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1. 发明授权

US08036845B2 Method of correcting coordinates, and defect review apparatus 有权
标题翻译：校正坐标的方法和缺陷检查装置
公开(公告)号：US08036845B2
公开(公告)日：2011-10-11
申请号：US12792795
申请日：2010-06-03
申请人： Takehiro Hirai , Kazuo Aoki , Kumi Kaneko
发明人： Takehiro Hirai , Kazuo Aoki , Kumi Kaneko
IPC分类号： G01C17/38 , G21C17/00
CPC分类号： G01R31/2884
摘要： The present invention provides a method of correcting coordinates so as to quickly and properly arrange a sample in a field of view in a review apparatus for moving a sample stage onto the specified coordinates to review the sample. A review apparatus according to the present invention, which is a review apparatus for moving a sample stage onto coordinates previously calculated by a checking apparatus to review the sample, has a function of retaining a plurality of coordinate correction tables to correct a deviation between a coordinate value previously calculated by a checking apparatus and an actual sample position detected by the review apparatus. The review apparatus evaluates correction accuracy of the plurality of coordinate correction tables and applies one of the coordinate correction tables with the maximum evaluation value.
摘要翻译：本发明提供了一种校正坐标的方法，以便在用于将样品台移动到特定坐标上以检查样品的检查装置中的视场中快速且适当地布置样品。根据本发明的检查装置，其是用于将样本台移动到由检查装置预先计算的坐标以检查样本的检查装置，具有保留多个坐标校正表以校正坐标的偏差的功能先前由检查装置计算的值和由检查装置检测到的实际样品位置。评估装置评估多个坐标校正表的校正精度，并且应用具有最大评估值的坐标校正表中的一个。

2. 发明申请

US20070276620A1 METHOD OF CORRECTING COORDINATES, AND DEFECT REVIEW APPARATUS 有权
标题翻译：校正方法和缺陷评估装置
公开(公告)号：US20070276620A1
公开(公告)日：2007-11-29
申请号：US11753966
申请日：2007-05-25
申请人： Takehiro Hirai , Kazuo Aoki , Kumi Kaneko
发明人： Takehiro Hirai , Kazuo Aoki , Kumi Kaneko
IPC分类号： G01R35/00
CPC分类号： G01R31/2884
摘要： The present invention provides a method of correcting coordinates so as to quickly and properly arrange a sample in a field of view in a review apparatus for moving a sample stage onto the specified coordinates to review the sample. A review apparatus according to the present invention, which is a review apparatus for moving a sample stage onto coordinates previously calculated by a checking apparatus to review the sample, has a function of retaining a plurality of coordinate correction tables to correct a deviation between a coordinate value previously calculated by a checking apparatus and an actual sample position detected by the review apparatus. The review apparatus evaluates correction accuracy of the plurality of coordinate correction tables and applies one of the coordinate correction tables with the maximum evaluation value.
摘要翻译：本发明提供了一种校正坐标的方法，以便在用于将样品台移动到特定坐标上以检查样品的检查装置中的视场中快速且适当地布置样品。根据本发明的检查装置，其是用于将样本台移动到由检查装置预先计算的坐标以检查样本的检查装置，具有保留多个坐标校正表以校正坐标的偏差的功能先前由检查装置计算的值和由检查装置检测到的实际样品位置。评估装置评估多个坐标校正表的校正精度，并且应用具有最大评估值的坐标校正表中的一个。

3. 发明申请

US20100241386A1 Method of Correcting Coordinates, and Defect Review Apparatus 有权
标题翻译：校正坐标和缺陷检查仪的方法
公开(公告)号：US20100241386A1
公开(公告)日：2010-09-23
申请号：US12792795
申请日：2010-06-03
申请人： Takehiro HIRAI , Kazuo Aoki , Kumi Kaneko
发明人： Takehiro HIRAI , Kazuo Aoki , Kumi Kaneko
IPC分类号： G06F19/00
CPC分类号： G01R31/2884
摘要： The present invention provides a method of correcting coordinates so as to quickly and properly arrange a sample in a field of view in a review apparatus for moving a sample stage onto the specified coordinates to review the sample. A review apparatus according to the present invention, which is a review apparatus for moving a sample stage onto coordinates previously calculated by a checking apparatus to review the sample, has a function of retaining a plurality of coordinate correction tables to correct a deviation between a coordinate value previously calculated by a checking apparatus and an actual sample position detected by the review apparatus. The review apparatus evaluates correction accuracy of the plurality of coordinate correction tables and applies one of the coordinate correction tables with the maximum evaluation value.
摘要翻译：本发明提供了一种校正坐标的方法，以便在用于将样品台移动到特定坐标上以检查样品的检查装置中的视场中快速且适当地布置样品。根据本发明的检查装置，其是用于将样本台移动到由检查装置预先计算的坐标以检查样本的检查装置，具有保留多个坐标校正表以校正坐标的偏差的功能先前由检查装置计算的值和由检查装置检测到的实际样品位置。评估装置评估多个坐标校正表的校正精度，并且应用具有最大评估值的坐标校正表中的一个。

4. 发明授权

US07752001B2 Method of correcting coordinates, and defect review apparatus 有权
标题翻译：校正坐标的方法和缺陷检查装置
公开(公告)号：US07752001B2
公开(公告)日：2010-07-06
申请号：US11753966
申请日：2007-05-25
申请人： Takehiro Hirai , Kazuo Aoki , Kumi Kaneko
发明人： Takehiro Hirai , Kazuo Aoki , Kumi Kaneko
IPC分类号： G01C17/38 , G21C17/00
CPC分类号： G01R31/2884
摘要： The present invention provides a method of correcting coordinates so as to quickly and properly arrange a sample in a field of view in a review apparatus for moving a sample stage onto the specified coordinates to review the sample. A review apparatus according to the present invention, which is a review apparatus for moving a sample stage onto coordinates previously calculated by a checking apparatus to review the sample, has a function of retaining a plurality of coordinate correction tables to correct a deviation between a coordinate value previously calculated by a checking apparatus and an actual sample position detected by the review apparatus. The review apparatus evaluates correction accuracy of the plurality of coordinate correction tables and applies one of the coordinate correction tables with the maximum evaluation value.
摘要翻译：本发明提供了一种校正坐标的方法，以便在用于将样品台移动到特定坐标上以检查样品的检查装置中的视场中快速且适当地布置样品。根据本发明的检查装置，其是用于将样本台移动到由检查装置预先计算的坐标以检查样本的检查装置，具有保留多个坐标校正表以校正坐标的偏差的功能先前由检查装置计算的值和由检查装置检测到的实际样品位置。评估装置评估多个坐标校正表的校正精度，并且应用具有最大评估值的坐标校正表中的一个。

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