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1. 发明授权

US09183854B2 Method to make interferometric taper waveguide for HAMR light delivery 有权
标题翻译：用于HAMR发光的干涉式锥形波导的方法
公开(公告)号：US09183854B2
公开(公告)日：2015-11-10
申请号：US14303876
申请日：2014-06-13
申请人： Western Digital (Fremont), LLC
发明人： Dujiang Wan , Ge Yi , Lijie Zhao , Hai Sun , Yunfei Li
IPC分类号： G11B5/31 , G02B6/122 , G02B6/10 , G02B6/136
CPC分类号： G11B5/314 , G02B6/00 , G02B6/10 , G02B6/122 , G02B6/136 , G11B2005/0021
摘要： A method for making an interferometric taper waveguide (I-TWG) with high critical dimension uniformity and small line edge roughness for a heat assisted magnetic recording (HAMR) head, wherein the method includes creating an I-TWG film stack with two hard mask layers on top of an I-TWG core layer sandwiched between two cladding layers, defining a photoresist pattern over the I-TWG film stack using deep ultraviolet lithography, transferring the pattern to the first hard mask layer using reactive ion etching (RIE), forming a temporary I-TWG pattern on the second hard mask layer using RIE, transferring the temporary pattern to the I-TWG core using RIE, refilling the cladding layer, and planarizing using chemical mechanical planarization (CMP).
摘要翻译：一种用于制造具有高临界尺寸均匀性和用于热辅助磁记录（HAMR）头）的小线边缘粗糙度的干涉式锥形波导（I-TWG）的方法，其中该方法包括产生具有两个硬掩模层的I-TWG膜叠层在夹在两个包覆层之间的I-TWG芯层的顶部，使用深紫外光刻在I-TWG膜堆上限定光致抗蚀剂图案，使用反应离子蚀刻（RIE）将图案转移到第一硬掩模层，形成使用RIE在第二硬掩模层上的临时I-TWG图案，使用RIE将临时图案转移到I-TWG芯，使用化学机械平面化（CMP）进行平面化。

2. 发明授权

US08993217B1 Double exposure technique for high resolution disk imaging 有权
标题翻译：用于高分辨率磁盘成像的双重曝光技术
公开(公告)号：US08993217B1
公开(公告)日：2015-03-31
申请号：US13906293
申请日：2013-05-30
申请人： Western Digital (Fremont), LLC
发明人： Ling Wang , Dujiang Wan , Miao Wang , Hai Sun
IPC分类号： G03F7/26 , G03F7/20
CPC分类号： G03F7/2022
摘要： Innovative techniques are disclosed for fabricating microelectronic devices using an alternating phase shift mask. Some embodiments of the invention encompass a double exposure technique that utilize high resolution line patterning such that two opaque lines intersect at an angle. After development, substantially circular images may be formed. In certain embodiments, high resolution disk imaging as small as 60 nm is possible.
摘要翻译：公开了用于使用交替相移掩模制造微电子器件的创新技术。本发明的一些实施例包括利用高分辨率线图案化使得两个不透明线以一定角度相交的双重曝光技术。显影后，可以形成大致圆形的图像。在某些实施例中，小到60nm的高分辨率磁盘成像是可能的。

3. 发明授权

US09530443B1 Method for fabricating a magnetic recording device having a high aspect ratio structure 有权
标题翻译：具有高纵横比结构的磁记录装置的制造方法
公开(公告)号：US09530443B1
公开(公告)日：2016-12-27
申请号：US14750239
申请日：2015-06-25
申请人： Western Digital (Fremont), LLC
发明人： Li He , Jikou Zhou , Ge Yi , Dujiang Wan , Fujian Wang
IPC分类号： G11B5/147 , G11B5/31 , G11B5/60 , G11B5/127
CPC分类号： G11B5/1278 , G11B5/1475 , G11B5/3116 , G11B5/3163 , G11B2005/0021
摘要： A method provides a magnetic write apparatus on a substrate. A mask is provided on a substrate. The mask has a trench therein. The trench has a top, a bottom and a plurality of sidewalls extending between the top and the bottom of the trench. The top of the trench is wider than the bottom. A protective layer is provided in the trench. The protective layer extends from the top of the trench along a first portion of the plurality of sidewalls such that the bottom of the trench and a second portion of the plurality of sidewalls are free of the protective layer. The structure is provided in a remaining portion of the trench.
摘要翻译：一种方法在基板上提供磁写入装置。在基板上设置掩模。掩模在其中具有沟槽。沟槽具有在沟槽的顶部和底部之间延伸的顶部，底部和多个侧壁。沟槽的顶部比底部宽。在沟槽中设置保护层。保护层沿着多个侧壁的第一部分从沟槽的顶部延伸，使得沟槽的底部和多个侧壁的第二部分没有保护层。该结构设置在沟槽的剩余部分中。

4. 发明授权

US09202493B1 Method of making an ultra-sharp tip mode converter for a HAMR head 有权
标题翻译：制造用于HAMR头的超锋利尖端模式转换器的方法
公开(公告)号：US09202493B1
公开(公告)日：2015-12-01
申请号：US14287467
申请日：2014-05-27
申请人： Western Digital (Fremont), LLC
发明人： Dujiang Wan , Ge Yi , Lijie Zhao , Zhong Shi , Hai Sun
IPC分类号： G11B11/00 , B29D11/00 , G11B5/127 , G11B5/48 , G11B5/00
CPC分类号： G11B5/6088 , G11B5/314 , G11B2005/0021
摘要： A mode converter for use in a Heat-assisted magnetic recording (HAMR) read head to couple or bend light (e.g., from an external laser diode) into a tapered waveguide, and subsequently, to a near field transducer is provided. The mode converter may have an ultra-sharp tip, e.g., less than 200 nm to achieve a desired optical output. Manufacturing such a mode converter involves a two-pattern transform process, where overlay control (using a first edge, such as a right edge, as a reference layer relative to which positioning of a second edge, such as a left edge, is measured) allows for aligning of the right and left edges of a tip portion of the mode converter to ultimately create the ultra-sharp tip.
摘要翻译：提供了一种用于热辅助磁记录（HAMR）读头以将光（例如，从外部激光二极管）耦合或弯曲成锥形波导的模式转换器，并且随后提供给近场换能器。模式转换器可以具有超尖尖，例如小于200nm，以实现期望的光输出。制造这种模式转换器涉及双模式变换过程，其中覆盖控制（使用诸如右边缘的第一边缘作为参考层，相对于第二边缘（例如左边缘的定位）被测量）允许模式转换器的尖端部分的左右边缘对准，以最终产生超尖锐尖端。

5. 发明授权

US08830628B1 Method and system for providing a perpendicular magnetic recording head 有权
标题翻译：用于提供垂直磁记录头的方法和系统
公开(公告)号：US08830628B1
公开(公告)日：2014-09-09
申请号：US13779529
申请日：2013-02-27
申请人： Western Digital (Fremont), LLC
发明人： Hong Zhang , Ge Yi , Lei Wang , Dujiang Wan , Guanghong Luo , Xiaohai Xiang
IPC分类号： G11B5/17
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3163 , Y10T29/4902 , Y10T29/49021 , Y10T29/49032 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method and system for providing a magnetic recording transducer having a pole are disclosed. The pole has side(s), a bottom, and a top wider than the bottom. The method and system include providing at least one side gap layer that covers the side(s) and the top of the pole. At least one sacrificial layer is provided on the side gap layer(s). The sacrificial layer(s) are wet etchable and cover the side gap layer(s). The magnetic recording transducer is planarized after the sacrificial layer(s) are provided. Thus, a portion of the side gap and sacrificial layer(s) is removed. A remaining portion of the sacrificial layer(s) is thus left. The method and system also include wet etching the sacrificial layer(s) to remove the remaining portion of the sacrificial layer(s). A wrap around shield is provided after the remaining portion of the sacrificial layer(s) is removed.
摘要翻译：公开了一种用于提供具有极点的磁记录换能器的方法和系统。电极具有侧面，底部和顶部比底部更宽。该方法和系统包括提供覆盖极的侧面和顶部的至少一个侧面间隙层。在侧间隙层上提供至少一个牺牲层。牺牲层是可湿蚀刻的并且覆盖侧间隙层。在提供牺牲层之后，磁记录传感器被平坦化。因此，侧面间隙和牺牲层的一部分被去除。因此留下牺牲层的剩余部分。该方法和系统还包括湿蚀刻牺牲层以去除牺牲层的剩余部分。在除去牺牲层的剩余部分之后提供环绕护罩。

6. 发明授权

US08792312B1 Method and system for providing an energy assisted magnetic recording head 有权
标题翻译：提供能量辅助磁记录头的方法和系统
公开(公告)号：US08792312B1
公开(公告)日：2014-07-29
申请号：US13888768
申请日：2013-05-07
申请人： Western Digital (Fremont), LLC
发明人： Lei Wang , Dujiang Wan
IPC分类号： G11B11/00
CPC分类号： G11B5/105 , G11B5/102 , G11B2005/0021
摘要： A method and system for providing an energy assisted magnetic recording (EAMR) head are described. The method and system include providing a slider, an EAMR transducer coupled with the slider, and a top layer on the slider. The top layer includes a mirror well therein and has a substantially flat top surface. The method and system further includes providing a laser including a light-emitting surface and providing a mirror optically coupled with the laser. The laser is coupled to the top surface of the top layer external to the mirror well. The mirror has a bottom surface and a reflective surface facing the light-emitting surface of the laser. A portion of the bottom surface of the mirror is affixed to the top surface of the top layer. A portion of the mirror resides in the mirror well.
摘要翻译：描述了一种用于提供能量辅助磁记录（EAMR）头的方法和系统。该方法和系统包括提供滑块，与滑动器耦合的EAMR换能器和滑块上的顶层。顶层在其中包括镜孔，并具有基本平坦的顶表面。该方法和系统还包括提供包括发光表面的激光器并提供与激光器光学耦合的反射镜。激光器耦合到镜子外部的顶层的顶表面。反射镜具有面向激光器的发光表面的底表面和反射表面。镜子底面的一部分固定在顶层的顶面。镜子的一部分位于镜子井中。

7. 发明授权

US09007719B1 Systems and methods for using double mask techniques to achieve very small features 有权
标题翻译：使用双面罩技术实现非常小的特征的系统和方法
公开(公告)号：US09007719B1
公开(公告)日：2015-04-14
申请号：US14230828
申请日：2014-03-31
申请人： Western Digital (Fremont), LLC
发明人： Hongping Yuan , Bing K. Yen , Ling Wang , Xianzhong Zeng , Dujiang Wan , Hai Sun
IPC分类号： G11B5/127 , G11B5/31
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116
摘要： System and methods are provided for the manufacture of a magnetic write head including a pole and yoke region, and a nose shape transition region connecting the yoke to the pole having very small minimum radius of curvature, providing for a sharp transition. A double mask technique is used providing for the adjustment of an offset and illumination conditions between the first and second mask, which provides the capability of tuning the shape of the transition region, and achieving features that would otherwise not be achievable due to distortions caused by optical proximity effect.
摘要翻译：提供了用于制造包括极和轭区域的磁写头的系统和方法，以及将磁轭连接到具有极小的最小曲率半径的鼻形过渡区域，从而提供了尖锐的转变。使用双掩模技术，用于调整第一和第二掩模之间的偏移和照明条件，其提供调整过渡区域的形状的能力，并且实现由于由于第二和第二掩模引起的失真而不能实现的特征光学邻近效应。

8. 发明授权

US08625233B1 System and method for fabricating a magnetic recording pole 有权
标题翻译：用于制造磁记录极的系统和方法
公开(公告)号：US08625233B1
公开(公告)日：2014-01-07
申请号：US13623839
申请日：2012-09-20
申请人： Western Digital (Fremont), LLC
发明人： Lili Ji , Ming Jiang , Jerome S. Marcelino , Shawn M. Tanner , Dujiang Wan , Tiffany Yun Wen Jiang
IPC分类号： G11B5/127
摘要： Systems and methods for fabricating a microelectric device are provided herein. Particular embodiments provide systems and methods for fabricating a magnetic recording pole for a magnetic recording head, such as an energy assisted magnetic recording (EAMR) head commonly used in a disk storage device. Some embodiments provide for systems and methods of fabricating magnetic recording poles that protect the core of the magnetic recording head during the removal of removal of seed layers.
摘要翻译：本文提供了用于制造微电子器件的系统和方法。具体实施例提供了用于制造用于磁记录头的磁记录极的系统和方法，例如在盘存储装置中通常使用的能量辅助磁记录（EAMR）头。一些实施例提供了制造磁记录极的系统和方法，该磁记录极在去除种子层期间保护磁记录头的芯。

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