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1. 发明授权

US08501022B2 Method using block copolymers for making a master disk with radial nondata marks for nanoimprinting patterned magnetic recording disks 失效
标题翻译：使用嵌段共聚物制造具有用于纳米压印图案化磁记录盘的径向非标记标记的母盘的方法
公开(公告)号：US08501022B2
公开(公告)日：2013-08-06
申请号：US13287761
申请日：2011-11-02
申请人： Thomas R. Albrecht , Elizabeth Ann Dobisz , Guoliang Liu , Ricardo Ruiz , Gabriel Zeltzer
发明人： Thomas R. Albrecht , Elizabeth Ann Dobisz , Guoliang Liu , Ricardo Ruiz , Gabriel Zeltzer
IPC分类号： B44C1/22
CPC分类号： B82Y10/00 , G11B5/746 , G11B5/855 , G11B5/865
摘要： A method for making a master disk for nanoimprinting patterned-media magnetic recording disks has patterns for both the data islands and the nondata regions. The method uses guided self-assembly of a block copolymer (BCP) to form patterns of generally radial lines and/or generally concentric rings as well as patterns of gap regions of one of the BCP components. The pattern of lines and/or rings have the BCP components aligned as lamellae perpendicular to the substrate, while the pattern of gap regions has the BCP components aligned as lamellae parallel to the substrate. One of the BCP components is removed, leaving the other BCP component as an etch mask to fabricate either the final master disk or two separate molds that are then used to fabricate the master disk.
摘要翻译：用于制造用于纳米压印图案化介质磁记录盘的母盘的方法具有用于数据岛和非数据区的图案。该方法使用嵌段共聚物（BCP）的引导自组装形成大体上径向线和/或大致同心环的图案以及一种BCP组分的间隙区域的图案。线和/或环的图案具有垂直于衬底的薄片对准的BCP组分，而间隙区域的图案将BCP组分排列成平行于衬底的薄片。 BCP组件中的一个被去除，另一个BCP组件作为蚀刻掩模来制造最终的主磁盘或两个单独的模具，然后用于制造主磁盘。

2. 发明申请

US20130105437A1 METHOD USING BLOCK COPOLYMERS FOR MAKING A MASTER DISK WITH RADIAL NONDATA MARKS FOR NANOIMPRINTING PATTERNED MAGNETIC RECORDING DISKS 失效
标题翻译：使用块状共聚物制备具有径向非标记标记的主磁盘的方法用于纳刻图形磁记录磁盘
公开(公告)号：US20130105437A1
公开(公告)日：2013-05-02
申请号：US13287761
申请日：2011-11-02
申请人： Thomas R. Albrecht , Elizabeth Ann Dobisz , Guoliang Liu , Ricardo Ruiz , Gabriel Zeltzer
发明人： Thomas R. Albrecht , Elizabeth Ann Dobisz , Guoliang Liu , Ricardo Ruiz , Gabriel Zeltzer
IPC分类号： C23F1/02 , B05D3/10 , B05D3/02 , B05D5/00
CPC分类号： B82Y10/00 , G11B5/746 , G11B5/855 , G11B5/865
摘要： A method for making a master disk for nanoimprinting patterned-media magnetic recording disks has patterns for both the data islands and the nondata regions. The method uses guided self-assembly of a block copolymer (BCP) to form patterns of generally radial lines and/or generally concentric rings as well as patterns of gap regions of one of the BCP components. The pattern of lines and/or rings have the BCP components aligned as lamellae perpendicular to the substrate, while the pattern of gap regions has the BCP components aligned as lamellae parallel to the substrate. One of the BCP components is removed, leaving the other BCP component as an etch mask to fabricate either the final master disk or two separate molds that are then used to fabricate the master disk.
摘要翻译：用于制造用于纳米压印图案化介质磁记录盘的母盘的方法具有用于数据岛和非数据区的图案。该方法使用嵌段共聚物（BCP）的引导自组装形成大体上径向线和/或大致同心环的图案以及一种BCP组分的间隙区域的图案。线和/或环的图案具有垂直于衬底的薄片对准的BCP组分，而间隙区域的图案将BCP组分排列成平行于衬底的薄片。 BCP组件中的一个被去除，另一个BCP组件作为蚀刻掩模来制造最终的主磁盘或两个单独的模具，然后用于制造主磁盘。

3. 发明申请

US20110212347A1 PATTERNED-MEDIA PERPENDICULAR MAGNETIC RECORDING DISK WITH SERVO REGIONS HAVING MAGNETIZED SERVO PILLARS AND OPPOSITELY-MAGNETIZED SERVO TRENCHES 有权
标题翻译：带有伺服区域的磁性记录磁盘记录磁盘，具有磁化的伺服柱和相对磁化的伺服轨道
公开(公告)号：US20110212347A1
公开(公告)日：2011-09-01
申请号：US13103143
申请日：2011-05-09
申请人： Thomas R. Albrecht , Zvonimir Z. Bandic , Olav Hellwig , Gabriel Zeltzer
发明人： Thomas R. Albrecht , Zvonimir Z. Bandic , Olav Hellwig , Gabriel Zeltzer
IPC分类号： G11B5/65 , C23C14/34
CPC分类号： G11B5/82 , B82Y10/00 , C23C14/04 , C23C14/16 , G11B5/59688 , G11B5/743 , G11B5/746 , G11B5/855
摘要： A patterned perpendicular magnetic recording disk has a pre-patterned disk substrate with pillars and trenches arranged in data regions and servo regions. In the data regions, the height of the data pillars is equal to or greater than the spacing between the data pillars, while in the servo regions the height of the servo pillars is less than the spacing between the servo pillars. A magnetic recording material with perpendicular magnetic anisotropy is deposited over the entire disk substrate, which results in magnetic material on the tops of the data pillars and servo pillars and in the servo trenches. The material in the data trenches is either nonmagnetic or discontinuous. After the application of a high DC magnetic field in one perpendicular direction and a low DC magnetic field in the opposite direction, the resulting disk has patterned servo sectors with servo pillars all magnetized in the same perpendicular direction and servo trenches magnetized in the opposite perpendicular direction.
摘要翻译：图案化的垂直磁记录盘具有预先图案化的盘基片，其具有布置在数据区域和伺服区域中的柱状物和沟槽。在数据区域中，数据柱的高度等于或大于数据柱之间的间距，而在伺服区域中，伺服柱的高度小于伺服柱之间的间距。具有垂直磁各向异性的磁记录材料沉积在整个盘基底上，这导致数据柱和伺服柱顶部以及伺服槽中的磁性材料。数据沟槽中的材料是非磁性的或不连续的。在相反方向上在一个垂直方向和低DC磁场上施加高DC磁场之后，所得到的盘具有带有伺服柱的图案化伺服扇区，其中所有伺服柱都在相同的垂直方向上被磁化，并且伺服沟槽在相反的垂直方向上被磁化。

4. 发明申请

US20100061018A1 MAGNETIC RECORDING DISK DRIVE WITH PATTERNED MEDIA AND OPTICAL SYSTEM FOR CLOCKING WRITE DATA 有权
标题翻译：带有图形媒体的磁记录磁盘驱动器和用于定时写入数据的光学系统
公开(公告)号：US20100061018A1
公开(公告)日：2010-03-11
申请号：US12209089
申请日：2008-09-11
申请人： Thomas R. Albrecht , Manfred Ernst Schabes , Barry Cushing Stipe , Gabriel Zeltzer
发明人： Thomas R. Albrecht , Manfred Ernst Schabes , Barry Cushing Stipe , Gabriel Zeltzer
IPC分类号： G11B5/82
CPC分类号： G11B5/314 , B82Y10/00 , G11B5/4866 , G11B5/59616 , G11B5/59677 , G11B5/743 , G11B5/82
摘要： A patterned-media magnetic recording disk drive uses an optical system for accurately clocking the write data. The disk has concentric data tracks patterned into discrete magnetizable data islands with nonmagnetic spaces between the islands. As the disk rotates, a radiation source directs near-field radiation to the islands and spaces, and a radiation detector receives reflected radiation. The radiation is directed from the source through an optical channel or waveguide on the air-bearing slider that supports the read and write heads. The optical channel or waveguide has a near-field transducer at the disk-facing surface of the slider where the near-field radiation exits and reflected radiation returns. The reflected optical power varies depending on whether the near-field transducer couples to an island or a space, so the radiation detector output signal represents the frequency and phase of the islands as the disk rotates. The write clock that controls write pulses to the write head is responsive to the radiation detector output signal, so the frequency and phase of the write clock signal can be matched to the frequency and phase of the islands as the disk rotates.
摘要翻译：图形媒体磁记录磁盘驱动器使用光学系统来准确地计时写入数据。磁盘具有图案化成离散的可磁化数据岛之间的同心数据轨道，岛之间具有非磁性空间。当盘旋转时，辐射源将近场辐射引导到岛和空间，并且辐射检测器接收反射的辐射。辐射从源通过支撑读写头的含气滑块上的光通道或波导引导。光通道或波导在滑块的面向盘的表面处具有近场换能器，其中近场辐射离开并且反射辐射返回。反射的光功率取决于近场换能器耦合到岛还是空间，因此辐射检测器输出信号表示盘旋转时岛的频率和相位。将写入脉冲控制到写入头的写入时钟响应于辐射检测器输出信号，因此当时间盘旋转时，写时钟信号的频率和相位可以与岛的频率和相位匹配。

5. 发明授权

US08119017B2 Method using block copolymers for making a master mold with high bit-aspect-ratio for nanoimprinting patterned magnetic recording disks 有权
标题翻译：使用嵌段共聚物制造用于纳米压印图案化磁记录盘的高位纵横比的母模的方法
公开(公告)号：US08119017B2
公开(公告)日：2012-02-21
申请号：US12141062
申请日：2008-06-17
申请人： Thomas R. Albrecht , Ricardo Ruiz
发明人： Thomas R. Albrecht , Ricardo Ruiz
IPC分类号： B44C1/22 , C03C15/00 , C03C25/68 , H01L21/302 , H01L21/461
CPC分类号： G11B5/855
摘要： The invention is a method for making a master mold to be used for nanoimprinting patterned-media magnetic recording disks. The method uses conventional optical or e-beam lithography to form a pattern of generally radial stripes on a substrate, with the stripes being grouped into annular zones or bands. A block copolymer material is deposited on the pattern, resulting in guided self-assembly of the block copolymer into its components to multiply the generally radial stripes into generally radial lines of alternating block copolymer components. The radial lines of one of the components are removed and the radial lines of the remaining component are used as an etch mask to etch the substrate. Conventional lithography is used to form concentric rings over the generally radial lines. After etching and resist removal, the master mold has pillars arranged in circular rings, with the rings grouped into annular bands.
摘要翻译：本发明是用于制造用于纳米压印图案化介质磁记录盘的母模的方法。该方法使用常规光学或电子束光刻在基底上形成大致径向条纹的图案，其中条纹被分组成环形区域或条带。嵌段共聚物材料沉积在图案上，导致嵌段共聚物引导自组装成其组分，以将大致径向的条带乘以交替的嵌段共聚物组分的大致径向线。除去其中一个部件的径向线，并且将其余部件的径向线用作蚀刻掩模以蚀刻基板。常规光刻用于在大致径向线上形成同心环。在蚀刻和抗蚀剂去除之后，主模具有布置成圆形环的柱，其中环被分组成环形带。

6. 发明授权

US08257598B2 Method using block copolymers for making a master mold with high bit-aspect-ratio for nanoimprinting patterned magnetic recording disks 有权
公开(公告)号：US08257598B2
公开(公告)日：2012-09-04
申请号：US13351385
申请日：2012-01-17
申请人： Thomas R. Albrecht , Ricardo Ruiz
发明人： Thomas R. Albrecht , Ricardo Ruiz
IPC分类号： B44C1/22 , C03C15/00 , C03C25/68 , H01L21/302 , H01L21/461
CPC分类号： G11B5/855
摘要： The invention is a method for making a master mold to be used for nanoimprinting patterned-media magnetic recording disks. The method uses conventional optical or e-beam lithography to form a pattern of generally radial stripes on a substrate, with the stripes being grouped into annular zones or bands. A block copolymer material is deposited on the pattern, resulting in guided self-assembly of the block copolymer into its components to multiply the generally radial stripes into generally radial lines of alternating block copolymer components. The radial lines of one of the components are removed and the radial lines of the remaining component are used as an etch mask to etch the substrate. Conventional lithography is used to form concentric rings over the generally radial lines. After etching and resist removal, the master mold has pillars arranged in circular rings, with the rings grouped into annular bands.

7. 发明申请

US20120111827A1 METHOD USING BLOCK COPOLYMERS FOR MAKING A MASTER MOLD WITH HIGH BIT-ASPECT-RATIO FOR NANOIMPRINTING PATTERNED MAGNETIC RECORDING DISKS 有权
标题翻译：使用块状共聚物制备具有高比特比例的主模的纳米压印图形磁记录盘的方法
公开(公告)号：US20120111827A1
公开(公告)日：2012-05-10
申请号：US13351385
申请日：2012-01-17
申请人： Thomas R. Albrecht , Ricardo Ruiz
发明人： Thomas R. Albrecht , Ricardo Ruiz
IPC分类号： B05D3/10 , B05D5/12
CPC分类号： G11B5/855
摘要： The invention is a method for making a master mold to be used for nanoimprinting patterned-media magnetic recording disks. The method uses conventional optical or e-beam lithography to form a pattern of generally radial stripes on a substrate, with the stripes being grouped into annular zones or bands. A block copolymer material is deposited on the pattern, resulting in guided self-assembly of the block copolymer into its components to multiply the generally radial stripes into generally radial lines of alternating block copolymer components. The radial lines of one of the components are removed and the radial lines of the remaining component are used as an etch mask to etch the substrate. Conventional lithography is used to form concentric rings over the generally radial lines. After etching and resist removal, the master mold has pillars arranged in circular rings, with the rings grouped into annular bands.
摘要翻译：本发明是用于制造用于纳米压印图案化介质磁记录盘的母模的方法。该方法使用常规光学或电子束光刻在基底上形成大致径向条纹的图案，其中条纹被分组成环形区域或条带。嵌段共聚物材料沉积在图案上，导致嵌段共聚物引导自组装成其组分，以将大致径向的条带乘以交替的嵌段共聚物组分的大致径向线。除去其中一个部件的径向线，并且将其余部件的径向线用作蚀刻掩模以蚀刻基板。常规光刻用于在大致径向线上形成同心环。在蚀刻和抗蚀剂去除之后，主模具有布置成圆形环的柱，其中环被分组成环形带。

8. 发明申请

US20110096436A1 PATTERNED MAGNETIC RECORDING DISK WITH PATTERNED SERVO SECTORS AND METHOD USING BLOCK COPOLYMERS FOR MAKING A MASTER MOLD FOR NANOIMPRINTING THE DISK 有权
标题翻译：带有图案伺服器的图形磁记录盘和使用块状共聚物制备用于纳米片的主模的方法
公开(公告)号：US20110096436A1
公开(公告)日：2011-04-28
申请号：US12604333
申请日：2009-10-22
申请人： Thomas R. Albrecht , Jonathan Darrel Coker , Ricardo Ruiz , Bruce Alexander Wilson
发明人： Thomas R. Albrecht , Jonathan Darrel Coker , Ricardo Ruiz , Bruce Alexander Wilson
IPC分类号： G11B5/82 , B05D7/00 , B44C1/22
CPC分类号： G11B5/855
摘要： A patterned-media perpendicular magnetic recording disk has patterned servo regions and is nanoimprinted from a master mold made using directed self-assembly of block copolymers. The disk has patterned concentric circular data tracks of discrete data islands, with the tracks having a track pitch in the radial or cross-track direction. The disk also has patterned servo sectors extending generally radially across the patterned data tracks. The servo pattern is a chevron pattern of slanted or non-radial stripes that have a stripe pitch in the cross-stripe direction substantially equal to the track pitch. As a result of the method of making the master mold, the nanoimprinted disk has a chevron servo pattern with non-radial stripes that are magnetized segments of radial lines separated by nonmagnetic spaces.
摘要翻译：图形介质垂直磁记录盘具有图案化的伺服区域，并且由使用嵌段共聚物的定向自组装制成的母模进行纳米压印。磁盘具有离散数据岛的图案化的同心圆形数据轨道，轨道具有径向或交叉轨道方向的轨道间距。磁盘还具有沿图案化数据磁道大致径向延伸的图案化伺服扇区。伺服图案是斜横条纹或非径向条纹的人字形图案，其在横条方向上具有基本上等于轨道间距的条纹间距。作为制造母模的方法，纳米压印盘具有具有非径向条纹的人字形伺服图案，其是由非磁性空间分开的径向线的磁化段。

9. 发明申请

US20090308837A1 METHOD USING BLOCK COPOLYMERS FOR MAKING A MASTER MOLD WITH HIGH BIT-ASPECT-RATIO FOR NANOIMPRINTING PATTERNED MAGNETIC RECORDING DISKS 有权
标题翻译：使用块状共聚物制备具有高比特比例的主模的纳米压印图形磁记录盘的方法
公开(公告)号：US20090308837A1
公开(公告)日：2009-12-17
申请号：US12141062
申请日：2008-06-17
申请人： Thomas R. Albrecht , Ricardo Ruiz
发明人： Thomas R. Albrecht , Ricardo Ruiz
IPC分类号： B44C1/22
CPC分类号： G11B5/855
摘要： The invention is a method for making a master mold to be used for nanoimprinting patterned-media magnetic recording disks. The method uses conventional optical or e-beam lithography to form a pattern of generally radial stripes on a substrate, with the stripes being grouped into annular zones or bands. A block copolymer material is deposited on the pattern, resulting in guided self-assembly of the block copolymer into its components to multiply the generally radial stripes into generally radial lines of alternating block copolymer components. The radial lines of one of the components are removed and the radial lines of the remaining component are used as an etch mask to etch the substrate. Conventional lithography is used to form concentric rings over the generally radial lines. After etching and resist removal, the master mold has pillars arranged in circular rings, with the rings grouped into annular bands.
摘要翻译：本发明是用于制造用于纳米压印图案化介质磁记录盘的母模的方法。该方法使用常规光学或电子束光刻在基底上形成大致径向条纹的图案，其中条纹被分组成环形区域或条带。嵌段共聚物材料沉积在图案上，导致嵌段共聚物引导自组装成其组分，以将大致径向的条带乘以交替的嵌段共聚物组分的大致径向线。除去其中一个部件的径向线，并且将其余部件的径向线用作蚀刻掩模以蚀刻基板。常规光刻用于在大致径向线上形成同心环。在蚀刻和抗蚀剂去除之后，主模具有布置成圆形环的柱，其中环被分组成环形带。

10. 发明授权

US08059350B2 Patterned magnetic recording disk with patterned servo sectors having chevron servo patterns 有权
标题翻译：带图案的带有人字纹伺服图案的伺服扇区的磁记录盘
公开(公告)号：US08059350B2
公开(公告)日：2011-11-15
申请号：US12604333
申请日：2009-10-22
申请人： Thomas R. Albrecht , Jonathan Darrel Coker , Ricardo Ruiz , Bruce Alexander Wilson
发明人： Thomas R. Albrecht , Jonathan Darrel Coker , Ricardo Ruiz , Bruce Alexander Wilson
IPC分类号： G11B5/09
CPC分类号： G11B5/855
摘要： A patterned-media perpendicular magnetic recording disk has patterned servo regions and is nanoimprinted from a master mold made using directed self-assembly of block copolymers. The disk has patterned concentric circular data tracks of discrete data islands, with the tracks having a track pitch in the radial or cross-track direction. The disk also has patterned servo sectors extending generally radially across the patterned data tracks. The servo pattern is a chevron pattern of slanted or non-radial stripes that have a stripe pitch in the cross-stripe direction substantially equal to the track pitch. As a result of the method of making the master mold, the nanoimprinted disk has a chevron servo pattern with non-radial stripes that are magnetized segments of radial lines separated by nonmagnetic spaces.
摘要翻译：图形介质垂直磁记录盘具有图案化的伺服区域，并且由使用嵌段共聚物的定向自组装制成的母模进行纳米压印。磁盘具有离散数据岛的图案化的同心圆形数据轨道，轨道具有径向或交叉轨道方向的轨道间距。磁盘还具有沿图案化数据磁道大致径向延伸的图案化伺服扇区。伺服图案是斜横条纹或非径向条纹的人字形图案，其在横条方向上具有基本上等于轨道间距的条纹间距。作为制造母模的方法，纳米压印盘具有具有非径向条纹的人字形伺服图案，其是由非磁性空间分开的径向线的磁化段。

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