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    • 5. 发明授权
    • Stack type image sensor
    • 堆叠式图像传感器
    • US09455284B2
    • 2016-09-27
    • US14602427
    • 2015-01-22
    • Samsung Electronics Co., Ltd.
    • Byung-Jun ParkSeung-Hun ShinChang-Rok MoonTae-Seok OhJune-Taeg Lee
    • H01L27/146
    • H01L27/14605H01L21/76898H01L23/481H01L27/14612H01L27/1462H01L27/1463H01L27/14636H01L27/1464H01L27/14687
    • A stack type image sensor may include: a first chip including a via isolation trench penetrating a first substrate, a via isolation layer including an insulation material in the via isolation trench, a first conductive layer on the first substrate, and a first insulation layer; a second chip including a second conductive layer on a second substrate, and a second insulation layer contacting the first insulation layer; a first via trench penetrating the first substrate to expose the second conductive layer with respect to the trench; and a first through via formed in the first via trench, and including a third conductive layer insulated from the first substrate by the via isolation layer, the third conductive layer electrically connecting the first conductive layer to the second conductive layer. The third conductive layer may be formed in the via isolation trench.
    • 堆叠型图像传感器可以包括:第一芯片,其包括穿过第一衬底的通孔隔离沟槽,在通孔隔离沟槽中包括绝缘材料的通孔隔离层,第一衬底上的第一导电层和第一绝缘层; 第二芯片,包括在第二基板上的第二导电层,以及与第一绝缘层接触的第二绝缘层; 穿过所述第一衬底以相对于所述沟槽暴露所述第二导电层的第一通孔沟槽; 以及形成在所述第一通孔沟槽中的第一通孔,并且包括通过所述通孔隔离层与所述第一基板绝缘的第三导电层,所述第三导电层将所述第一导电层电连接到所述第二导电层。 第三导电层可以形成在通孔隔离沟槽中。