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    • 4. 发明授权
    • Vacuum processing apparatus and vacuum processing method
    • 真空加工设备和真空加工方法
    • US07194821B2
    • 2007-03-27
    • US11068804
    • 2005-03-02
    • Manabu EdamuraAkitaka MakinoMotohiko YoshigaiTakanori NakatsukaSusumu Tauchi
    • Manabu EdamuraAkitaka MakinoMotohiko YoshigaiTakanori NakatsukaSusumu Tauchi
    • F26B7/00
    • G05D16/2066
    • The downtime of a vacuum processing apparatus due to wet cleaning is reduced. In a vacuum processing apparatus that requires aging for its chamber or process container after vacuum evacuation of the apparatus and before actual processing of a workpiece, when the chamber has been opened to atmosphere for the purpose of wet cleaning or component replacement, the apparatus comprises a high precision absolute pressure gauge for use in processing, a wide range gauge capable of measuring a wide range of pressures, and a controller, wherein the controller uses a pressure trend during vacuum evacuation to determine whether the vacuum evacuation is satisfactory, and starts aging upon determining that the vacuum evacuation is satisfactory even if the actual pressure is not below a prescribed value. The controller determines relationship between an apparent flow rate (leak rate) measured by the absolute pressure gauge when the chamber is vacuum sealed, and a chamber pressure measured by the wide range gauge, and then measures only the pressure to determine whether a baseline leak rate is reached.
    • 减少了由于湿清洗而造成的真空处理装置的停机时间。 在真空处理装置中,在对设备进行真空抽真空之后并且在实际处理工件之前需要对其室或处理容器进行老化的情况下,当室已经被打开到大气中以进行湿式清洁或部件更换时,该装置包括: 用于加工的高精度绝对压力表,可测量宽范围压力的宽范围计量器和控制器,其中控制器在真空抽真空中使用压力趋势,以确定真空抽气是否令人满意,并开始老化 确定即使实际压力不低于规定值,真空排气也令人满意。 控制器确定当室被真空密封时由绝对压力表测量的表观流量(泄漏率)与由宽范围量规测量的室压力之间的关系,然后仅测量压力以确定基线泄漏率 到达了。
    • 5. 发明申请
    • Vacuum processing apparatus and vacuum processing method
    • 真空加工设备和真空加工方法
    • US20060168844A1
    • 2006-08-03
    • US11068804
    • 2005-03-02
    • Manabu EdamuraAkitaka MakinoMotohiko YoshigaiTakanori NakatsukaSusumu Tauchi
    • Manabu EdamuraAkitaka MakinoMotohiko YoshigaiTakanori NakatsukaSusumu Tauchi
    • F26B13/30G05D16/00F26B21/06
    • G05D16/2066
    • The downtime of a vacuum processing apparatus due to wet cleaning is reduced. In a vacuum processing apparatus that requires aging for its chamber or process container after vacuum evacuation of the apparatus and before actual processing of a workpiece, when the chamber has been opened to atmosphere for the purpose of wet cleaning or component replacement, the apparatus comprises a high precision absolute pressure gauge for use in processing, a wide range gauge capable of measuring a wide range of pressures, and a controller, wherein the controller uses a pressure trend during vacuum evacuation to determine whether the vacuum evacuation is satisfactory, and starts aging upon determining that the vacuum evacuation is satisfactory even if the actual pressure is not below a prescribed value. The controller determines relationship between an apparent flow rate (leak rate) measured by the absolute pressure gauge when the chamber is vacuum sealed, and a chamber pressure measured by the wide range gauge, and then measures only the pressure to determine whether a baseline leak rate is reached.
    • 减少了由于湿清洗而造成的真空处理装置的停机时间。 在真空处理装置中,在对设备进行真空抽真空之后并且在实际处理工件之前需要对其室或处理容器进行老化的情况下,当室已经被打开到大气中以进行湿式清洁或部件更换时,该装置包括: 用于加工的高精度绝对压力表,可测量宽范围压力的宽范围计量器和控制器,其中控制器在真空抽真空中使用压力趋势,以确定真空抽气是否令人满意,并开始老化 确定即使实际压力不低于规定值,真空排气也令人满意。 控制器确定当室被真空密封时由绝对压力表测量的表观流量(泄漏率)与由宽范围量规测量的室压力之间的关系,然后仅测量压力以确定基线泄漏率 到达了。