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1. 发明授权

US09287437B2 Apparatus and method for monitoring the process of fabricating solar cells 有权
标题翻译：用于监测制造太阳能电池的过程的装置和方法
公开(公告)号：US09287437B2
公开(公告)日：2016-03-15
申请号：US14173838
申请日：2014-02-06
申请人： TSMC Solar Ltd.
发明人： Chung-Hsien Wu , Hung-Yu Chang
IPC分类号： H01L21/66 , H01L31/18 , H01L21/02
CPC分类号： H01L31/1836 , H01L21/02557 , H01L21/0262 , Y02E10/50
摘要： A method for monitoring the process of fabricating solar cells generally comprises performing a reaction process in a chamber for a solar cell substructure, wherein the chamber includes a reaction solution that includes at least one chemical component. A concentration value is detected for the chemical component during the reaction process, via a detection assembly that is coupled to the chamber. The method further includes determining whether the detected concentration value is at a predefined threshold concentration level or within a predefined concentration range for the chemical component, via a control assembly that is coupled to the detection assembly. The concentration of the chemical component within the reaction solution is modified, during the reaction process, when the detected concentration value is different from the predefined threshold concentration level or different from the predefined concentration range.
摘要翻译：用于监测制造太阳能电池的方法的方法通常包括在用于太阳能电池子结构的室中进行反应过程，其中所述室包括包含至少一种化学组分的反应溶液。通过耦合到室的检测组件，在反应过程中检测化学成分的浓度值。该方法还包括经由耦合到检测组件的控制组件来确定检测到的浓度值是否处于预定阈值浓度水平或化学成分的预定浓度范围内。在反应过程中，当检测到的浓度值不同于预定阈值浓度水平或不同于预定浓度范围时，反应溶液中化学组分的浓度被改变。

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