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    • 6. 发明授权
    • TFT array substrate, method of manufacturing the same, and display device
    • TFT阵列基板及其制造方法以及显示装置
    • US09520320B2
    • 2016-12-13
    • US14302386
    • 2014-06-11
    • Xiamen Tianma Micro-Electronics Co., Ltd.Tianma Micro-Electronics Co., Ltd.
    • Hao Wu
    • H01L21/768H01L27/12
    • H01L21/76805H01L21/76877H01L27/124H01L27/1288
    • A TFT substrate and a method of manufacturing the TFT array substrate are disclosed. The method includes providing a substrate, forming an organic layer on the substrate, forming a first transparent conductive layer on the organic layer, and forming a photolithography layer on the first transparent conductive layer, where the photolithography layer has an opening. The method also includes patterning the first transparent conductive layer to form a first via hole in the first transparent layer using the photolithography layer as a mask, where the first via hole is aligned with the opening in the photolithography layer, and patterning the organic layer to form a second via hole in the organic using the photolithography layer as a mask, where the second via hole is aligned with the opening in the photolithography layer.
    • 公开了TFT基板和制造TFT阵列基板的方法。 该方法包括提供衬底,在衬底上形成有机层,在有机层上形成第一透明导电层,并在第一透明导电层上形成光刻层,其中光刻层具有开口。 该方法还包括使用光刻层作为掩模在第一透明层中形成第一透明导电层以形成第一通孔,其中第一通孔与光刻层中的开口对准,并将有机层图案化为 使用光刻层作为掩模在有机物中形成第二通孔,其中第二通孔与光刻层中的开口对准。