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    • 1. 发明申请
    • Methods for forming shallow trench isolation structures in deep trenches and uses of the same
    • 在深沟中形成浅沟槽隔离结构的方法及其用途
    • US20080032471A1
    • 2008-02-07
    • US11580807
    • 2006-10-13
    • Wen-Shuo KuoChao-Hsi ChungYung Yao LeeHui-Min Li
    • Wen-Shuo KuoChao-Hsi ChungYung Yao LeeHui-Min Li
    • H01L21/8242
    • H01L21/76224H01L27/1087
    • A method for manufacturing a shallow trench isolation structure in a deep trench and application thereof are provided, wherein the deep trench having an upper electrode and an insulation layer on the upper electrode is formed in a substrate which has a pad insulation layer. The method comprises the following steps: forming a hard mask on the first insulation layer, doping a first portion of the hard mask, removing the undoped portion of the hard mask to expose a portion of the first insulation layer and reserve the first portion of the hard mask, removing the exposed portion of the first insulation layer to expose a portion of the upper electrode, and forming a conductive layer on the exposed portion of the upper electrode wherein a predetermined distance exists between the upper surface of the conductive layer and the pad insulation layer.
    • 提供一种在深沟槽中制造浅沟槽隔离结构的方法及其应用,其中在具有衬垫绝缘层的衬底中形成具有上电极和上电极上的绝缘层的深沟槽。 该方法包括以下步骤:在第一绝缘层上形成硬掩模,掺杂硬掩模的第一部分,去除硬掩模的未掺杂部分以暴露第一绝缘层的一部分并保留第一绝缘层的第一部分 去除所述第一绝缘层的暴露部分以暴露所述上电极的一部分,以及在所述上电极的暴露部分上形成导电层,其中在所述导电层的所述上表面和所述焊盘之间存在预定距离 绝缘层。
    • 2. 发明申请
    • METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
    • 制造半导体器件的方法
    • US20070212839A1
    • 2007-09-13
    • US11308928
    • 2006-05-26
    • Chao-Hsi ChungWen-Shuo Kuo
    • Chao-Hsi ChungWen-Shuo Kuo
    • H01L21/336
    • H01L21/76897H01L21/28525H01L21/7682H01L21/76879
    • A method for fabricating a semiconductor device is described. A gate dielectric layer is formed on a substrate. A plurality of gate structures are formed on the gate dielectric layer. Each of the gate structures is composed of a stacked structure and a spacer. Each stacked structure includes a gate conductive layer and a cap layer. The spacer includes a first dielectric layer and a second dielectric layer. A barrier layer is formed over the substrate covering conformally the gate structures and the gate dielectric layer. A dielectric layer is formed on the barrier layer. A self-aligned contact window etching process is conducted to form a contact window opening. A SEG process is conducted to grow an epitaxial silicon layer to form a contact window and an air gap in the opening.
    • 对半导体装置的制造方法进行说明。 在基板上形成栅极电介质层。 在栅极电介质层上形成多个栅极结构。 每个栅极结构由堆叠结构和间隔物组成。 每个堆叠结构包括栅极导电层和盖层。 间隔件包括第一介电层和第二介电层。 阻挡层形成在覆盖保护栅极结构和栅极电介质层的衬底上。 在阻挡层上形成介电层。 进行自对准的接触窗蚀刻工艺以形成接触窗口。 进行SEG工艺以生长外延硅层以在开口中形成接触窗口和气隙。
    • 3. 发明授权
    • Method for killing and tracing bacteria by coating same with self-assembled gold nanoshell layer and producing photothermal decomposition and cold light by means of laser
    • 通过用自组装金纳米壳层涂覆杀死和追踪细菌的方法,并通过激光产生光热分解和冷光
    • US09381375B2
    • 2016-07-05
    • US14851060
    • 2015-09-11
    • Wen-Shuo Kuo
    • Wen-Shuo Kuo
    • A61L2/04A61N5/06A61N5/067
    • A61N5/062A61B5/0059A61L2/04A61N5/0624A61N2005/067
    • As an extremely simple and efficiency way to kill Gram-positive, -negative, -multidrug resistant bacteria, and in particular methicillin-resistant Staphylococcus aureus, gold nanoparticles were grown self-assembling to yield gold nanoshells on the surface of bacteria (bacteria coated with gold nanoshells or bacterial nanomaterials) by the solution contained gold ion but no adding reductant. The bacteria with gold nanoshells still kept their vitality and mobility for weeks. Due to gold with the high efficiently to convert absorbed radiation into heat for serving as photothermal therapeutic agents, enabled the bacteria coated with gold nanoshells acted as photothermal agents to kill bacteria efficiently. As a result, these bacterial nanomaterials showed impressive photothermolytic efficacy to reduce the viability of bacteria with laser irradiation and an excellent ability to emit photoluminescence after laser irradiation which was generated from the dead bacteria coated with bacterial nanomaterials. The stronger photoluminescence was emitted, the more bacteria were killed. Moreover, the photoluminescence which was able to sustain femtosecond laser exposure, keep luminescence emitted and prevent from photobleaching was still generated after being exposed for hours. It is very eligible to act as optical contrast agents. As a result, these nanomaterials were definitely able to serve as brand-new contrast agents or indicators to determine viability, track and localize bacteria in clinical applications.
    • 作为杀死革兰氏阳性,阴性,多耐药性细菌,特别是耐甲氧西林金黄色葡萄球菌的非常简单而有效的方式,金纳米颗粒生长自组装,在细菌表面产生金纳米壳(细菌涂覆 金纳米壳或细菌纳米材料)通过溶液含有金离子,但不添加还原剂。 具有金纳米壳的细菌仍然保持了活力和流动性几个星期。 由于黄金高效率地将吸收的辐射转化为热量作为光热治疗剂,使得用金纳米壳涂覆的细菌作为光热剂有效杀死细菌。 结果,这些细菌纳米材料表现出令人印象深刻的光热效能,通过激光照射降低细菌的生存能力,并且在从细菌纳米材料涂覆的死细菌产生的激光照射后发出光致发光的优异能力。 发出更强的光致发光,杀死的细菌越多。 此外,在暴露数小时后仍然产生能够维持飞秒激光曝光,保持发光并防止光漂白的光致发光。 它是非常有资格作为光学造影剂。 因此,这些纳米材料绝对能够作为全新的造影剂或指示剂来确定临床应用中的活力,跟踪和定位细菌。
    • 4. 发明申请
    • Method for Killing and Tracing Bacteria by Coating Same with Self-Assembled Gold Nanoshell Layer and Producing Photothermal Decomposition and Cold Light by means of Laser
    • 通过与自组装的金纳米壳层相同的方式杀死和追踪细菌,并通过激光产生光热分解和冷光
    • US20160059033A1
    • 2016-03-03
    • US14851060
    • 2015-09-11
    • Wen-Shuo Kuo
    • Wen-Shuo Kuo
    • A61N5/06A61L2/04
    • A61N5/062A61B5/0059A61L2/04A61N5/0624A61N2005/067
    • As an extremely simple and efficiency way to kill Gram-positive, -negative, -multidrug resistant bacteria, and in particular methicillin-resistant Staphylococcus aureus, gold nanoparticles were grown self-assembling to yield gold nanoshells on the surface of bacteria (bacteria coated with gold nanoshells or bacterial nanomaterials) by the solution contained gold ion but no adding reductant. The bacteria with gold nanoshells still kept their vitality and mobility for weeks. Due to gold with the high efficiently to convert absorbed radiation into heat for serving as photothermal therapeutic agents, enabled the bacteria coated with gold nanoshells acted as photothermal agents to kill bacteria efficiently. As a result, these bacterial nanomaterials showed impressive photothermolytic efficacy to reduce the viability of bacteria with laser irradiation and an excellent ability to emit photoluminescence after laser irradiation which was generated from the dead bacteria coated with bacterial nanomaterials. The stronger photoluminescence was emitted, the more bacteria were killed. Moreover, the photoluminescence which was able to sustain femtosecond laser exposure, keep luminescence emitted and prevent from photobleaching was still generated after being exposed for hours. It is very eligible to act as optical contrast agents. As a result, these nanomaterials were definitely able to serve as brand-new contrast agents or indicators to determine viability, track and localize bacteria in clinical applications.
    • 作为杀死革兰氏阳性,阴性,多耐药性细菌,特别是耐甲氧西林金黄色葡萄球菌的非常简单而有效的方式,金纳米颗粒生长自组装,在细菌表面产生金纳米壳(细菌涂覆 金纳米壳或细菌纳米材料)通过溶液含有金离子,但不添加还原剂。 具有金纳米壳的细菌仍然保持了活力和流动性几个星期。 由于黄金高效率地将吸收的辐射转化为热量作为光热治疗剂,使得用金纳米壳涂覆的细菌作为光热剂有效杀死细菌。 结果,这些细菌纳米材料表现出令人印象深刻的光热效能,通过激光照射降低细菌的生存能力,并且在从细菌纳米材料涂覆的死细菌产生的激光照射后发出光致发光的优异能力。 发出更强的光致发光,杀死的细菌越多。 此外,在暴露数小时后仍然产生能够维持飞秒激光曝光,保持发光并防止光漂白的光致发光。 它是非常有资格作为光学造影剂。 因此,这些纳米材料绝对能够作为全新的造影剂或指示剂来确定临床应用中的活力,跟踪和定位细菌。