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1. 发明授权

US10430631B2 MUT fingerprint ID system 有权
公开(公告)号：US10430631B2
公开(公告)日：2019-10-01
申请号：US14896150
申请日：2014-07-14
申请人： The Regents of the University of California
发明人： Yipeng Lu , David Horsley , Hao-Yen Tang , Bernhard Boser
IPC分类号： G06K9/00 , H01L41/113
摘要： MEMS ultrasound fingerprint ID systems are provided. Aspects of the systems include the capability of detecting both epidermis and dermis fingerprint patterns in three dimensions. Also provided are methods of making and using the systems, as well as devices that include the systems.

2. 发明授权

US09891290B2 Offset suppression in micromachined Lorentz force magnetic sensor by current chopping 有权
公开(公告)号：US09891290B2
公开(公告)日：2018-02-13
申请号：US15171805
申请日：2016-06-02
申请人： THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
发明人： David Horsley , Mo Li
IPC分类号： G01R33/02 , G01R33/00 , G01R33/038
CPC分类号： G01R33/0017 , G01R33/0041 , G01R33/0385
摘要： Offsets (short and long term) are significantly reduced in a Lorentz force magnetometer circuit. A modulated bias current supplied to the magnetometer is chopped by periodically switching its polarity. Magnetometer output is demodulated, then de-chopping performed to restore signal polarity output. Chopping of the bias current signal polarity modulates magnetic field signal to a frequency in which electrostatic force remains constant toward eliminating offset and long-term drift from said micromechanical resonator.

3. 发明申请

US20150035110A1 PYROELECTRIC ALUMINUM NITRIDE MEMS INFRARED SENSOR WITH SELECTIVE WAVELENGTH INFRARED ABSORBER 审中-公开
标题翻译：具有选择性波长红外吸收体的氮化硅微型红外传感器
公开(公告)号：US20150035110A1
公开(公告)日：2015-02-05
申请号：US14448877
申请日：2014-07-31
申请人： THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
发明人： Albert Pisano , David Horsley , Kansho Yamamoto
IPC分类号： G01J5/08 , H01L37/02 , H01L27/146
CPC分类号： G01J5/0853 , B81B3/0045 , B81C1/0015 , G01J5/34 , H01L27/14649 , H01L27/14683 , H01L37/02
摘要： A MEMS sensor for detecting electromagnetic waves in a particular frequency range is provided. In a preferred embodiment, the MEMS sensor comprises a bottom substrate layer; a first electrode layer over the substrate layer; a pyroelectric layer over the first electrode layer; and a second electrode layer over the pyroelectric layer; wherein a top electrode layer is patterned with a periodic structure that has a periodicity less than or equal to target infrared wavelength.
摘要翻译：提供了用于检测特定频率范围内的电磁波的MEMS传感器。在优选实施例中，MEMS传感器包括底部基底层; 衬底层上的第一电极层; 在第一电极层上的热电层; 以及在所述热电层上的第二电极层; 其中，以周期性小于或等于目标红外波长的周期性结构对顶部电极层进行构图。

4. 发明申请

US20130249545A1 PIEZOELECTRICALLY ACTUATED MAGNETIC-FIELD SENSOR 有权
标题翻译：压电式激磁磁场传感器
公开(公告)号：US20130249545A1
公开(公告)日：2013-09-26
申请号：US13838434
申请日：2013-03-15
申请人： THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
发明人： David Horsley , Andre Guedes , Gerardo Jaramillo
IPC分类号： G01R33/09
CPC分类号： G01R33/091 , G01R33/0011
摘要： A magnetic-field sensor that provides an output signal in response to an external magnetic field is described. This magnetic-field sensor includes a pair of cantilevers separated by a horizontal gap, which is displaced vertically over an open cavity by applying a time-varying voltage having a fundamental frequency across piezoelectric layers in the pair of cantilevers. The pair of cantilevers also includes magnetic-flux concentrators that convey the external magnetic field to the horizontal gap between the pair of cantilevers. A stationary magnetoresistive sensor in the horizontal gap transforms the external magnetic field into an output signal. Because the pair of cantilevers is displaced vertically at the fundamental frequency, the output signal includes a modulation signal corresponding to the external magnetic field centered around twice the fundamental frequency. This modulation of the external magnetic field allows 1/f noise to be suppressed, thereby improving the sensitivity of the magnetic-field sensor.
摘要翻译：描述了提供响应于外部磁场的输出信号的磁场传感器。该磁场传感器包括由水平间隙分开的一对悬臂，其通过在一对悬臂中施加跨越压电层的基频的时变电压而在开放空腔上垂直移位。该对悬臂还包括将外部磁场传递到一对悬臂之间的水平间隙的磁通集中器。水平间隙中的固定磁阻传感器将外部磁场转换为输出信号。由于一对悬臂以基频垂直移位，所以输出信号包括对应于以基频为基准的外部磁场的调制信号。外部磁场的这种调制允许抑制1 / f噪声，从而提高磁场传感器的灵敏度。

5. 发明授权

US11238258B2 MUT fingerprint ID system 有权
公开(公告)号：US11238258B2
公开(公告)日：2022-02-01
申请号：US16554053
申请日：2019-08-28
申请人： The Regents Of The University Of California
发明人： Yipeng Lu , David Horsley , Hao-Yen Tang , Bernhard Boser
IPC分类号： G06K9/00
摘要： MEMS ultrasound fingerprint ID systems are provided. Aspects of the systems include the capability of detecting both epidermis and dermis fingerprint patterns in three dimensions. Also provided are methods of making and using the systems, as well as devices that include the systems.

6. 发明申请

US20200167538A1 Mut Fingerprint ID System 审中-公开
公开(公告)号：US20200167538A1
公开(公告)日：2020-05-28
申请号：US16554053
申请日：2019-08-28
申请人： The Regents Of The University Of California
发明人： Yipeng Lu , David Horsley , Hao-Yen Tang , Bernhard Boser
IPC分类号： G06K9/00
摘要： MEMS ultrasound fingerprint ID systems are provided. Aspects of the systems include the capabilty of detecting both epidermis and dermis fingerprint patterns in three dimensions. Also provided are methods of making and using the systems, as well as devices that include the systems.

7. 发明申请

US20170059666A1 OFFSET SUPPRESSION IN MICROMACHINED LORENTZ FORCE MAGNETIC SENSOR BY CURRENT CHOPPING 有权
标题翻译：通过电流切割在微型LORENTZ力磁传感器中的偏移抑制
公开(公告)号：US20170059666A1
公开(公告)日：2017-03-02
申请号：US15171805
申请日：2016-06-02
申请人： THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
发明人： David Horsley , Mo Li
IPC分类号： G01R33/00 , G01R33/038
CPC分类号： G01R33/0017 , G01R33/0041 , G01R33/0385
摘要： Offsets (short and long term) are significantly reduced in a Lorentz force magnetometer circuit. A modulated bias current supplied to the magnetometer is chopped by periodically switching its polarity. Magnetometer output is demodulated, then de-chopping performed to restore signal polarity output. Chopping of the bias current signal polarity modulates magnetic field signal to a frequency in which electrostatic force remains constant toward eliminating offset and long-term drift from said micromechanical resonator.
摘要翻译：在洛伦兹力磁力计电路中，偏移量（短期和长期）显着降低。提供给磁力计的调制偏置电流通过周期性地切换其极性而被切断。磁力计输出被解调，然后执行去斩波以恢复信号极性输出。偏置电流信号极性的斩波将磁场信号调制到静电力保持恒定的频率，以消除所述微机械谐振器的偏移和长期漂移。

8. 发明授权

US09069031B2 Piezoelectrically actuated magnetic-field sensor 有权
标题翻译：压电式磁场传感器
公开(公告)号：US09069031B2
公开(公告)日：2015-06-30
申请号：US13838434
申请日：2013-03-15
申请人： The Regents of the University of California
发明人： Andre Guedes , David Horsley , Gerardo Jaramillo
IPC分类号： G01R33/02 , G01R33/09 , G01R33/00
CPC分类号： G01R33/091 , G01R33/0011
摘要： A magnetic-field sensor that provides an output signal in response to an external magnetic field is described. This magnetic-field sensor includes a pair of cantilevers separated by a horizontal gap, which is displaced vertically over an open cavity by applying a time-varying voltage having a fundamental frequency across piezoelectric layers in the pair of cantilevers. The pair of cantilevers also includes magnetic-flux concentrators that convey the external magnetic field to the horizontal gap between the pair of cantilevers. A stationary magnetoresistive sensor in the horizontal gap transforms the external magnetic field into an output signal. Because the pair of cantilevers is displaced vertically at the fundamental frequency, the output signal includes a modulation signal corresponding to the external magnetic field centered around twice the fundamental frequency. This modulation of the external magnetic field allows 1/f noise to be suppressed, thereby improving the sensitivity of the magnetic-field sensor.
摘要翻译：描述了提供响应于外部磁场的输出信号的磁场传感器。该磁场传感器包括由水平间隙分开的一对悬臂，其通过在一对悬臂中施加跨越压电层的基频的时变电压而在开放空腔上垂直移位。该对悬臂还包括将外部磁场传递到一对悬臂之间的水平间隙的磁通集中器。水平间隙中的固定磁阻传感器将外部磁场转换为输出信号。由于一对悬臂以基频垂直移位，所以输出信号包括对应于以基频为基准的外部磁场的调制信号。外部磁场的这种调制允许抑制1 / f噪声，从而提高磁场传感器的灵敏度。

9. 发明授权

US11462677B2 Variable thickness diaphragm for a wideband robust piezoelectric micromachined ultrasonic transducer (PMUT) 有权
公开(公告)号：US11462677B2
公开(公告)日：2022-10-04
申请号：US16695565
申请日：2019-11-26
申请人： THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
发明人： Bernhard Boser , David Horsley , Richard Przybyla , Ofer Rozen , Stefon Shelton
IPC分类号： H01L41/335 , B06B1/06 , H01L41/09 , G10K9/122 , G10K13/00 , G10K9/12 , H01L41/083 , H01L41/113 , H01L41/187 , H01L41/332
摘要： A diaphragm for a piezoelectric micromachined ultrasonic transducer (PMUT) is presented having resonance frequency and bandwidth characteristics which are decoupled from one another into independent variables. Portions of at least the piezoelectric material layer and backside electrode layer are removed in a selected pattern to form structures, such as ribs, in the diaphragm which retains stiffness while reducing overall mass. The patterned structure can be formed by additive, or subtractive, fabrication processes.

10. 发明授权

US10522737B2 Variable thickness diaphragm for a wideband robust piezoelectric micromachined ultrasonic transducer (PMUT) 有权
公开(公告)号：US10522737B2
公开(公告)日：2019-12-31
申请号：US15135321
申请日：2016-04-21
申请人： THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
发明人： Bernhard Boser , David Horsley , Richard Przybyla , Ofer Rozen , Stefon Shelton
IPC分类号： B06B1/06 , H01L41/09 , H01L41/335 , G10K9/12 , H01L41/083 , H01L41/113 , H01L41/187 , H01L41/332 , G10K9/122 , G10K13/00
摘要： A diaphragm for a piezoelectric micromachined ultrasonic transducer (PMUT) is presented having resonance frequency and bandwidth characteristics which are decoupled from one another into independent variables. Portions of at least the piezoelectric material layer and backside electrode layer are removed in a selected pattern to form structures, such as ribs, in the diaphragm which retains stiffness while reducing overall mass. The patterned structure can be formed by additive, or subtractive, fabrication processes.

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