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1. 发明授权

US08561467B2 Angular velocity sensor element, angular velocity sensor and angular velocity sensor unit both using angular velocity sensor element, and signal detecting method for angular velocity sensor unit 有权
标题翻译：使用角速度传感器元件的角速度传感器元件，角速度传感器和角速度传感器单元以及角速度传感器单元的信号检测方法
公开(公告)号：US08561467B2
公开(公告)日：2013-10-22
申请号：US13122445
申请日：2009-10-06
申请人： Yasunobu Kobayashi , Takashi Kawai , Tomohiro Mitani , Youhei Ashimori
发明人： Yasunobu Kobayashi , Takashi Kawai , Tomohiro Mitani , Youhei Ashimori
IPC分类号： G01C19/56
CPC分类号： G01C19/574
摘要： The angular velocity sensor of the present invention has one end connected to holding section and the other end connected to weighting section. According to the angular velocity sensor, driving arm has a dog-leg structure of arms extending in a direction perpendicular to a connecting direction of holding section and weighting section.
摘要翻译：本发明的角速度传感器的一端与保持部连接，另一端与加重部连接。根据角速度传感器，驱动臂具有沿与保持部和加重部的连接方向垂直的方向延伸的臂的狗腿结构。

2. 发明申请

US20110179869A1 ANGULAR VELOCITY SENSOR ELEMENT, ANGULAR VELOCITY SENSOR AND ANGULAR VELOCITY SENSOR UNIT BOTH USING ANGULAR VELOCITY SENSOR ELEMENT, AND SIGNAL DETECTING METHOD FOR ANGULAR VELOCITY SENSOR UNIT 有权
标题翻译：角速度传感器元件，角速度传感器和角速度传感器单元，使用角速度传感器元件，以及用于角速度传感器单元的信号检测方法
公开(公告)号：US20110179869A1
公开(公告)日：2011-07-28
申请号：US13122445
申请日：2009-10-06
申请人： Yasunobu Kobayashi , Takashi Kawai , Tomohiro Mitani , Youhei Ashimori
发明人： Yasunobu Kobayashi , Takashi Kawai , Tomohiro Mitani , Youhei Ashimori
IPC分类号： G01C19/02
CPC分类号： G01C19/574
摘要： The angular velocity sensor of the present invention has one end connected to holding section and the other end connected to weighting section. According to the angular velocity sensor, driving arm has a dog-leg structure of arms extending in a direction perpendicular to a connecting direction of holding section and weighting section.
摘要翻译：本发明的角速度传感器的一端与保持部连接，另一端与加重部连接。根据角速度传感器，驱动臂具有沿与保持部和加重部的连接方向垂直的方向延伸的臂的狗腿结构。

3. 发明申请

US20100043548A1 ANGULAR VELOCITY SENSOR 失效
标题翻译：角速度传感器
公开(公告)号：US20100043548A1
公开(公告)日：2010-02-25
申请号：US12514377
申请日：2007-12-11
申请人： Youhei Ashimori
发明人： Youhei Ashimori
IPC分类号： G01C19/56
CPC分类号： G01C19/5607 , H01L41/1132
摘要： An angular velocity sensor includes a drive electrode section (26) for inputting a drive signal for driving a detecting element (21), a monitor electrode section (28) detecting the drive status of the detecting element (21) and outputting a monitor signal, and a sensing electrode section (27) outputting a sensing signal, which is generated due to an angular velocity given to the detecting element (21). The drive electrode section (26), the monitor electrode section (28), and the sensing electrode section (27) each have a lower electrode formed on a substrate, a piezoelectric film formed of a piezoelectric material on the lower electrode, and an upper electrode formed on the piezoelectric film. The capacitance value between the upper and lower electrodes of the monitor electrode section (28) is set to be equal to the capacitance value between the upper and lower electrodes of the sensing electrode section (27), and the resistance value between both end portions of the monitor electrode section (28) is set to be equal to the resistance value between both end portions of the sensing electrode section (27).
摘要翻译：角速度传感器包括用于输入用于驱动检测元件（21）的驱动信号的驱动电极部（26），检测检测元件（21）的驱动状态并输出监视信号的监视电极部（28）以及感测电极部（27），其输出由于给予所述检测元件（21）的角速度而产生的感测信号。驱动电极部（26），监视电极部（28）和检测电极部（27）各自具有形成在基板上的下电极，在下电极上由压电材料形成的压电膜和上电极形成在压电膜上的电极。将监视电极部（28）的上下电极之间的电容值设定为与感测电极部（27）的上下电极之间的电容值相等，并且将两端部之间的电阻值监视电极部（28）被设定为与感测电极部（27）的两端部之间的电阻值相等。

4. 发明授权

US07997135B2 Angular velocity sensor 失效
标题翻译：角速度传感器
公开(公告)号：US07997135B2
公开(公告)日：2011-08-16
申请号：US12514377
申请日：2007-12-11
申请人： Youhei Ashimori
发明人： Youhei Ashimori
IPC分类号： G01C19/00 , G01P15/08
CPC分类号： G01C19/5607 , H01L41/1132
摘要： An angular velocity sensor includes a drive electrode section (26) for inputting a drive signal for driving a detecting element (21), a monitor electrode section (28) detecting the drive status of the detecting element (21) and outputting a monitor signal, and a sensing electrode section (27) outputting a sensing signal, which is generated due to an angular velocity given to the detecting element (21). The drive electrode section (26), the monitor electrode section (28), and the sensing electrode section (27) each have a lower electrode formed on a substrate, a piezoelectric film formed of a piezoelectric material on the lower electrode, and an upper electrode formed on the piezoelectric film. The capacitance value between the upper and lower electrodes of the monitor electrode section (28) is set to be equal to the capacitance value between the upper and lower electrodes of the sensing electrode section (27), and the resistance value between both end portions of the monitor electrode section (28) is set to be equal to the resistance value between both end portions of the sensing electrode section (27).
摘要翻译：角速度传感器包括用于输入用于驱动检测元件（21）的驱动信号的驱动电极部（26），检测检测元件（21）的驱动状态并输出监视信号的监视电极部（28）以及感测电极部（27），其输出由于给予所述检测元件（21）的角速度而产生的感测信号。驱动电极部（26），监视电极部（28）和检测电极部（27）各自具有形成在基板上的下电极，在下电极上由压电材料形成的压电膜和上电极形成在压电膜上的电极。将监视电极部（28）的上下电极之间的电容值设定为与感测电极部（27）的上下电极之间的电容值相等，并且将两端部之间的电阻值监视电极部（28）被设定为与感测电极部（27）的两端部之间的电阻值相等。

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