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1. 发明申请

US20080204748A1 MEASURING DEVICE FOR WORKPIECE HELD ON CHUCK TABLE 有权
标题翻译：用于工作台的测量装置
公开(公告)号：US20080204748A1
公开(公告)日：2008-08-28
申请号：US12028470
申请日：2008-02-08
申请人： Keiji Nomaru , Taiki Sawabe
发明人： Keiji Nomaru , Taiki Sawabe
IPC分类号： G01J3/12
CPC分类号： G01B11/0608 , B23K26/04 , B23K26/046 , B23K26/0853 , G01B2210/50
摘要： A measuring device for measuring the height of a workpiece held on a chuck table provided in a processing machine. The measuring device includes a white light source for emitting white light, an acousto-optic deflecting unit for separating the white light emitted from the white light source to produce a flux of diffracted light and for swinging the flux of the diffracted light over a predetermined angular range by applying a voltage, a pinhole mask for passing light having a part of the wavelengths of the diffracted light produced by the acousto-optic deflecting unit, and a chromatic aberration lens for focusing the light passed through the pinhole mask and for applying the focused light to the workpiece held on the chuck table.
摘要翻译：一种用于测量保持在设置在加工机器中的卡盘台上的工件的高度的测量装置。测量装置包括用于发射白光的白光源，声光偏转单元，用于分离从白光源发射的白光，以产生衍射光束，并将衍射光的光束摆动在预定角度通过施加电压的范围，用于通过具有由声光偏转单元产生的衍射光的一部分波长的光的针孔掩模和用于聚焦通过针孔掩模的光并用于施加聚焦的色差透镜光照到卡盘上的工件。

2. 发明申请

US20080180697A1 Measuring instrument and laser beam machine for wafer 有权
标题翻译：测量仪器和激光束机用于晶圆
公开(公告)号：US20080180697A1
公开(公告)日：2008-07-31
申请号：US12002038
申请日：2007-12-14
申请人： Taiki Sawabe , Keiji Nomaru
发明人： Taiki Sawabe , Keiji Nomaru
IPC分类号： G01B11/06
CPC分类号： G01B11/0625 , B23K26/048 , B23K26/0861 , B23K2101/40
摘要： A measuring instrument for a wafer for measuring the thickness of a wafer held on a chuck table using a laser beam includes a condenser for condensing and irradiating the laser beam on the wafer held on the chuck table, a light reception unit for receiving reflected light of the laser beam irradiated upon the wafer, a convergence light point changing unit for changing the convergence light point of the laser beam, and a control unit for measuring the thickness of the wafer based on a change signal from the convergence light point changing unit and a light reception signal from the light reception unit. The control unit stores a thickness control map. The control unit controls an angle adjustment actuator, provided for adjusting the installation angle of a pair of mirrors, to change the installation angle and detects two peaks of the light amount based on the reception signal from the light reception unit.
摘要翻译：用于测量使用激光束保持在卡盘台上的晶片的厚度的晶片测量仪器包括用于在保持在卡盘台上的晶片上聚集和照射激光束的聚光器，用于接收反射光的反射光的光接收单元照射在晶片上的激光束，用于改变激光束的会聚光点的会聚光点改变单元和用于根据来自会聚光点改变单元的变化信号测量晶片的厚度的控制单元，以及来自光接收单元的光接收信号。控制单元存储厚度控制图。控制单元控制角度调节致动器，用于调节一对反射镜的安装角度，以改变安装角度，并根据来自光接收单元的接收信号检测光量的两个峰值。

3. 发明授权

US08431861B2 Height position detecting apparatus and height position detecting method 有权
标题翻译：高度位置检测装置和高度位置检测方法
公开(公告)号：US08431861B2
公开(公告)日：2013-04-30
申请号：US12535336
申请日：2009-08-04
申请人： Taiki Sawabe
发明人： Taiki Sawabe
IPC分类号： B23K26/02
CPC分类号： B23K26/03 , B23K2101/40
摘要： A laser beam having an annular spot shape with which a workpiece is irradiated is reflected on an upper surface and a lower surface of the workpiece. The reflected light having the annular spot shape which is reflected on the lower surface of the workpiece is intercepted by a pinhole mask, whereas the reflected light having the annular spot shape which is reflected on the upper surface of the workpiece is permitted to pass through the pinhole mask, and the intensity of light received is detected based on the latter reflected light. Therefore, the height position of the upper surface of a workpiece can be detected even where the workpiece is transmissive to visible rays. In this case, with regard to the reflected light having the annular spot shape which is reflected on the upper surface of the workpiece, the intensity of the light after diffusion by a laser beam diffusing unit is detected by a photodetector having a detecting surface with a predetermined area. This makes it possible to assuredly and accurately detect the upper surface height position of the workpiece, even in the presence of scattering of the annular spot shape.
摘要翻译：具有工件被照射的环形斑点形状的激光束在工件的上表面和下表面上被反射。被工件的下表面反射的具有环状斑点形状的反射光被针孔掩模遮断，而被反射在工件上表面的具有环状斑点形状的反射光被允许通过针孔掩模，并且基于后者的反射光检测接收到的光的强度。因此，即使在工件对可见光进行透射的情况下也能够检测工件的上表面的高度位置。在这种情况下，对于在工件的上表面上反射的具有环形斑点形状的反射光，通过具有检测面的光电检测器检测由激光束扩散单元扩散后的光的强度预定区域。这使得即使在存在环形斑点形状的散射的情况下，也可以准确且准确地检测工件的上表面高度位置。

4. 发明授权

US07978408B2 Polarizing device and laser unit 有权
标题翻译：极化装置和激光单元
公开(公告)号：US07978408B2
公开(公告)日：2011-07-12
申请号：US12616417
申请日：2009-11-11
申请人： Taiki Sawabe , Keiji Nomaru
发明人： Taiki Sawabe , Keiji Nomaru
IPC分类号： G02B5/30 , G02B27/28
CPC分类号： G02B5/3041 , G02B5/001 , H01S3/005
摘要： A polarizing device for converting a circularly polarized light beam into a radial polarized light beam, wherein the circularly polarized light beam is obtained by passing a linearly polarized light beam oscillated from a laser oscillator through a quarter-wave plate. The polarizing device includes an axicon lens having a conical surface and a dielectric film formed on the conical surface of the axicon lens.
摘要翻译：一种用于将圆偏振光束转换成径向偏振光束的偏振装置，其中圆偏振光束通过使从激光振荡器振荡的线偏振光束通过四分之一波片而获得。偏振装置包括具有锥形表面的旋转透镜和形成在轴向透镜的锥形表面上的电介质膜。

5. 发明授权

US07580136B2 Height position detector for work held on chuck table 有权
标题翻译：卡盘台上工作的高度位置检测器
公开(公告)号：US07580136B2
公开(公告)日：2009-08-25
申请号：US12189910
申请日：2008-08-12
申请人： Taiki Sawabe , Keiji Nomaru
发明人： Taiki Sawabe , Keiji Nomaru
IPC分类号： G01B11/24
CPC分类号： G01B11/0608 , B23K26/048 , B23K26/40 , B23K26/53 , B23K2101/40 , B23K2103/50
摘要： A height position detector for detecting the height position of an upper surface of a work held on a chuck table, including: an annular spot forming part by which the spot shape of a laser beam oscillated by a laser beam oscillator is formed into an annular shape; a first beam splitter by which the laser beam with the spot shape formed into the annular shape is guided into a first path; a light condenser by which the laser beam guided into the first path is condensed to irradiate the work therewith; a second beam splitter for splitting the reflected light reflected by the work; a first light receiving element for receiving the reflected light transmitted through the second beam splitter; a second light receiving element for receiving the reflected light reflected by the second beam splitter; a light reception region restricting part for restricting the light reception region for the reflected light received by the second light receiving element; and a controller for determining the height position of the upper surface of the work on the basis of the ratio between the quantity of light received by the first light receiving element and the quantity of light received by the second light receiving element.
摘要翻译：一种高度位置检测器，用于检测夹持在卡盘台上的工件的上表面的高度位置，该环形点形成部分由激光束振荡器振荡的激光束的光点形状形成为环形形状 ; 具有形成为环状的点状激光的第一分束器被引导到第一路径中; 引导到第一路径的激光束被聚光以照射工件的光聚光器; 用于分离由工件反射的反射光的第二分束器; 第一光接收元件，用于接收透射通过第二分束器的反射光; 第二光接收元件，用于接收由第二分束器反射的反射光; 用于限制由第二光接收元件接收的反射光的光接收区域的光接收区域限制部分; 以及控制器，用于根据由第一光接收元件接收的光量与由第二光接收元件接收的光量之比来确定工件的上表面的高度位置。

6. 发明申请

US20080245779A1 LASER PROCESSING MACHINE 有权
标题翻译：激光加工机
公开(公告)号：US20080245779A1
公开(公告)日：2008-10-09
申请号：US12048616
申请日：2008-03-14
申请人： Keiji Nomaru , Hiroshi Morikazu , Taiki Sawabe
发明人： Keiji Nomaru , Hiroshi Morikazu , Taiki Sawabe
IPC分类号： B23K26/06
CPC分类号： B23K26/0736 , B23K26/082 , B23K2101/40
摘要： A laser processing machine that includes a chuck table adapted to hold a workpiece thereon and laser beam irradiation unit for applying a laser beam to the workpiece held on the chuck table. The laser beam irradiation unit includes: a laser beam oscillation section for emitting a pulse laser beam; a defection section for deflecting the pulse laser beam emitted from the laser beam oscillation section; and a concentrator having an ellipsoidal focusing spot forming section for focusing the pulse laser beam deflected by the deflection unit and forming a focusing spot into an ellipse.
摘要翻译：一种激光加工机，其特征在于，包括适于将工件保持在其上的卡盘台和用于将激光束施加到夹持在卡盘台上的工件的激光束照射单元。激光束照射单元包括：激光束振荡部，用于发射脉冲激光束; 偏转部，用于偏转从激光束振荡部发射的脉冲激光束; 以及聚光器，其具有用于聚焦由偏转单元偏转的脉冲激光束并形成聚焦点的椭圆形聚焦点形成部。

7. 发明授权

US08124909B2 Laser processing apparatus 有权
标题翻译：激光加工设备
公开(公告)号：US08124909B2
公开(公告)日：2012-02-28
申请号：US12415196
申请日：2009-03-31
申请人： Taiki Sawabe , Keiji Nomaru
发明人： Taiki Sawabe , Keiji Nomaru
IPC分类号： B23K26/14
CPC分类号： B23K26/046 , B23K26/082 , B23K26/0853 , B23K26/364 , B23K26/40 , B23K2103/50 , H01L21/78
摘要： A laser processing apparatus including a height detecting device for detecting the height of a workpiece held on a chuck table. The height detecting device includes an annular spot forming unit for forming the spot shape of a detecting laser beam into an annular spot shape, a pinhole mask for passing the reflected light reflected on the upper surface of the workpiece held on the chuck table, but blocking the reflected light reflected on the lower surface of the workpiece, and a reflected light analyzing unit for analyzing the reflected light passed through the pinhole mask and transmitting the result of analyzation to a control unit. The laser processing apparatus further includes a focusing unit having an objective lens for focusing a processing laser beam having a circular spot shape and the detecting laser beam having the annular spot shape and a window lens for focusing the detecting laser beam focused by the objective lens without focusing the processing laser beam.
摘要翻译：一种激光加工设备，包括用于检测保持在卡盘台上的工件的高度的高度检测装置。高度检测装置包括环形斑点形成单元，用于将检测激光束的斑点形状形成为环形斑点形状;针孔掩模，用于使被反射在保持在卡盘台上的工件的上表面上反射的反射光通过，但阻塞在工件的下表面上反射的反射光和反射光分析单元，用于分析通过针孔掩模的反射光并将分析结果传送到控制单元。该激光加工装置还包括聚焦单元，该聚焦单元具有用于聚焦具有圆形斑点形状的处理激光束和具有环形斑点形状的检测激光束的物镜和用于聚焦由物镜聚焦的检测激光束的窗口透镜，而没有聚焦处理激光束。

8. 发明申请

US20100133243A1 LASER PROCESSING APPARATUS 有权
标题翻译：激光加工设备
公开(公告)号：US20100133243A1
公开(公告)日：2010-06-03
申请号：US12610718
申请日：2009-11-02
申请人： Keiji Nomaru , Taiki Sawabe
发明人： Keiji Nomaru , Taiki Sawabe
IPC分类号： B23K26/00
CPC分类号： B23K26/032 , B23K26/046 , B23K26/364
摘要： A laser processing apparatus including a detecting unit. The detecting unit includes a white light source for emitting white light, a focusing lens for focusing the white light to the workpiece, a first optical fiber for guiding the white light emitted from the white light source to the focusing lens, a detector for detecting the intensity of reflected light from the workpiece, and a second optical fiber for guiding the reflected light to the detector. Accordingly, the white light to be focused to the workpiece can be easily handled and only a wavelength component focused on the workpiece can be stably propagated.
摘要翻译：一种激光加工装置，包括检测单元。检测单元包括用于发射白光的白光源，用于将白光聚焦到工件的聚焦透镜，用于将从白光源发射的白光引导到聚焦透镜的第一光纤，用于检测白光的检测器来自工件的反射光的强度和用于将反射光引导到检测器的第二光纤。因此，可以容易地处理要聚焦到工件上的白色光，并且只有聚焦在工件上的波长分量能够稳定地传播。

9. 发明申请

US20090064521A1 HEIGHT POSITION DETECTOR FOR WORK HELD ON CHUCK TABLE 有权
标题翻译：高度位置检测器在工作台上工作
公开(公告)号：US20090064521A1
公开(公告)日：2009-03-12
申请号：US12189910
申请日：2008-08-12
申请人： Taiki Sawabe , Keiji Nomaru
发明人： Taiki Sawabe , Keiji Nomaru
IPC分类号： G01D15/00
CPC分类号： G01B11/0608 , B23K26/048 , B23K26/40 , B23K26/53 , B23K2101/40 , B23K2103/50
摘要： A height position detector for detecting the height position of an upper surface of a work held on a chuck table, including: an annular spot forming part by which the spot shape of a laser beam oscillated by a laser beam oscillator is formed into an annular shape; a first beam splitter by which the laser beam with the spot shape formed into the annular shape is guided into a first path; a light condenser by which the laser beam guided into the first path is condensed to irradiate the work therewith; a second beam splitter for splitting the reflected light reflected by the work; a first light receiving element for receiving the reflected light transmitted through the second beam splitter; a second light receiving element for receiving the reflected light reflected by the second beam splitter; a light reception region restricting part for restricting the light reception region for the reflected light received by the second light receiving element; and a controller for determining the height position of the upper surface of the work on the basis of the ratio between the quantity of light received by the first light receiving element and the quantity of light received by the second light receiving element.
摘要翻译：一种高度位置检测器，用于检测夹持在卡盘台上的工件的上表面的高度位置，该环形点形成部分由激光束振荡器振荡的激光束的光点形状形成为环形形状 ; 具有形成为环状的点状激光的第一分束器被引导到第一路径中; 引导到第一路径的激光束被聚光以照射工件的光聚光器; 用于分离由工件反射的反射光的第二分束器; 第一光接收元件，用于接收透射通过第二分束器的反射光; 第二光接收元件，用于接收由第二分束器反射的反射光; 用于限制由第二光接收元件接收的反射光的光接收区域的光接收区域限制部分; 以及控制器，用于根据由第一光接收元件接收的光量与由第二光接收元件接收的光量之比来确定工件的上表面的高度位置。

10. 发明授权

US07499185B2 Measuring device for workpiece held on chuck table 有权
标题翻译：夹持在工作台上的工件测量装置
公开(公告)号：US07499185B2
公开(公告)日：2009-03-03
申请号：US12028470
申请日：2008-02-08
申请人： Keiji Nomaru , Taiki Sawabe
发明人： Keiji Nomaru , Taiki Sawabe
IPC分类号： G01B11/24 , G01B11/14
CPC分类号： G01B11/0608 , B23K26/04 , B23K26/046 , B23K26/0853 , G01B2210/50
摘要： A measuring device for measuring the height of a workpiece held on a chuck table provided in a processing machine. The measuring device includes a white light source for emitting white light, an acousto-optic deflecting unit for separating the white light emitted from the white light source to produce a flux of diffracted light and for swinging the flux of the diffracted light over a predetermined angular range by applying a voltage, a pinhole mask for passing light having a part of the wavelengths of the diffracted light produced by the acousto-optic deflecting unit, and a chromatic aberration lens for focusing the light passed through the pinhole mask and for applying the focused light to the workpiece held on the chuck table.
摘要翻译：一种用于测量保持在设置在加工机器中的卡盘台上的工件的高度的测量装置。测量装置包括用于发射白光的白光源，声光偏转单元，用于分离从白光源发射的白光，以产生衍射光束，并将衍射光的光束摆动在预定角度通过施加电压的范围，用于通过具有由声光偏转单元产生的衍射光的一部分波长的光的针孔掩模和用于聚焦通过针孔掩模的光并用于施加聚焦的色差透镜光照到卡盘上的工件。

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