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    • 1. 发明申请
    • PROCESS GAS ANALYZER AND METHOD FOR ANALYZING A PROCESS GAS
    • 工艺气体分析仪和方法分析工艺气体
    • US20160363530A1
    • 2016-12-15
    • US15176367
    • 2016-06-08
    • Siemens Aktiengesellschaft
    • Ralf BITTER
    • G01N21/39G01N21/27
    • G01N21/39G01N21/15G01N21/274G01N21/3504G01N21/85G01N33/0026G01N2021/151G01N2021/8578G01N2201/06113G01N2201/127
    • A process gas analyzer and method for analyzing a process gas carried in a plant section, wherein light from a light source is passed through the process gas and detected via a detector, evaluated in an evaluation unit to produce an analysis result with respect to the absorption in the process gas, where chambers or purging pipes, present between the light source and the plant section and also between the detector and the plant section, are flushed with a purge gas to analyze the process gas, and where the volume flow rate of the purge gas is periodically modulated and the effect of the purge gas on the analysis result is determined based on changes in the detected absorption caused by the modulation and removed from the analysis result to enable a high degree of compensation for measurement errors caused by the purging.
    • 一种用于分析在植物部分中携带的处理气体的工艺气体分析器和方法,其中来自光源的光通过处理气体并经由检测器检测,在评估单元中评估以产生关于吸收的分析结果 在处理气体中,存在于光源和植物部分之间以及检测器和植物部分之间的腔室或清洗管道用吹扫气体冲洗以分析工艺气体,并且其中体积流量 净化气体被周期调制,并且基于由调制引起的检测到的吸收的变化并且从分析结果中去除了清洗气体对分析结果的影响,从而能够对由清洗引起的测量误差进行高度的补偿。
    • 2. 发明申请
    • Absorption spectrometer and method for measuring the concentration of a gaseous component of interest in a measurement gas
    • 吸收光谱仪和测量气体中感兴趣的气体组分浓度的方法
    • US20160047739A1
    • 2016-02-18
    • US14823248
    • 2015-08-11
    • Siemens Aktiengesellschaft
    • Ralf BITTER
    • G01N21/31G01N33/00
    • G01N21/31G01J3/433G01N21/3504G01N21/39G01N33/0073G01N2201/061
    • Absorption spectrometer and method for measuring the concentration of a gaseous component of interest in a measurement gas, wherein to compensate influence of changes in an optical path length in the absorption spectrometer on a measured result, light from the laser is modulated with at least one pilot frequency in the MHz range, the measurement signal is analyzed in a phase-sensitive manner for the pilot frequency, phase information obtained during this analysis is compared with phase information obtained during calibration of the absorption spectrometer, where the measured result is corrected as a function of the difference between the two items of phase information. Alternatively, light from the laser is modulated with two pilot frequencies, where signal components contained in the measurement signal with the pilot frequencies are detected in a phase-sensitive manner and the difference between the phase information of the two signal components obtained in this operation is analyzed.
    • 吸收光谱仪和测量气体中感兴趣的气体组分的浓度的方法,其中为了补偿吸收光谱仪中的光程长度的变化对测量结果的影响,来自激光的光由至少一个导频 频率在MHz范围内,以导频的相敏方式分析测量信号,将在该分析期间获得的相位信息与在吸收光谱仪的校准期间获得的相位信息进行比较,其中测量结果被校正为函数 的两个相位信息之间的区别。 或者,来自激光器的光由两个导频调制,其中包含在具有导频的测量信号中的信号分量以相敏性方式被检测,并且在该操作中获得的两个信号分量的相位信息之间的差为 分析