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1. 发明授权

US09526160B2 Cavity resonator of microwave plasma generating apparatus 有权
标题翻译：微波等离子体发生装置的腔谐振器
公开(公告)号：US09526160B2
公开(公告)日：2016-12-20
申请号：US14397516
申请日：2013-05-27
申请人： Adtec Plasma Technology Co., Ltd.
发明人： Shuitsu Fujii , Katsumi Oi
IPC分类号： H05H1/46 , H01J37/32 , H01P7/06
CPC分类号： H05H1/46 , H01J37/32192 , H01J37/32229 , H01J37/32238 , H01P7/06 , H05H2001/4622
摘要： A resonator body 1 comprises a square-tube-shaped side wall 2 with upper and lower walls. A cavity 5 is formed in the resonator body. The side wall has a microwave supply opening 6. A wave guide 7 is connected to the microwave supply opening through an inductive window 13. The upper and lower walls have reaction tube attachment openings 3a, 4a. A reaction tube 8 is attached to the reaction tube attachment openings and extends vertically through the cavity and cross an axis of the wave guide. Square tubes 10a-10b made of non-magnetic metal meshes are arranged concentrically to the resonator body and in nested manner in the cavity at a distance from both the interior surface of the side wall and the reaction tube.
摘要翻译：谐振器体1包括具有上壁和下壁的方管状侧壁2。谐振器体中形成腔体5。侧壁具有微波供应开口6.波导7通过感应窗13连接到微波供应开口。上壁和下壁具有反应管连接孔3a，4a。反应管8附接到反应管附接开口并且垂直延伸穿过空腔并与波导的轴线交叉。由非磁性金属网构成的方形管10a-10b同心地布置在谐振器本体上并以嵌套的方式设置在与侧壁和反应管的内表面相距一定距离处的空腔中。

2. 发明授权

US07858899B2 Coaxial microwave plasma torch 有权
标题翻译：同轴微波等离子炬
公开(公告)号：US07858899B2
公开(公告)日：2010-12-28
申请号：US10594746
申请日：2005-03-25
申请人： Shuitsu Fujii , Raju Ramasamy , Takuya Urayama , Kazunari Fujioka
发明人： Shuitsu Fujii , Raju Ramasamy , Takuya Urayama , Kazunari Fujioka
IPC分类号： B23K9/02 , H05B31/26
CPC分类号： H05H1/30 , H05H1/46
摘要： A coaxial microwave plasma torch, comprising, an outside conductor (1) formed in a cylindrical shape, a cylindrical electric discharge tube (3) fixedly inserted into an axial hole (2) formed in the outside conductor on one end face (4) side, and a coaxial cable (6) having one end fitted to the other end face of the outside conductor. An antenna (9) electrically connected to an inside conductor (8) is fitted to the one end of the coaxial cable and extended into the electric discharge tube through a through-hole (11) axially passed through between the other end face (5) of the outside conductor and the bottom face of the axial hole. The outside conductor (7) of the coaxial cable is electrically connected to the outside conductor, and a gas inlet pipeline (13) supplying a gas into the electric discharge tube is fitted in the outside conductor.
摘要翻译：一种同轴微波等离子体焰炬，包括形成为圆筒形状的外部导体（1），在一个端面（4）侧固定地插入形成在外部导体中的轴向孔（2）中的圆柱形放电管（3），以及一端配合到外导体的另一端面的同轴电缆（6）。电连接到内部导体（8）的天线（9）装配到同轴电缆的一端，并通过在另一端面（5）之间轴向穿过的通孔（11）延伸到放电管中，的外部导体和轴向孔的底面。同轴电缆的外部导体（7）电连接到外部导体，并且将外部导体中的气体供应到放电管中的气体导入管道（13）。

3. 发明授权

US07514377B2 Plasma generator, ozone generator, substrate processing apparatus and manufacturing method of semiconductor device 有权
标题翻译：等离子体发生器，臭氧发生器，基板加工装置及半导体装置的制造方法
公开(公告)号：US07514377B2
公开(公告)日：2009-04-07
申请号：US10539569
申请日：2003-12-26
申请人： Noriyoshi Sato , Takeshi Taniguchi , Hiroshi Mase , Shuitsu Fujii , Tamiya Fujiwara
发明人： Noriyoshi Sato , Takeshi Taniguchi , Hiroshi Mase , Shuitsu Fujii , Tamiya Fujiwara
IPC分类号： H01L21/00
CPC分类号： C01B13/11 , C01B13/115 , C01B2201/12 , H05H1/46 , H05H2001/466 , H05H2001/4682
摘要： To provide a generator capable of generating plasma and ozone with high efficiency and easy to handle, with a simple structure. An electrode part 10 is formed of electrodes 11 and 12 without dielectric material interposed therebetween. An arc-extinguishing capacitor 13 as a charge storage part for storing charge is connected in series to the electrode part 10. An AC power source 15 generating plasma by causing self-arc-extinguishing discharge between the electrodes 11 and 12 by applying AC voltage to charge and discharge the arc-extinguishing capacitor 13, is connected to both ends of a circuit in which the electrode part 10 and the arc-extinguishing capacitor 13 are connected in series. The arc-extinguishing capacitor 13 and one electrode 12 of the electrode part 10 connected thereto are unitized, for making the electrode part multi-polarized. A unit is constituted of a floating electrode serving as both of the one electrode 12 of the electrode part 10 and one electrode of the arc-extinguishing capacitor 13, an insulating material provided around the floating electrode and a grounding electrode provided around the insulating material.
摘要翻译：提供能够以简单的结构高效率且易于处理的能够产生等离子体和臭氧的发电机。电极部分10由电极11和12形成，其间没有电介质材料。作为用于存储电荷的电荷存储部分的灭弧电容器13与电极部分10串联连接。一种交流电源15，其通过在电极11和12之间施加交流电压而产生电弧而产生等离子体，将灭弧电容器13的充放电连接到电极部10和灭弧电容器13串联连接的电路的两端。将灭弧电容器13和与其连接的电极部10的一个电极12组合，用于使电极部分多极化。单元由用作电极部分10的一个电极12和灭弧电容器13的一个电极的浮动电极，设置在浮动电极周围的绝缘材料和设置在绝缘材料周围的接地电极构成。

4. 发明申请

US20220293393A1 HIGH FREQUENCY POWER SOURCE ALLOWING ARBITRARY SETTING OF TEMPORAL CHANGE PATTERN FOR HIGH FREQUENCY OUTPUT POWER 有权
公开(公告)号：US20220293393A1
公开(公告)日：2022-09-15
申请号：US17533037
申请日：2021-11-22
申请人： Adtec Plasma Technology Co., Ltd.
发明人： Toshihiro Takahara , Takamichi Kishira , Katsunori Tanaka
IPC分类号： H01J37/32
摘要： Provided is a high frequency power source allowing the user to arbitrarily set a temporal change pattern for the value of high frequency power to be outputted. A high frequency power source 10A according to the present invention includes an output portion 20 configured to output high frequency power to a load 40 via an impedance matching circuit 30, a data storage portion 13A configured to store command data created by a user, and a control portion 12A configured to control the output portion 20 and the impedance matching circuit 30 on the basis of the command data stored in the data storage portion 13A. Each of a plurality of records that constitute the command data includes power command data about a value of high frequency power to be outputted and matching operation command data about whether to activate the impedance matching circuit 30, and the control portion sends a power signal, which is generated on the basis of the power command data, to the output portion and a synchronization signal, which is generated on the basis of the matching operation command data, to the impedance matching circuit.

5. 发明授权

US07795818B2 Microwave plasma generation method and microwave plasma generator 失效
标题翻译：微波等离子体发生方法和微波等离子体发生器
公开(公告)号：US07795818B2
公开(公告)日：2010-09-14
申请号：US11992993
申请日：2006-09-12
申请人： Takuya Urayama , Kazunari Fujioka , Masahiko Uchiyama
发明人： Takuya Urayama , Kazunari Fujioka , Masahiko Uchiyama
IPC分类号： H05B31/26
CPC分类号： H05H1/30
摘要： A microwave plasma generator in which the generating amount of radicals can be regulated easily with higher reaction efficiency while reducing gas consumption. The microwave plasma generator comprises an outer conductor (2), an inner conductor (3) arranged in the internal space (4) of the outer conductor, a discharge tube (7) having a double tube structure consisting of an inner tube (5) and an outer tube (6) and penetrating the outer and inner conductors in the axial direction, and a cavity (1) having a means for adjusting the position of the inner tube to the outer tube in the axial direction in the discharge tube. The microwave plasma generator is further provided with a first gas supply pipe (16), which has a first flow control valve (18) and supplies first gas from a gas cylinder (14) to the outer tube of the discharge tube, a second gas supply pipe (17), which has a second flow control valve (19) and supplies second gas to the inner tube of the discharge tube, a microwave generation source (21), and a microwave supplying passage (22) for supplying microwave from the microwave generation source to the cavity.
摘要翻译：一种微波等离子体发生器，其中能够以更高的反应效率容易地调节自由基的发生量，同时降低气体消耗。微波等离子体发生器包括外导体（2），布置在外导体的内部空间（4）中的内导体（3），具有由内管（5）组成的双管结构的放电管（7）和外管（6），其沿轴向贯通外导体和内导体;以及空腔（1），其具有用于在放电管内沿轴向调节内管与外管的位置的装置。微波等离子体发生器还设置有第一气体供给管（16），其具有第一流量控制阀（18），并且将来自气瓶（14）的第一气体供给到排出管的外管，第二气体供给管（17），其具有第二流量控制阀（19）并将第二气体供给到放电管的内管，微波产生源（21）和微波供给通路（22），用于从微波产生源到腔。

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