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    • 7. 发明授权
    • Method for manufacturing array substrate
    • 阵列基板的制造方法
    • US08551822B2
    • 2013-10-08
    • US12005289
    • 2007-12-27
    • Chun-Hao Tung
    • Chun-Hao Tung
    • H01L21/00
    • H01L27/1288H01L27/1214
    • A method for manufacturing a substrate for a flat panel display device is disclosed. The present method uses photolithography with four masks to manufacture a TFT-LCD. After the third half-tone mask is used, the manufacturing of the TFTs and the defining of the pixel area of the substrate can be completed. The present method can avoid the alignment deviation and the generation of parasitic capacitance happened on the substrate made through the conventional photolithography with five masks. Therefore, the present method can reduce the costs and increase the yield. Moreover, the substrate for the TFT-LCD made by the present method can define a channel region in the semiconductor layer after the second half-tone mask. Hence, the subsequent manufacturing for forming a transparent conductive layer, a source, and a drain can be achieved by wet etching to effectively reduce the non-homogeneous etching for the channel region in the semiconductor layer.
    • 公开了一种用于制造平板显示装置用基板的方法。 本方法使用具有四个掩模的光刻制造TFT-LCD。 在使用第三半色调掩模之后,可以完成TFT的制造和衬底的像素区域的限定。 本方法可以避免通过具有五个掩模的常规光刻制成的衬底上发生的对准偏差和寄生电容的产生。 因此,本方法可以降低成本并提高产量。 此外,通过本方法制造的用于TFT-LCD的衬底可以在第二半色调掩模之后限定半导体层中的沟道区。 因此,用于形成透明导电层,源极和漏极的后续制造可以通过湿式蚀刻来实现,以有效地减少半导体层中的沟道区域的非均匀蚀刻。