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1. 发明申请

US20140282298A1 PERFORMING IMAGE CALCULATION BASED ON SPATIAL COHERENCE 有权
标题翻译：基于空间相关性进行图像计算
公开(公告)号：US20140282298A1
公开(公告)日：2014-09-18
申请号：US13832134
申请日：2013-03-15
申请人： SYNOPSYS, INC.
发明人： Yongfa Fan , Thomas Schmoeller
IPC分类号： G06F17/50
CPC分类号： G06F17/5081 , G03F7/70125 , G03F7/70433 , G03F7/705
摘要： Computer-implemented techniques for pixel source optics calculations using spatial coherence are disclosed. Pixelated sources are used for source-mask co-optimization to enhance semiconductor lithography. Calculation of a partially coherent imaging system is used for optical-lithography simulation. The spatial coherence property of neighboring source points is used to reduce imaging calculation complexity. Two or more neighboring points are treated as one pseudo-spatially coherent area element.
摘要翻译：公开了使用空间相干性的用于像素源光学计算的计算机实现的技术。像素化源用于源掩模协同优化以增强半导体光刻。部分相干成像系统的计算用于光学光刻模拟。使用相邻源点的空间相干属性来减少成像计算的复杂度。将两个或多个相邻点视为一个伪空间相干区域元素。

2. 发明授权

US08812145B2 Modeling mask errors using aerial image sensitivity 有权
标题翻译：使用空中图像敏感度建模掩模误差
公开(公告)号：US08812145B2
公开(公告)日：2014-08-19
申请号：US13740753
申请日：2013-01-14
申请人： Synopsys, Inc.
发明人： Yongfa Fan , JenSheng Huang
IPC分类号： G06F19/00 , G06F17/50
CPC分类号： G06F17/50 , B82Y10/00 , B82Y40/00 , G03F1/36 , G03F1/68 , G03F1/70 , G03F7/70441 , G03F7/705 , G03F7/70516 , G03F7/70625
摘要： One embodiment of the present invention provides techniques and systems for modeling mask errors based on aerial image sensitivity. During operation, the system can receive an uncalibrated process model which includes a mask error modeling term which is based at least on an aerial image sensitivity to mask modifications which represent mask errors. Next, the system can fit the uncalibrated process model using measured CD data. Note that the mask error modeling term can also be dependent on the local and/or long-range pattern density. In some embodiments, the mask error modeling term can include an edge bias term and a corner rounding term. The edge bias term can be based on the sensitivity of the aerial image intensity to an edge bias, and the corner rounding term can be based on the sensitivity of the aerial image intensity to a corner rounding adjustment.
摘要翻译：本发明的一个实施例提供了基于空中图像敏感度对掩模误差建模的技术和系统。在操作期间，系统可以接收未校准的过程模型，其包括掩模误差建模术，该掩模误差建模术至少基于对掩蔽修改的空间图像敏感度，其表示掩模误差。接下来，系统可以使用测量的CD数据来适应未校准的过程模型。请注意，掩模误差建模项也可以取决于局部和/或长距离图案密度。在一些实施例中，掩模误差建模项可以包括边缘偏置项和角舍入项。边缘偏置项可以基于空间图像强度对边缘偏置的灵敏度，并且角舍入项可以基于空间图像强度对圆角调整的灵敏度。

3. 发明申请

US20130131857A1 MODELING MASK ERRORS USING AERIAL IMAGE SENSITIVITY 有权
标题翻译：使用空白图像敏感度建模面具错误
公开(公告)号：US20130131857A1
公开(公告)日：2013-05-23
申请号：US13740753
申请日：2013-01-14
申请人： Synopsys, Inc.
发明人： Yongfa Fan , JenSheng Huang
IPC分类号： G06F17/50
CPC分类号： G06F17/50 , B82Y10/00 , B82Y40/00 , G03F1/36 , G03F1/68 , G03F1/70 , G03F7/70441 , G03F7/705 , G03F7/70516 , G03F7/70625
摘要： One embodiment of the present invention provides techniques and systems for modeling mask errors based on aerial image sensitivity. During operation, the system can receive an uncalibrated process model which includes a mask error modeling term which is based at least on an aerial image sensitivity to mask modifications which represent mask errors. Next, the system can fit the uncalibrated process model using measured CD data. Note that the mask error modeling term can also be dependent on the local and/or long-range pattern density. In some embodiments, the mask error modeling term can include an edge bias term and a corner rounding term. The edge bias term can be based on the sensitivity of the aerial image intensity to an edge bias, and the corner rounding term can be based on the sensitivity of the aerial image intensity to a corner rounding adjustment.
摘要翻译：本发明的一个实施例提供了基于空中图像敏感度对掩模误差建模的技术和系统。在操作期间，系统可以接收未校准的过程模型，其包括掩模误差建模术，该掩模误差建模术至少基于对掩蔽修改的空间图像敏感度，其表示掩模误差。接下来，系统可以使用测量的CD数据来适应未校准的过程模型。请注意，掩模误差建模项也可以取决于局部和/或长距离图案密度。在一些实施例中，掩模误差建模项可以包括边缘偏置项和角舍入项。边缘偏置项可以基于空间图像强度对边缘偏置的灵敏度，并且角舍入项可以基于空间图像强度对圆角调整的灵敏度。

4. 发明授权

US08918743B1 Edge-based full chip mask topography modeling 有权
标题翻译：基于边缘的全片掩模地形建模
公开(公告)号：US08918743B1
公开(公告)日：2014-12-23
申请号：US13965111
申请日：2013-08-12
申请人： Synopsys, Inc.
发明人： Qiliang Yan , Hongbo Zhang , Ebo Croffie , Lin Zhang , Yongfa Fan , Peter Brooker , Qian Ren
IPC分类号： G06F17/50
CPC分类号： G03F7/705 , G03F7/70283
摘要： A method and apparatus of a novel full chip edge-based mask three-dimensional (3D) model for performing photolithography simulation is described. The method applies a thin mask model to a mask design layout to create a thin mask transmission. The method generates a thick mask model that has a plurality of edge-based kernels. The method applies the thick mask model to the mask design layout to create a mask 3D residual. The method combines the thin mask transmission and the mask 3D residual to create a mask 3D transmission.
摘要翻译：描述了一种用于执行光刻模拟的新型全芯片边缘基掩模三维（3D）模型的方法和装置。该方法将薄掩模模型应用于掩模设计布局以创建薄掩模传输。该方法产生具有多个基于边缘的内核的厚掩模模型。该方法将厚掩模模型应用于掩模设计布局以创建掩模3D残差。该方法结合了薄掩模传输和掩模3D残差，以创建掩模3D传输。

5. 发明授权

US08875066B2 Performing image calculation based on spatial coherence 有权
标题翻译：基于空间一致性进行图像计算
公开(公告)号：US08875066B2
公开(公告)日：2014-10-28
申请号：US13832134
申请日：2013-03-15
申请人： Synopsys, Inc.
发明人： Yongfa Fan , Thomas Schmoeller
IPC分类号： G06F17/50
CPC分类号： G06F17/5081 , G03F7/70125 , G03F7/70433 , G03F7/705
摘要： Computer-implemented techniques for pixel source optics calculations using spatial coherence are disclosed. Pixelated sources are used for source-mask co-optimization to enhance semiconductor lithography. Calculation of a partially coherent imaging system is used for optical-lithography simulation. The spatial coherence property of neighboring source points is used to reduce imaging calculation complexity. Two or more neighboring points are treated as one pseudo-spatially coherent area element.
摘要翻译：公开了使用空间相干性的用于像素源光学计算的计算机实现的技术。像素化源用于源掩模协同优化以增强半导体光刻。部分相干成像系统的计算用于光学光刻模拟。使用相邻源点的空间相干属性来减少成像计算的复杂度。将两个或多个相邻点视为一个伪空间相干区域元素。

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