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1. 发明申请

US20230040811A1 OBSERVATION METHOD BY MEANS OF SCANNING TRANSMISSION ELECTRON MICROSCOPE, SCANNING TRANSMISSION ELECTRON MICROSCOPE SYSTEM, AND PROGRAM 有权
公开(公告)号：US20230040811A1
公开(公告)日：2023-02-09
申请号：US17775738
申请日：2020-06-11
申请人： The University of Tokyo
发明人： Naoya Shibata , Takehito Seki , Kousuke Ooe , Yuichi Ikuhara
IPC分类号： H01J37/28 , H01J37/244 , H01J37/22 , H01J37/26
摘要： Using a segmented detector having detection regions enables an observation of atoms in a specimen with a high contrast. A scanning transmission electron microscope system 100 scans an electron beam EB over a specimen S, uses a segmented detector 105 having detection regions disposed in a bright-field area to detect electrons transmitted through and scattered from the specimen S for each detection region, generates segmented images based on results of detecting the electrons in the detection regions, and applies filters determined based on a signal-to-noise ratio to the segmented images to generate a reconstructed image. The signal-to-noise ratio is proportional to an absolute value of a total phase contrast transfer function normalized by a noise level, the total phase contrast transfer function being defined by product-sum operation of complex phase contrast transfer functions and weight coefficients for the detection regions. The filters are determined based on the weight coefficients that yield a maximum of the signal-to-noise ratio.

2. 发明授权

US10607907B2 Ceramic-aluminum conjugate, power module substrate, and power module 有权
公开(公告)号：US10607907B2
公开(公告)日：2020-03-31
申请号：US15771595
申请日：2016-08-29
申请人： MITSUBISHI MATERIALS CORPORATION , The University of Tokyo
发明人： Yoshirou Kuromitsu , Kazuhiro Akiyama , Toshiyuki Nagase , Yoshiyuki Nagatomo , Nobuyuki Terasaki , Yuichi Ikuhara , Naoya Shibata , Akihito Kumamoto
IPC分类号： H01L23/15 , H01L23/36 , H01L23/12 , C04B37/02 , B23K1/00 , B23K35/02 , B23K35/28 , H01L23/373
摘要： The present invention provides a ceramic-aluminum bonded body in which Mg-containing oxide having a spinel crystal structure are dispersed in an aluminum member within a range of 2 μm in a thickness direction from a bonded interface with a ceramic member, a segregated portion in which Mg, Si, and O is segregated is formed in the aluminum member in the vicinity of the bonded interface with the ceramic member, mass ratios of Mg, Si, and O between the segregated portion and a position spaced by 10 μm from the bonded interface toward an aluminum member side are within predetermined ranges, and the amount of Mg at the position spaced by 10 μm from the bonded interface toward the aluminum member side is 0.8 mass % or less.

3. 发明申请

US20170025248A1 Electron Microscope and Measurement Method 有权
标题翻译：电子显微镜和测量方法
公开(公告)号：US20170025248A1
公开(公告)日：2017-01-26
申请号：US15151792
申请日：2016-05-11
申请人： The University of Tokyo , JEOL Ltd.
发明人： Naoya Shibata , Yuji Kohno , Hidetaka Sawada
IPC分类号： H01J37/244 , H01J37/22 , H01J37/09 , H01J37/26
CPC分类号： H01J37/244 , H01J37/09 , H01J37/226 , H01J37/26 , H01J37/28 , H01J2237/0453 , H01J2237/24578 , H01J2237/2614 , H01J2237/2802
摘要： An electron microscope is provided which can measure, with high sensitivity and high positional resolution, an amount of deflection of an electron beam occurring when it is transmitted through a sample. The electron microscope (100) is adapted to measure the amount of deflection of the electron beam (EB) when it is transmitted through the sample (S), and has an electron beam source (10) producing the electron beam (EB), an illumination lens system for focusing the electron beam (EB) onto the sample (S), an aperture (30) having an electron beam blocking portion (32) for providing a shield between a central portion (EB1) and an outer peripheral portion (EB2) of the cross section of the beam (EB) impinging on the sample (S), and a segmented detector (20) having a detection surface (22) for detecting the electron beam (EB) transmitted through the sample (S). The detection surface (22) is divided into a plurality of detector segments (D1-D4).
摘要翻译：提供了一种电子显微镜，其能够以高灵敏度和高位置分辨率测量当透射通过样品时发生的电子束的偏转量。电子显微镜（100）适于测量电子束（EB）在透过样品（S）时的偏转量，并具有产生电子束（EB）的电子束源（10），用于将电子束（EB）聚焦到样品（S）上的照明透镜系统，具有用于在中心部分（EB1）和外周部分（EB2）之间提供屏蔽的电子束阻挡部分（32）的孔（30）（EB））和分段检测器（20），其具有用于检测通过样品（S）传输的电子束（EB）的检测表面（22）。检测表面（22）被分成多个检测器段（D1-D4）。

4. 发明申请

US20180323122A1 CERAMIC-ALUMINUM CONJUGATE, POWER MODULE SUBSTRATE, AND POWER MODULE 审中-公开
公开(公告)号：US20180323122A1
公开(公告)日：2018-11-08
申请号：US15771595
申请日：2016-08-29
申请人： MITSUBISHI MATERIALS CORPORATION , The University of Tokyo
发明人： Yoshirou Kuromitsu , Kazuhiro Akiyama , Toshiyuki Nagase , Yoshiyuki Nagatomo , Nobuyuki Terasaki , Yuichi Ikuhara , Naoya Shibata , Akihito Kumamoto
IPC分类号： H01L23/15 , B23K35/02 , B23K35/28 , H01L23/373 , B23K1/00
CPC分类号： H01L23/15 , B23K1/0016 , B23K35/0238 , B23K35/286 , C04B37/02 , H01L23/12 , H01L23/36 , H01L23/3735 , H01L2224/32225
摘要： The present invention provides a ceramic-aluminum bonded body in which Mg-containing oxide having a spinel crystal structure are dispersed in an aluminum member within a range of 2 μm in a thickness direction from a bonded interface with a ceramic member, a segregated portion in which Mg, Si, and O is segregated is formed in the aluminum member in the vicinity of the bonded interface with the ceramic member, mass ratios of Mg, Si, and O between the segregated portion and a position spaced by 10 μm from the bonded interface toward an aluminum member side are within predetermined ranges, and the amount of Mg at the position spaced by 10 μm from the bonded interface toward the aluminum member side is 0.8 mass % or less.

5. 发明授权

US09859095B2 Electron microscope and measurement method 有权
公开(公告)号：US09859095B2
公开(公告)日：2018-01-02
申请号：US15151792
申请日：2016-05-11
申请人： The University of Tokyo , JEOL Ltd.
发明人： Naoya Shibata , Yuji Kohno , Hidetaka Sawada
IPC分类号： H01J37/244 , H01J37/22 , H01J37/09 , H01J37/26 , H01J37/28
CPC分类号： H01J37/244 , H01J37/09 , H01J37/226 , H01J37/26 , H01J37/28 , H01J2237/0453 , H01J2237/24578 , H01J2237/2614 , H01J2237/2802
摘要： An electron microscope is provided which can measure, with high sensitivity and high positional resolution, an amount of deflection of an electron beam occurring when it is transmitted through a sample. The electron microscope (100) is adapted to measure the amount of deflection of the electron beam (EB) when it is transmitted through the sample (S), and has an electron beam source (10) producing the electron beam (EB), an illumination lens system for focusing the electron beam (EB) onto the sample (S), an aperture (30) having an electron beam blocking portion (32) for providing a shield between a central portion (EB1) and an outer peripheral portion (EB2) of the cross section of the beam (EB) impinging on the sample (S), and a segmented detector (20) having a detection surface (22) for detecting the electron beam (EB) transmitted through the sample (S). The detection surface (22) is divided into a plurality of detector segments (D1-D4).

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