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1. 发明授权

US11574830B2 Substrate transport apparatus 有权
公开(公告)号：US11574830B2
公开(公告)日：2023-02-07
申请号：US16354954
申请日：2019-03-15
申请人： Brooks Automation, Inc.
发明人： Christopher A. Bussiere , Blake R Tashjian
IPC分类号： B25J9/16 , H01L21/677 , B25J9/04 , B25J9/10 , H01L21/67
摘要： A substrate transport apparatus including, a torsional motion driver member having an exterior perimeter circumscribing an axis of rotation of the torsional motion driver member, and a torsional motion follower member including a body portion and a bearing collar rotatably coupled to the body portion, the torsional motion follower member being coupled to the torsional motion driver member with a dimensionally substantially invariant interface, wherein the bearing collar is decoupled from the exterior perimeter of the torsional motion driver member so that the exterior perimeter, as a whole, is free of the bearing collar.

2. 发明授权

US11535460B2 Substrate processing apparatus 有权
公开(公告)号：US11535460B2
公开(公告)日：2022-12-27
申请号：US16426983
申请日：2019-05-30
申请人： Brooks Automation, Inc.
发明人： Christopher A. Bussiere , Robert T. Caveney
IPC分类号： B65G47/90 , B25J9/04 , H01L21/677 , H01L21/687
摘要： A substrate processing apparatus includes a frame and a transport apparatus connected to the frame. The transport apparatus has an upper arm link, a forearm link rotatably coupled to the upper arm link about an elbow axis, at least a third arm link rotatably coupled to the forearm about a wrist axis, and an end effector rotatably coupled to the third arm link about a knuckle axis. A two degree of freedom drive system is operably connected to at least one of the upper arm link, the forearm link, and the third arm link for effecting extension and retraction of the end effector wherein a height of the end effector is within the stack height profile of the wrist axis so that a total stack height of the end effector and wrist axis is sized to conform within a pass through of a slot valve.

3. 发明申请

US20220270903A1 SUBSTRATE TRANSPORT APPARATUS 有权
公开(公告)号：US20220270903A1
公开(公告)日：2022-08-25
申请号：US17654852
申请日：2022-03-15
申请人： Brooks Automation, Inc.
发明人： Robert T. CAVENEY
IPC分类号： H01L21/677
摘要： A transport apparatus including a drive section connected to a frame and including a multi-drive shaft spindle, with at least one coaxial shaft spindle, more than one different interchangeable motor module arranged in a stack, each having a motor operably coupled thereto and defining a corresponding independent drive axis, and a can seal disposed between the stator and rotor of each motor module and hermetically sealing the stator and rotor from each other, at least one of the motor modules is selectable for placement in the stack from other different interchangeable motor modules, each having a different predetermined characteristic, independent of placement in the stack, that defines a different predetermined drive characteristic of the corresponding drive axis, independent of shaft spindle location, so that selection of the at least one motor module determines the different predetermined drive characteristic of the corresponding axis different from another of the independent drive axis.

4. 发明申请

US20220189816A1 SUBSTRATE PROCESSING APPARATUS 有权
公开(公告)号：US20220189816A1
公开(公告)日：2022-06-16
申请号：US17653978
申请日：2022-03-08
申请人： BROOKS AUTOMATION, INC.
发明人： Vincent W. TSANG , Charles W. SU
IPC分类号： H01L21/687 , H01L21/677 , B25J9/10 , B25J9/04 , B25J9/16 , H01L21/67
摘要： A substrate processing apparatus including a frame, a first SCARA arm having an end effector and being configured to extend and retract along a first axis, a second SCARA arm having an end effector and being configured to extend and retract along a second axis, a drive section including a splitting drive pulley rotatably mounted to rotate at an axis of rotation of the drive section that is shared by the first and second SCARA arms, the splitting drive pulley being coupled to at least two idler pulleys by respective segmented transmission loops of separate band segments so that the splitting drive pulley is a common pulley splitting one degree of freedom of the drive section between the at least two idler pulleys so as to commonly drive the at least two idler pulleys, wherein at least one band of each respective transmission loop share a common band interface level.

5. 发明申请

US20220172973A1 METHOD AND APPARATUS FOR SUBSTRATE TRANSPORT APPARATUS POSITION COMPENSATION 有权
公开(公告)号：US20220172973A1
公开(公告)日：2022-06-02
申请号：US17651183
申请日：2022-02-15
申请人： Brooks Automation, Inc.
发明人： Jairo T. MOURA , Robert T. CAVENEY , Bing ` YIN , Nathan SPIKER , Vincent W. TSANG
IPC分类号： H01L21/677 , H01L21/68 , B25J9/00 , B25J11/00 , B25J9/10 , H01L21/67 , B25J9/12 , B25J9/16 , G05B19/418
摘要： A substrate transport empiric arm droop mapping apparatus for a substrate transport system of a processing tool, the mapping apparatus including a frame, an interface disposed on the frame forming datum features representative of a substrate transport space in the processing tool defined by the substrate transport system, a substrate transport arm, that is articulated and has a substrate holder, mounted to the frame in a predetermined relation to at least one of the datum features, and a registration system disposed with respect to the substrate transport arm and at least one datum feature so that the registration system registers, in an arm droop distance register, empiric arm droop distance, due to arm droop changes, between a first arm position and a second arm position different than the first arm position and in which the substrate holder is moved in the transport space along at least one axis of motion.

6. 发明授权

US11295975B2 Method and apparatus for substrate alignment 有权
公开(公告)号：US11295975B2
公开(公告)日：2022-04-05
申请号：US16570453
申请日：2019-09-13
申请人： BROOKS AUTOMATION, INC.
发明人： Caspar Hansen
IPC分类号： H01L21/68 , B25J9/16 , H01L21/687
摘要： A semiconductor wafer transport apparatus having a transport arm and at least one end effector. An optical edge detection sensor is coupled to the transport arm and is configured so as to register and effect edge detection of a wafer supported by the end effector. An illumination source illuminates a surface of the wafer and is disposed with respect to the optical edge detection sensor so that the surface directs reflected surface illumination, from the illumination source, toward the optical edge detection sensor, and optically blanks, at the peripheral edge of the wafer, background reflection light of a background, viewed by the optical edge detection sensor coincident with linear traverse of the wafer supported by the at least one end effector. The peripheral edge of the wafer is defined in relief in image contrast to effect edge detection coincident with traverse of the wafer supported by the end effector.

7. 发明申请

US20220099541A1 Automated Vault Module 有权
公开(公告)号：US20220099541A1
公开(公告)日：2022-03-31
申请号：US17643123
申请日：2021-12-07
申请人： Brooks Automation, Inc.
发明人： Etienne Croquette , Matteo F. Salvetti , Rhett Affleck
IPC分类号： G01N1/42 , G01N35/00 , G01N35/02 , G01N35/04 , A01N1/02 , F02D3/00 , B01L7/00 , F25D3/10 , F25D11/02 , F25D25/04
摘要： Cryogenic storage system provides automated storage and retrieval of samples in a cryogenic environment, as well as automated transfer of individual samples between cryogenic environments. Stored samples are maintained under a cryogenic temperature threshold, while also enabling access to the samples. The samples may be organized and tracked by scanning a barcode of each sample. Embodiments may also comprise multiple storage vaults and provide for transfer of individual samples between the storage vaults, as well as between a storage vault and a removable cryogenic storage device.

8. 发明授权

US11270904B2 Substrate processing apparatus 有权
公开(公告)号：US11270904B2
公开(公告)日：2022-03-08
申请号：US15634871
申请日：2017-06-27
申请人： BROOKS AUTOMATION, INC.
发明人： Vincent W. Tsang , Charles W. Su
IPC分类号： H01L21/67 , H01L21/687 , H01L21/677 , B25J9/10 , B25J9/04 , B25J9/16
摘要： A substrate processing apparatus including a frame, a first SCARA arm having an end effector and being configured to extend and retract along a first axis, a second SCARA arm having an end effector and being configured to extend and retract along a second axis, a drive section including a splitting drive pulley rotatably mounted to rotate at an axis of rotation of the drive section that is shared by the first and second SCARA arms, the splitting drive pulley being coupled to at least two idler pulleys by respective segmented transmission loops of separate band segments so that the splitting drive pulley is a common pulley splitting one degree of freedom of the drive section between the at least two idler pulleys so as to commonly drive the at least two idler pulleys, wherein at least one band of each respective transmission loop share a common band interface level.

9. 发明授权

US11235935B2 Substrate transport apparatus 有权
公开(公告)号：US11235935B2
公开(公告)日：2022-02-01
申请号：US17156007
申请日：2021-01-22
申请人： Brooks Automation, Inc.
发明人： Daniel Babbs , Vincent W. Tsang , Robert C. May
IPC分类号： H01L21/687 , B65G47/90 , H01L21/67
摘要： A substrate transport apparatus comprising a frame, a drive section connected to the frame, and an articulated arm having at least one articulated arm link operably connected to the drive section so that the articulated arm rotates about a pivot axis relative to the frame and extends and retracts relative to the pivot axis. The articulated arm has an end effector pivotally mounted to at least one articulated arm link forming a joint between the end effector and the articulated arm link, with an arm joint pivot axis disposed so that the end effector rotates relative to at least one articulated arm link about the arm joint pivot axis. The articulated arm has a drive band transmission with drive and driven pulleys where the driven pulley is connected to the articulated wrist.

10. 发明授权

US11179898B2 Tube sealer 有权
公开(公告)号：US11179898B2
公开(公告)日：2021-11-23
申请号：US17133236
申请日：2020-12-23
申请人： Brooks Automation, Inc.
发明人： Beat Reuteler
IPC分类号： B32B41/00 , B29C65/74 , B29C65/18 , B29C65/78 , B29C65/00 , B65B7/16 , B29C69/00 , B65B51/14 , B29L31/00
摘要： A device for sealing sample tubes comprises a tool assembly configured to interface with a rack holding a plurality of sample storage tubes, the tool assembly holding a plurality of punches and a die plate including a plurality of cutting holes, with each of the plurality of cutting holes accepting one of the plurality of punches. The tool assembly receives a foil sheet between the punches and the die plate. The device includes an actuator enabling linear movement of the tool assembly. Linear movement of the tool assembly towards the rack engages the die plate against the rack and punches the punches through the cutting holes of the die plate to punch a plurality of sealing sections from the foil sheet and to press and seal each of the sealing sections against a top end of each of the plurality of sample storage tubes in the rack.

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