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    • 1. 发明授权
    • Methods for spatially resolved alignment of independent spectroscopic data from scanning transmission electron microscopes
    • 用于扫描透射电子显微镜的独立光谱数据的空间分辨对准的方法
    • US08624184B1
    • 2014-01-07
    • US13688098
    • 2012-11-28
    • Western Digital Technologies, Inc.
    • Guilherme Parente SouzaKurt Charles Ruthe
    • H01J37/28
    • H01J37/28H01J2237/22
    • Methods for spatially resolved alignment of independent spectroscopic data from scanning transmission electron microscopes (STEMs) are provided. One such method includes performing a first scan of a first area of a first sample using a STEM configured to capture a first signal having a first image profile, performing a second scan of a second area of a second sample using the STEM configured to capture a second signal having a second image profile, selecting a subset region from one of the first and second profiles, correlating the selected subset region from the one of the first and second profiles and the other of the first and second profiles, and selecting, based on the correlating, a portion of the other of the first and second profiles such that the selected subset region and the portion of the other of the first and second profiles are about equal.
    • 提供了用于扫描透射电子显微镜(STEM)的独立光谱数据的空间分辨对准的方法。 一种这样的方法包括使用配置成捕获具有第一图像轮廓的第一信号的STEM来执行第一样本的第一区域的第一扫描,使用被配置为捕获第一图像的STEM来执行第二样本的第二区域的第二扫描 第二信号具有第二图像轮廓,从第一和第二轮廓之一中选择子集区域,将所选择的子集区域与第一和第二轮廓中的一个以及第一和第二轮廓中的另一个轮廓相关联,并且基于 相关联,第一和第二简档中的另一个的一部分使得所选择的子集区域和第一和第二简档中的另一个的部分大致相等。