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    • 8. 发明申请
    • METHODS OF FORMING MAGNETIC DEVICES WITH VARIABLE OVERCOATS
    • 形成具有可变零件的磁性装置的方法
    • US20170061994A1
    • 2017-03-02
    • US15248682
    • 2016-08-26
    • SEAGATE TECHNOLOGY LLC
    • Joseph Michael StephanDouglas H. ColeDaniel Richard Buettner
    • G11B5/31
    • G11B5/3163G11B5/102G11B5/3106G11B5/314G11B5/4866G11B5/6082G11B5/6088G11B2005/0021
    • Methods that include depositing a first layer over the entire surface of a structure, the structure having a magnetic reader and a magnetic writer, wherein the magnetic reader and the magnetic writer are positioned adjacent to each other on a substrate and the magnetic writer includes a near field transducer (NFT); depositing a second layer over the entire surface of the first layer; depositing a photoresist material layer over the entire surface of the second layer, the photoresist material layer having a bottom surface in contact with the second layer and an opposing top surface; exposing the photoresist material layer to radiation through the bottom surface of the photoresist material layer via the NFT to form a first exposed region; and exposing the photoresist material layer to radiation through the top surface of the photoresist material layer to form a second exposed region.
    • 包括在结构的整个表面上沉积第一层的方法,所述结构具有磁性读取器和磁性写入器,其中所述磁性读取器和所述磁性写入器在衬底上彼此相邻定位,并且所述磁性写入器包括接近 场传感器(NFT); 在第一层的整个表面上沉积第二层; 在所述第二层的整个表面上沉积光致抗蚀剂材料层,所述光致抗蚀剂材料层具有与所述第二层接触的底表面和相对的顶表面; 通过NFT将光致抗蚀剂材料层暴露于光致抗蚀剂材料层的底表面以形成第一暴露区域; 以及将光致抗蚀剂材料层暴露于通过光致抗蚀剂材料层的顶表面的辐射以形成第二暴露区域。