866 , G11B5/6005 , G11B5/6088 , G11B2005/0021
摘要： Methods of forming a NFT the methods including forming a hard mask positioned over at least a portion of the rod, the hard mask including at least one layer; patterning a resist mask over the hard mask, the resist mask having an edge positioned over at least a portion of the rod; etching a portion of the hard mask to expose a back edge of the rod and to form a back edge of the hard mask, wherein the back edge of the rod is equivalent to the back edge of the peg; and wherein a forward portion of the rod which is the portion of the rod forward of the back edge is covered by the hard mask; forming a disc mask including a void configured to form a disc of a NFT, the disc mask being formed over at least a portion of the hard mask so that the exposed back edge of the rod is within the void configured to form the disc; etching an area exposed in the void of the disc mask to remove both a rear portion of the rod and the surrounding dielectric up to the back edge of the hard mask edge; depositing a disc material in the etched void, wherein the back edge of the hard mask defines the front edge of the disc and the back edge of the rod is in contact with the front edge of the disc; and polishing the deposited disc material to form a top surface substantially planar with the top of the forward rod portion.

3. 发明申请

US20170213571A1 NEAR FIELD TRANSDUCERS (NFTS) AND METHODS OF MAKING 审中-公开
公开(公告)号：US20170213571A1
公开(公告)日：2017-07-27
申请号：US15481866
申请日：2017-04-07
申请人： SEAGATE TECHNOLOGY LLC
发明人： Michael C. Kautzky , Mark H. Ostrowski , David Michael Grundman , Martin Blaber
IPC分类号： G11B5/31 , G11B5/60 , G11B5/48 , G11B5/127
CPC分类号： G11B5/3163 , G11B5/1272 , G11B5/3133 , G11B5/314 , G11B5/3169 , G11B5/4866 , G11B5/6005 , G11B5/6088 , G11B2005/0021
摘要： Methods of forming a NFT the methods including forming a hard mask positioned over at least a portion of the rod, the hard mask including at least one layer; patterning a resist mask over the hard mask, the resist mask having an edge positioned over at least a portion of the rod; etching a portion of the hard mask to expose a back edge of the rod and to form a back edge of the hard mask, wherein the back edge of the rod is equivalent to the back edge of the peg; and wherein a forward portion of the rod which is the portion of the rod forward of the back edge is covered by the hard mask; forming a disc mask including a void configured to form a disc of a NFT, the disc mask being formed over at least a portion of the hard mask so that the exposed back edge of the rod is within the void configured to form the disc; etching an area exposed in the void of the disc mask to remove both a rear portion of the rod and the surrounding dielectric up to the back edge of the hard mask edge; depositing a disc material in the etched void, wherein the back edge of the hard mask defines the front edge of the disc and the back edge of the rod is in contact with the front edge of the disc; and polishing the deposited disc material to form a top surface substantially planar with the top of the forward rod portion.

4. 发明申请

US20160133275A1 METHODS OF FORMING NEAR FIELD TRANSDUCERS (NFTS) AND PORTIONS THEREOF 审中-公开
标题翻译：形成现场传感器（NFTS）及其部件的方法
公开(公告)号：US20160133275A1
公开(公告)日：2016-05-12
申请号：US14938264
申请日：2015-11-11
申请人： SEAGATE TECHNOLOGY LLC
发明人： Sridhar Dubbaka , YongJun Zhao , David Michael Grundman
IPC分类号： G11B5/127
CPC分类号： G11B5/314 , G11B2005/0021
摘要： A method of forming a peg of a NFT, the peg having a tapered portion, the method including depositing a layer of dielectric material; forming a three dimensional shape from at least a portion of the dielectric material the three dimensional shape having two side surfaces and two end surfaces; and depositing plasmonic material on at least one side surface of the three dimensional shape of dielectric material, wherein the plasmonic material deposited on the at least one side surface forms the tapered portion of the peg.
摘要翻译：一种形成NFT的钉的方法，所述钉具有锥形部分，所述方法包括沉积介电材料层; 从电介质材料的至少一部分形成具有两个侧面和两个端面的三维形状的三维形状; 以及将等离子体激元材料沉积在介电材料的三维形状的至少一个侧表面上，其中沉积在所述至少一个侧表面上的等离子体激元材料形成所述钉的锥形部分。

5. 发明授权

US10186283B2 Methods of forming near field transducers (NFTS) and portions thereof 有权
公开(公告)号：US10186283B2
公开(公告)日：2019-01-22
申请号：US14938264
申请日：2015-11-11
申请人： SEAGATE TECHNOLOGY LLC
发明人： Sridhar Dubbaka , YongJun Zhao , David Michael Grundman
IPC分类号： H01L21/311 , G11B5/31 , G11B5/00
摘要： A method of forming a peg of a NFT, the peg having a tapered portion, the method including depositing a layer of dielectric material; forming a three dimensional shape from at least a portion of the dielectric material the three dimensional shape having two side surfaces and two end surfaces; and depositing plasmonic material on at least one side surface of the three dimensional shape of dielectric material, wherein the plasmonic material deposited on the at least one side surface forms the tapered portion of the peg.

6. 发明授权

US09620152B2 Near field transducers (NFTS) and methods of making 有权
公开(公告)号：US09620152B2
公开(公告)日：2017-04-11
申请号：US15167622
申请日：2016-05-27
申请人： SEAGATE TECHNOLOGY LLC
发明人： Michael C. Kautzky , Mark H. Ostrowski , David Michael Grundman , Martin Blaber
IPC分类号： G11B5/33 , G11B11/00 , G11B5/31 , G11B5/00
CPC分类号： G11B5/3169 , G11B5/3109 , G11B5/3133 , G11B5/314 , G11B5/3163 , G11B5/6088 , G11B2005/0021
摘要： Methods of forming a NFT the methods including forming a hard mask positioned over at least a portion of the rod, the hard mask including at least one layer; patterning a resist mask over the hard mask, the resist mask having an edge positioned over at least a portion of the rod; etching a portion of the hard mask to expose a back edge of the rod and to form a back edge of the hard mask, wherein the back edge of the rod is equivalent to the back edge of the peg; and wherein a forward portion of the rod which is the portion of the rod forward of the back edge is covered by the hard mask; forming a disc mask including a void configured to form a disc of a NFT, the disc mask being formed over at least a portion of the hard mask so that the exposed back edge of the rod is within the void configured to form the disc; etching an area exposed in the void of the disc mask to remove both a rear portion of the rod and the surrounding dielectric up to the back edge of the hard mask edge; depositing a disc material in the etched void, wherein the back edge of the hard mask defines the front edge of the disc and the back edge of the rod is in contact with the front edge of the disc; and polishing the deposited disc material to form a top surface substantially planar with the top of the forward rod portion.

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