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    • 4. 发明申请
    • TRANSMITTER POWER MONITOR
    • 发射机电源监控器
    • US20140152294A1
    • 2014-06-05
    • US14090904
    • 2013-11-26
    • BIRD TECHNOLOGIES GROUP INC.
    • Timothy Lee Holt
    • G01R35/00G01R21/00G01R21/133
    • G01R21/133G01R21/00G01R21/01G01R21/12G01R35/005H04B17/10
    • The invention provides an in-line power monitor for an RF transmission line that is capable of being calibrated in-line during live conditions at the exact power level and frequency where it is used. This device uses forward and reflected directional couplers and a non-directional coupler to sample the RF voltage on the transmission line. The RF voltage of the forward and reflected channels are each split into two paths, one going to a test port and the other leading to additional circuitry which prepares the signals of the forward and reflected channels for output to power displays. Additionally, the monitor allows the user to compensate for any voltage offsets introduced by various circuitry components. Further, the monitor also allows to user to individually calibrate the output of the forward and reflected channels by applying an adjustable gain ratio correction to each channel.
    • 本发明提供了一种用于RF传输线的在线功率监视器,其能够在在其使用的确切功率电平和频率的实时条件下在线校准。 该器件使用正向和反射定向耦合器和非定向耦合器来对传输线上的RF电压进行采样。 前向和反射通道的RF电压分别分为两条路径,一条路径到一条测试端口,另一条通向额外的电路,用于准备正向和反射通道的信号以输出到功率显示器。 此外,监视器允许用户补偿由各种电路组件引入的任何电压偏移。 此外,监视器还允许用户通过对每个通道应用可调增益比校正来单独校准正向和反射通道的输出。
    • 7. 发明授权
    • System and method for analyzing power flow in semiconductor plasma generation systems
    • 用于分析半导体等离子体发生系统中的功率流的系统和方法
    • US07885774B2
    • 2011-02-08
    • US11921688
    • 2006-05-10
    • John D. Swank
    • John D. Swank
    • G01R33/422
    • G01R21/133
    • A system and method for measuring and analyzing power flow parameters in RF-based excitation systems for semi-conductor plasma generators. A measuring probe (8) is connected to an RF transmission line for receiving and measuring voltage (10) and current signals (12) from the transmission line (4). A high-speed sampling process converts the measured RF voltage and current signals into digital signals. The digital signals are then processed so as to reveal fundamental and harmonic amplitude and phase information corresponding to the original RF signals. Multiple measuring probes may be inserted in the power transmission path to measure two-port parameters, and the networked probes may be interrogated to determine input impedance, output impedance, insertion loss, internal dissipation, power flow efficiency, scattering, and the effect of plasma non-linearity on the RF signal.
    • 一种用于测量和分析半导体等离子体发生器的基于RF的激励系统中的功率流参数的系统和方法。 测量探头(8)连接到RF传输线,用于从传输线(4)接收和测量电压(10)和电流信号(12)。 高速采样过程将测量的RF电压和电流信号转换为数字信号。 然后对数字信号进行处理,以便显示对应于原始RF信号的基波和谐波幅度和相位信息。 多个测量探针可以插入电力传输路径中以测量两端口参数,并且可以询问联网探头以确定输入阻抗,输出阻抗,插入损耗,内部耗散,功率流动效率,散射以及等离子体的影响 射频信号的非线性。
    • 8. 发明申请
    • System and method for analyzing power flow in semiconductor plasma generation systems
    • 用于分析半导体等离子体发生系统中的功率流的系统和方法
    • US20090210181A1
    • 2009-08-20
    • US11921688
    • 2006-05-10
    • John D. Swank
    • John D. Swank
    • G06F19/00G01R13/00
    • G01R21/133
    • A system and method for measuring and analyzing power flow parameters in RF-based excitation systems for semi-conductor plasma generators. A measuring probe (8) is connected to an RF transmission line for receiving and measuring voltage (10) and current signals (12) from the transmission line (4). A high-speed sampling process converts the measured RF voltage and current signals into digital signals. The digital signals are then processed so as to reveal fundamental and harmonic amplitude and phase information corresponding to the original RF signals. Multiple measuring probes may be inserted in the power transmission path to measure two-port parameters, and the networked probes may be interrogated to determine input impedance, output impedance, insertion loss, internal dissipation, power flow efficiency, scattering, and the effect of plasma non-linearity on the RF signal.
    • 一种用于测量和分析半导体等离子体发生器的基于RF的激励系统中的功率流参数的系统和方法。 测量探头(8)连接到RF传输线,用于从传输线(4)接收和测量电压(10)和电流信号(12)。 高速采样过程将测量的RF电压和电流信号转换成数字信号。 然后对数字信号进行处理,以便显示对应于原始RF信号的基波和谐波幅度和相位信息。 多个测量探针可以插入电力传输路径中以测量两端口参数,并且可以询问联网探头以确定输入阻抗,输出阻抗,插入损耗,内部耗散,功率流动效率,散射以及等离子体的影响 射频信号的非线性。