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1. 发明申请

US20080299311A1 Process and Apparatus for Organic Vapor Jet Deposition 有权
标题翻译：有机气相沉积法的工艺和装置
公开(公告)号：US20080299311A1
公开(公告)日：2008-12-04
申请号：US12168532
申请日：2008-07-07
申请人： Max SHTEIN , Stephen R. Forrest
发明人： Max SHTEIN , Stephen R. Forrest
IPC分类号： C23C16/04
CPC分类号： C23C14/12 , C23C14/24
摘要： A method of fabricating an organic film is provided. A non-reactive carrier gas is used to transport an organic vapor. The organic vapor is ejected through a nozzle block onto a cooled substrate, to form a patterned organic film. A device for carrying out the method is also provided. The device includes a source of organic vapors, a source of carrier gas and a vacuum chamber. A heated nozzle block attached to the source of organic vapors and the source of carrier gas has at least one nozzle adapted to eject carrier gas and organic vapors onto a cooled substrate disposed within the vacuum chamber.
摘要翻译：提供一种制造有机膜的方法。非反应性载气用于运输有机蒸气。将有机蒸气通过喷嘴块喷射到冷却的基底上，以形成图案化的有机膜。还提供了一种用于执行该方法的装置。该装置包括有机蒸汽源，载气源和真空室。连接到有机蒸气源和载气源的加热喷嘴块具有至少一个适于将载气和有机蒸汽喷射到设置在真空室内的冷却基板上的喷嘴。

2. 发明授权

US07026187B2 Method of manufacturing high-mobility organic thin films using organic vapor phase deposition 有权
标题翻译：使用有机气相沉积制造高迁移率有机薄膜的方法
公开(公告)号：US07026187B2
公开(公告)日：2006-04-11
申请号：US10819658
申请日：2004-04-06
申请人： Max Shtein , Stephen R. Forrest
发明人： Max Shtein , Stephen R. Forrest
IPC分类号： H01L51/40
CPC分类号： H01L51/0545 , B05D1/60 , C23C14/12 , C23C14/228 , H01L51/0002 , H01L51/0052 , Y02E10/549 , Y02P70/521
摘要： A method of employing organic vapor phase deposition to fabricate a polycrystalline organic thin film is described. By employing organic vapor phase deposition at moderate deposition chamber pressures and substrate temperatures, a polycrystalline organic thin film results having significantly larger purity and grain size than what is achievable by vacuum thermal evaporation. These polycrystalline organic thin films may be employed in a variety of applications, including, for example, organic light emitting devices, photovoltaic cells, photodetectors, lasers, and thin film transistors.
摘要翻译：描述了使用有机气相沉积来制造多晶有机薄膜的方法。通过在中等沉积室压力和衬底温度下采用有机气相沉积，多晶有机薄膜具有比通过真空热蒸发可实现的显着更大的纯度和晶粒尺寸。这些多晶有机薄膜可以用于各种应用中，包括例如有机发光器件，光伏电池，光电检测器，激光器和薄膜晶体管。

3. 发明授权

US07435617B2 Method of fabricating an optoelectronic device having a bulk heterojunction 有权
标题翻译：制造具有体异质结的光电器件的方法
公开(公告)号：US07435617B2
公开(公告)日：2008-10-14
申请号：US10999716
申请日：2004-11-30
申请人： Max Shtein , Fan Yang , Stephen R. Forrest
发明人： Max Shtein , Fan Yang , Stephen R. Forrest
IPC分类号： H01L51/40 , H01L35/24
CPC分类号： B82Y30/00 , H01L51/0008 , H01L51/0053 , H01L51/0078 , H01L51/4213 , H01L51/4246 , H01L51/4253 , H01L2251/308 , Y02E10/549 , Y02P70/521
摘要： A method of fabricating an optoelectronic device comprises: depositing a first layer having protrusions over a first electrode, in which the first layer comprises a first organic small molecule material; depositing a second layer on the first layer such that the second layer is in physical contact with the first layer; in which the smallest lateral dimension of the protrusions are between 1 to 5 times the exciton diffusion length of the first organic small molecule material; and depositing a second electrode over the second layer to form the optoelectronic device. A method of fabricating an organic optoelectronic device having a bulk heterojunction is also provided and comprises: depositing a first layer with protrusions over an electrode by organic vapor phase deposition; depositing a second layer on the first layer where the interface of the first and second layers forms a bulk heterojunction; and depositing another electrode over the second layer.
摘要翻译：制造光电器件的方法包括：在第一电极上沉积具有突起的第一层，其中第一层包含第一有机小分子材料; 在所述第一层上沉积第二层，使得所述第二层与所述第一层物理接触; 其中突起的最小横向尺寸为第一有机小分子材料的激子扩散长度的1至5倍; 以及在所述第二层上沉积第二电极以形成所述光电器件。还提供了制造具有体异质结的有机光电子器件的方法，其包括：通过有机气相沉积在电极上沉积具有突起的第一层; 在第一层上沉积第二层，其中第一和第二层的界面形成体异质结; 并在第二层上沉积另一电极。

4. 发明授权

US07419846B2 Method of fabricating an optoelectronic device having a bulk heterojunction 有权
标题翻译：制造具有体异质结的光电器件的方法
公开(公告)号：US07419846B2
公开(公告)日：2008-09-02
申请号：US10824288
申请日：2004-04-13
申请人： Max Shtein , Fan Yang , Stephen R. Forrest
发明人： Max Shtein , Fan Yang , Stephen R. Forrest
IPC分类号： H01L51/48 , H01L51/42
CPC分类号： B82Y30/00 , H01L51/0008 , H01L51/0053 , H01L51/0078 , H01L51/4213 , H01L51/4246 , H01L51/4253 , H01L2251/308 , Y02E10/549 , Y02P70/521
摘要： A method of fabricating an organic optoelectronic device having a bulk heterojunction comprises the steps of: depositing a first layer over a first electrode by organic vapor phase deposition, wherein the first layer comprises a first organic small molecule material; depositing a second layer on the first layer such that the second layer is in physical contact with the first layer, wherein the interface of the second layer on the first layer forms a bulk heterojunction; and depositing a second electrode over the second layer to form the optoelectronic device. In another embodiment, a first layer having protrusions is deposited over the first electrode, wherein the first layer comprises a first organic small molecule material. For example, when the first layer is an electron donor layer, the first electrode is an anode, the second layer is an electron acceptor layer, and the second electrode is a cathode. As a further example, when the first layer is an electron acceptor layer, the first electrode is a cathode, the second layer is an electron donor layer, and the second electrode is an anode.
摘要翻译：制造具有本体异质结的有机光电子器件的方法包括以下步骤：通过有机气相沉积在第一电极上沉积第一层，其中第一层包含第一有机小分子材料; 在所述第一层上沉积第二层使得所述第二层与所述第一层物理接触，其中所述第一层上的所述第二层的界面形成体异质结; 以及在所述第二层上沉积第二电极以形成所述光电器件。在另一个实施例中，具有突起的第一层沉积在第一电极上，其中第一层包括第一有机小分子材料。例如，当第一层是电子供体层时，第一电极是阳极，第二层是电子受体层，第二电极是阴极。作为另一个例子，当第一层是电子受体层时，第一电极是阴极，第二层是电子供体层，第二电极是阳极。

5. 发明授权

US06716656B2 Self-aligned hybrid deposition 有权
标题翻译：自对准杂交沉积
公开(公告)号：US06716656B2
公开(公告)日：2004-04-06
申请号：US10233482
申请日：2002-09-04
申请人： Max Shtein , Stephen R. Forrest
发明人： Max Shtein , Stephen R. Forrest
IPC分类号： H01L2100
CPC分类号： H01L51/001 , C23C14/042 , C23C14/12 , H01L51/0008 , H01L51/0013 , H01L51/0021 , H01L51/56 , Y02E10/549
摘要： A method of fabricating an organic device is provided. A first layer is deposited over a substrate through a mask by a first process that results in the first layer having a first area of coverage. A second layer is then deposited over the substrate through the mask by a second process that results in the second layer having a second area of coverage that is different from the first area of coverage.
摘要翻译：提供一种制造有机器件的方法。第一层通过第一工艺通过掩模沉积在衬底上，该第一工艺导致第一层具有第一覆盖区域。然后通过第二过程通过掩模将第二层沉积在衬底上，第二过程导致第二层具有与第一覆盖区域不同的第二覆盖区域。

6. 发明授权

US07897210B2 Device and method for organic vapor jet deposition 有权
标题翻译：有机蒸汽喷射沉积的装置和方法
公开(公告)号：US07897210B2
公开(公告)日：2011-03-01
申请号：US12786982
申请日：2010-05-25
申请人： Max Shtein , Stephen R. Forrest , Jay B. Benzinger
发明人： Max Shtein , Stephen R. Forrest , Jay B. Benzinger
IPC分类号： C23C16/00
CPC分类号： H01L51/001 , C23C14/04 , C23C14/042 , C23C14/12 , C23C14/228 , C23C14/24 , H01L51/0008 , H01L51/0013 , H01L51/0021 , H01L51/56
摘要： A device and a method for facilitating the deposition and patterning of organic materials onto substrates utilizing the vapor transport mechanisms of organic vapor phase deposition is provided. The device includes one or more nozzles, and an apparatus integrally connected to the one or more nozzles, wherein the apparatus includes one or more source cells, a carrier gas inlet, a carrier gas outlet, and a first valve capable of controlling the flow of a carrier gas through the one or more source cells. The method includes moving a substrate relative to an apparatus, and controlling the composition of the organic material and/or the rate of the organic material ejected by the one or more nozzles while moving the substrate relative to the apparatus, such that a patterned organic layer is deposited over the substrate.
摘要翻译：提供了一种利用有机气相沉积的蒸汽输送机制促进有机材料沉积和图案化到基板上的装置和方法。该装置包括一个或多个喷嘴和与该一个或多个喷嘴一体连接的设备，其中该装置包括一个或多个源电池，载气入口，载气出口和能够控制载气通过一个或多个源电池。该方法包括相对于设备移动衬底，并且在移动衬底相对于设备的同时控制有机材料的组成和/或由一个或多个喷嘴喷射的有机材料的速率，使得图案化的有机层沉积在衬底上。

7. 发明授权

US07431968B1 Process and apparatus for organic vapor jet deposition 有权
标题翻译：有机蒸汽喷射沉积的工艺和设备
公开(公告)号：US07431968B1
公开(公告)日：2008-10-07
申请号：US10233470
申请日：2002-09-04
申请人： Max Shtein , Stephen R. Forrest
发明人： Max Shtein , Stephen R. Forrest
IPC分类号： C23C16/00
CPC分类号： C23C14/12 , C23C14/24
摘要： A method of fabricating an organic film is provided. A non-reactive carrier gas is used to transport an organic vapor. The organic vapor is ejected through a nozzle block onto a cooled substrate, to form a patterned organic film. A device for carrying out the method is also provided. The device includes a source of organic vapors, a source of carrier gas and a vacuum chamber. A heated nozzle block attached to the source of organic vapors and the source of carrier gas has at least one nozzle adapted to eject carrier gas and organic vapors onto a cooled substrate disposed within the vacuum chamber.
摘要翻译：提供一种制造有机膜的方法。非反应性载气用于运输有机蒸气。将有机蒸气通过喷嘴块喷射到冷却的基底上，以形成图案化的有机膜。还提供了一种用于执行该方法的装置。该装置包括有机蒸汽源，载气源和真空室。连接到有机蒸气源和载气源的加热喷嘴块具有至少一个适于将载气和有机蒸汽喷射到设置在真空室内的冷却基板上的喷嘴。

8. 发明授权

US08535759B2 Method and apparatus for depositing material using a dynamic pressure 有权
标题翻译：使用动态压力沉积材料的方法和装置
公开(公告)号：US08535759B2
公开(公告)日：2013-09-17
申请号：US12823323
申请日：2010-06-25
申请人： Stephen R. Forrest , Max Shtein
发明人： Stephen R. Forrest , Max Shtein
IPC分类号： C23C16/00 , B05D5/06
CPC分类号： B05D1/60 , C23C14/12 , C23C14/228 , H01L51/0003 , H01L51/0081
摘要： A method of depositing organic material is provided. A carrier gas carrying organic material is ejected from a nozzle at a flow velocity that is at least 10% of the thermal velocity of the carrier gas, such that the organic material is deposited onto a substrate. In some embodiments, the dynamic pressure in a region between the nozzle and the substrate surrounding the carrier gas is at least 1 Torr, and more preferably 10 Torr, during the ejection. In some embodiments, a guard flow is provided around the carrier gas.
摘要翻译：提供了沉积有机材料的方法。携带有机材料的载气以比载气的热速度的至少10％的流速从喷嘴喷出，使得有机材料沉积到基底上。在一些实施例中，在喷射期间喷嘴和围绕载体气体的基底之间的区域中的动态压力为至少1托，更优选为10托。在一些实施例中，围绕载气提供防护流。

9. 发明申请

US20110045196A1 Method and Apparatus for Depositing Material Using a Dynamic Pressure 有权
标题翻译：使用动态压力沉积材料的方法和装置
公开(公告)号：US20110045196A1
公开(公告)日：2011-02-24
申请号：US12823323
申请日：2010-06-25
申请人： Stephen R. Forrest , Max Shtein
发明人： Stephen R. Forrest , Max Shtein
IPC分类号： B05D1/02
CPC分类号： B05D1/60 , C23C14/12 , C23C14/228 , H01L51/0003 , H01L51/0081
摘要： A method of depositing organic material is provided. A carrier gas carrying organic material is ejected from a nozzle at a flow velocity that is at least 10% of the thermal velocity of the carrier gas, such that the organic material is deposited onto a substrate. In some embodiments, the dynamic pressure in a region between the nozzle and the substrate surrounding the carrier gas is at least 1 Torr, and more preferably 10 Torr, during the ejection. In some embodiments, a guard flow is provided around the carrier gas.
摘要翻译：提供了沉积有机材料的方法。携带有机材料的载气以比载气的热速度的至少10％的流速从喷嘴喷出，使得有机材料沉积到基底上。在一些实施例中，在喷射期间喷嘴和围绕载体气体的基底之间的区域中的动态压力为至少1托，更优选为10托。在一些实施例中，围绕载气提供防护流。

10. 发明授权

US07744957B2 Method and apparatus for depositing material 有权
标题翻译：沉积材料的方法和装置
公开(公告)号：US07744957B2
公开(公告)日：2010-06-29
申请号：US10690704
申请日：2003-10-23
申请人： Stephen R. Forrest , Max Shtein
发明人： Stephen R. Forrest , Max Shtein
IPC分类号： C23C16/00 , B05D5/06
CPC分类号： C23C14/12 , C23C14/228 , H01L51/0013 , H01L51/0081
摘要： A method of depositing organic material is provided. A carrier gas carrying an organic material is ejected from a nozzle at a flow velocity that is at least 10% of the thermal velocity of the carrier gas, such that the organic material is deposited onto a substrate. In some embodiments, the dynamic pressure in a region between the nozzle and the substrate surrounding the carrier gas is at least 1 Torr, and more preferably 10 Torr, during the ejection. In some embodiments, a guard flow is provided around the carrier gas. In some embodiments, the background pressure is at least about 10e-3 Torr, more preferably about 0.1 Torr, more preferably about 1 Torr, more preferably about 10 Torr, more preferably about 100 Torr, and most preferably about 760 Torr. A device is also provided. The device includes a nozzle, which further includes a nozzle tube having a first exhaust aperture and a first gas inlet; and a jacket surrounding the nozzle tube, the jacket having a second exhaust aperture and a second gas inlet. The second exhaust aperture completely surrounds the first tube aperture. A carrier gas source and an organic source vessel may be connected to the first gas inlet. A guard flow gas source may be connected to the second gas inlet. The device may include an array of such nozzles.
摘要翻译：提供了沉积有机材料的方法。携带有机材料的载气以比载气的热速度的至少10％的流速从喷嘴喷出，使得有机材料沉积在基板上。在一些实施例中，在喷射期间喷嘴和围绕载体气体的基底之间的区域中的动态压力为至少1托，更优选为10托。在一些实施例中，围绕载气提供防护流。在一些实施方案中，背景压力为至少约10e-3乇，更优选约0.1乇，更优选约1乇，更优选约10乇，更优选约100乇，最优选约760乇。还提供了一种设备。所述装置包括喷嘴，所述喷嘴还包括具有第一排气孔和第一气体入口的喷嘴管; 以及围绕喷嘴管的护套，护套具有第二排气孔和第二气体入口。第二排气孔完全围绕第一管孔。载气源和有机源容器可以连接到第一气体入口。保护流气源可以连接到第二气体入口。该装置可以包括这种喷嘴的阵列。

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