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    • 4. 发明授权
    • Electro-optical device with electrolytic corrosion preventing film and multiple relay electrodes
    • 具有电解防腐膜和多个继电器电极的电光装置
    • US07403237B2
    • 2008-07-22
    • US11029502
    • 2005-01-06
    • Takunori Iki
    • Takunori Iki
    • G02F1/136G02F1/1343
    • G02F1/136227G02F1/136209G02F2001/13629H01L21/76841H01L21/7685
    • There is provided an electro-optical device comprising, above a substrate, a first conductor layer, a second conductor layer, an interlayer insulating film formed between the first conductor layer and the second conductor layer, and a contact hole, provided in the interlayer insulating film, for electrically connecting the first conductor layer and the second conductor layer in a contact portion. The first conductor layer has a multilayered structure in which an electrolytic corrosion preventing film is provided on a conductor film, in a region including at least the contact portion among the entire region thereof, and the electrolytic corrosion preventing film is not provided in other regions thereof. Thus, an electrolytic corrosion can be prevented and a contact resistance can be reduced. Further, heat can be prevented from generating.
    • 提供了一种电光装置,其包括在基板上方的第一导体层,第二导体层,形成在第一导体层和第二导体层之间的层间绝缘膜,以及设置在层间绝缘体中的接触孔 膜,用于在接触部分中电连接第一导体层和第二导体层。 第一导体层具有多层结构,其中在至少包括其整个区域中的接触部分的区域中,在导体膜上设置电解腐蚀防止膜,并且在其它区域中不设置电解腐蚀防止膜 。 因此,可以防止电解腐蚀,并且可以降低接触电阻。 此外,可以防止发热。