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1. 发明授权

US11201075B2 Holding apparatus for electrostatically holding a component, including a base body joined by diffusion bonding, and process for its manufacture 有权
公开(公告)号：US11201075B2
公开(公告)日：2021-12-14
申请号：US16750517
申请日：2020-01-23
申请人： Berliner Glas KGaA Herbert Kubatz GmbH & Co.
发明人： Stefan Hoescheler , David Kieven , Marcel Ziemann , Carsten Pampuch
IPC分类号： H01T23/00 , H01L21/683
摘要： A holding apparatus, which is adapted for electrostatically holding a component, in particular a wafer, comprises an electrically insulating base body, which comprises a first pair of base body plates, which are connected to one another in a planar manner via a joint connection, and an electrode device with at least one electrode layer, which is arranged to generate an electrostatic holding force and extends parallel to the extension of the base body plates along the joining connection, wherein the joining connection comprises a diffusion bond connection, wherein the at least one electrode layer is connected in a planar manner to the respectively adjacent base body plate, and the at least one electrode layer has a contact section, which is arranged for electrically contacting the at least one electrode layer. Methods for manufacturing the holding apparatus are also described.

2. 发明授权

US09442006B2 Method and apparatus for measuring the shape of a wave-front of an optical radiation field 有权
标题翻译：用于测量光辐射场的波前形状的方法和装置
公开(公告)号：US09442006B2
公开(公告)日：2016-09-13
申请号：US14751259
申请日：2015-06-26
申请人： Berliner Glas KGaA Herbert Kubatz GmbH & Co.
发明人： Thomas Oberdoerster
IPC分类号： G01J1/00 , G01J1/42 , G01J1/04
CPC分类号： G01J1/4257 , G01J1/0477 , G01J9/00 , G01J2009/002
摘要： Method for measuring shape of wavefront of optical radiation field generated by radiation source, includes: (a) setting diaphragm positions in pinhole diaphragm having diaphragm opening movable transversely to radiation source's optical axis, wherein a partial beam from radiation field passes through diaphragm opening at each diaphragm position and is imaged on optical sensor by imaging optics device; (b) recording lateral positions of partial beam relative to optical axis of imaging optics device, wherein lateral positions each with one of the diaphragm positions of pinhole diaphragm are recorded by optical sensor, and determining the shape of wavefront from recorded lateral positions of partial beam, wherein beam incidence range of the partial beam which is invariable for all diaphragm positions is set on imaging optics device with a pentaprism arrangement including at least first pentaprism and positioned between pinhole diaphragm and imaging optics device. A wavefront shape measuring device is also described.
摘要翻译：用于测量由辐射源产生的光辐射场的波前形状的方法，包括：（a）在具有可横向于辐射源的光轴可移动的光阑开口的针孔光阑中设置光阑位置，其中来自辐射场的部分光束通过每个通过成像光学装置在光学传感器上成像; （b）记录部分光束相对于成像光学装置的光轴的横向位置，其中每个具有针孔光阑的一个光阑位置的横向位置由光学传感器记录，并且从部分光束的记录横向位置确定波前的形状其中对于所有光阑位置不变的部分光束的光束入射范围被设置在具有至少第一五棱镜并且定位在针孔光阑和成像光学器件之间的五棱镜布置的成像光学器件上。还描述了一种波前形状测量装置。

3. 发明授权

US09275777B2 Method for processing an embedded metal film 有权
标题翻译：处理嵌入金属膜的方法
公开(公告)号：US09275777B2
公开(公告)日：2016-03-01
申请号：US13422471
申请日：2012-03-16
申请人： Jan Ingwersen
发明人： Jan Ingwersen
IPC分类号： H05K3/02 , H05K3/10 , H01C3/12 , H01C17/065 , H01C17/26
CPC分类号： H01C3/12 , B23K26/0006 , B23K26/53 , B23K2101/38 , B23K2103/10 , B23K2103/14 , B23K2103/18 , B23K2103/26 , B23K2103/52 , B23K2103/54 , B81C1/00507 , H01C17/06533 , H01C17/265 , H01L21/68757 , Y10T428/23
摘要： A method for processing a metal film (1) embedded in a carrier (2) includes the step of heating the metal film (1) in such a way that the metal film (1) is transformed in a subregion into at least one insulator section (3). The metal film (1) is preferably locally heated by laser radiation (4). Also described is a component (10, 11, 12, 13) which is produced by the method and includes an electrostatic clamp, a drive mechanism which is adapted for moving a workpiece under the action of electrical fields, a resistor element or a display device, for example.
摘要翻译：一种嵌入载体（2）中的金属膜（1）的处理方法包括以下方式加热金属膜（1）：使金属膜（1）在一个亚区域中变换为至少一个绝缘体部分（3）。金属膜（1）优选通过激光辐射局部加热（4）。还描述了通过该方法制造并包括静电夹具的驱动机构，用于在电场作用下移动工件的驱动机构，电阻元件或显示装置（10,11,12,13），例如。

4. 发明申请

US20100226030A1 LIGHTWEIGHT CARRIER STRUCTURE, PARTICULARLY FOR OPTICAL COMPONENTS, AND METHOD FOR ITS PRODUCTION 审中-公开
标题翻译：轻型货架结构，特别是光学元件及其生产方法
公开(公告)号：US20100226030A1
公开(公告)日：2010-09-09
申请号：US12717612
申请日：2010-03-04
申请人： Oliver BALDUS , Volker SCHMIDT
发明人： Oliver BALDUS , Volker SCHMIDT
IPC分类号： G02B7/182 , G02B7/00 , C03B23/20
CPC分类号： G02B7/182 , C04B37/042 , C04B37/045 , C04B2237/10 , C04B2237/12 , C04B2237/365 , F16M13/00 , F16M2200/08 , G02B7/183
摘要： A carrier structure (100), particularly for optical components, includes a carrier body (10) which is formed from ceramic with hollows (11), and at least one cover layer (21, 22) which is formed from glass, arranged on at least one surface of the carrier body (10), and is connected to the carrier body (10) by means of at least one bond connection (23, 24) produced by means of anodic bonding. Methods for producing the carrier structure (100) and the use of the carrier structure as a mirror body, carrier for optical components and/or mechanical carrier for dynamically moved components are also described.
摘要翻译：特别是用于光学部件的载体结构（100）包括由具有中空部（11）的陶瓷形成的载体主体（10）和由玻璃形成的至少一个覆盖层（21,22）通过至少一个通过阳极接合产生的接合连接（23,24）连接到载体主体（10）的载体主体（10）的至少一个表面。还描述了用于制造载体结构（100）的方法和使用载体结构作为镜体，用于光学部件的载体和/或用于动态移动的部件的机械载体。

5. 发明授权

US09791662B2 Lightweight carrier structure, particularly for optical components, and method for its production 有权
公开(公告)号：US09791662B2
公开(公告)日：2017-10-17
申请号：US14511773
申请日：2014-10-10
申请人： Berliner Glas KGaA Herbert Kubatz GmbH & Co.
发明人： Oliver Baldus , Volker Schmidt
IPC分类号： G02B7/183 , G02B7/182 , C04B37/04 , F16M13/00
CPC分类号： G02B7/182 , C04B37/042 , C04B37/045 , C04B2237/10 , C04B2237/12 , C04B2237/365 , F16M13/00 , F16M2200/08 , G02B7/183
摘要： A carrier structure (100), particularly for optical components, includes a carrier body (10) which is formed from ceramic with hollows (11), and at least one cover layer (21, 22) which is formed from glass, arranged on at least one surface of the carrier body (10), and is connected to the carrier body (10) by means of at least one bond connection (23, 24) produced by means of anodic bonding. Methods for producing the carrier structure (100) and the use of the carrier structure as a mirror body, carrier for optical components and/or mechanical carrier for dynamically moved components are also described.

6. 发明授权

US09673079B2 Clamp with electrode carrier disk 有权
公开(公告)号：US09673079B2
公开(公告)日：2017-06-06
申请号：US14724083
申请日：2015-05-28
申请人： Berliner Glas KGaA Herbert Kubatz GmbH & Co.
发明人： Oliver Baldus
IPC分类号： H01L21/683 , H02N13/00
CPC分类号： H01L21/6833 , H02N13/00 , Y10T29/49156
摘要： A holding apparatus (100) designed to electrostatically hold a component (1), e.g., a silicon wafer, includes a base body (10) produced from at least one plate (11, 12), a plurality of projecting burls (14) arranged on an upper side (13) of the base body (10) and form a support for component (1), and an electrode device (20) having a plurality of electrodes (21) arranged on the upper side (13) in gaps between burls (14), wherein the electrode device (20) comprises a silicon carrier disk (22) having a plurality of holes (23), and the carrier disk (22) is arranged on the upper side (13) in such a manner that the burls (14) project through the holes (23) and are spaced apart from the carrier disk (22), and wherein the electrodes (21) are arranged on disk portions between the holes (23). A method for producing the holding apparatus (100) is also described.

7. 发明授权

US08456521B2 Triangulation camera device and triangulation imaging method 有权
标题翻译：三角测量相机设备和三角测量成像方法
公开(公告)号：US08456521B2
公开(公告)日：2013-06-04
申请号：US12637269
申请日：2009-12-14
申请人： Volker Schmidt
发明人： Volker Schmidt
IPC分类号： H04N7/18
CPC分类号： G01B11/25 , A61B5/1077 , A61B5/4547 , H04N7/183
摘要： A triangulation camera device includes a light source device being adapted for generating illumination light to be directed onto an object under investigation and including a light source with an optical pattern generator and a first aperture being arranged along a first optical axis, a detector device being adapted for sensing reflection light reflected by the object and including a detector camera and a second aperture being arranged along a second optical axis, and an imaging optic having imaging lenses being adapted for imaging the illumination light onto the object and for collecting the reflection light, said imaging optic having a third optical axis, wherein the first, second and third optical axes are arranged in parallel and displaced relative to each other and the first and second apertures are arranged with a telecentric configuration relative to the imaging optic such that the illumination light and the reflection light are capable of forming a parallel illumination light bundle and a parallel reflection light bundle, resp., on the object side of the imaging optic, said illumination light bundle and said reflection light bundle having a predetermined projection angle, and the imaging lenses are tilted relative to the third optical axis such that surface reflections of the imaging lenses are directed toward ranges outside the second aperture.
摘要翻译：三角测量相机装置包括：光源装置，其适于产生被引导到被研究对象上的照明光，并包括具有光学图案发生器的光源和沿着第一光轴布置的第一孔，用于感测由物体反射的反射光并且包括检测器相机和沿着第二光轴布置的第二孔，以及具有成像透镜的成像光学器件，其适于将照明光成像到物体上并用于收集反射光，所述成像透镜具有第三光轴的成像光学器件，其中所述第一，第二和第三光轴平行布置并相对于彼此移位，并且所述第一和第二孔相对于成像光学元件以远心配置布置，使得照明光和反射光能够形成平行的照明光b 并且在成像光学元件的物体侧上具有平行的反射光束，所述照明光束和所述反射光束具有预定的投影角度，并且所述成像透镜相对于所述第三光轴倾斜，使得所述表面成像透镜的反射指向第二孔径外的范围。

8. 发明申请

US20210252664A1 METHOD AND POLISHING APPARATUS FOR MACHINING A PLATE-SHAPED COMPONENT, AND PLATE-SHAPED COMPONENT, IN PARTICULAR ELECTROSTATIC HOLDING APPARATUS OR IMMERSION WAFER PANEL 有权
公开(公告)号：US20210252664A1
公开(公告)日：2021-08-19
申请号：US17173651
申请日：2021-02-11
申请人： Berliner Glas KGaA Herbert Kubatz GmbH & Co.
发明人： Jan MEWIS
IPC分类号： B24B7/22 , B24B37/26 , B24B37/04 , B24B37/24
摘要： A method for machining a plate-shaped component, in particular an electrostatic holding device or an immersion wafer table, with a surface formed by end faces of protruding burls, including: mutual alignment of the component on a component carrier device and of a mechanical polishing tool on a tool carrier device, wherein the polishing tool and the component are arranged for relative movement to remove material from end face(s) of at least one burl. The polishing tool includes shape-stable, deformable binding agent and polishing particles therein. Pressure force between the polishing tool and the at least one burl is measured by a force sensor device. The tool carrier device and/or the component carrier device are set to a predefined working value of the pressure force such that material is removed from the end face during removal movement. Also disclosed are a plate-shaped component produced with the method, and a polishing device.

9. 发明授权

US10475689B2 Method for processing a holding plate, in particular for a clamp for holding a wafer 有权
公开(公告)号：US10475689B2
公开(公告)日：2019-11-12
申请号：US15873454
申请日：2018-01-17
申请人： Berliner Glas KGaA Herbert Kubatz GmbH & Co.
发明人： Volker Schmidt , Ralf Hammer , Gregor Hasper , Mike Fischer
IPC分类号： C23C16/32 , C23C16/48 , H01L21/683 , C23C16/56 , C23C16/02 , C23C16/04
摘要： A method for processing a holding plate (10) of a clamping device (in particular clamp wafer chuck) for holding a component, in particular a wafer, wherein the holding plate (10) has a SiC-based surface (12) on which at least one protruding, SiC-based surface element (13) is formed, includes the steps of locally limited heating of the holding plate (10) in a predetermined surface section and creating the surface element (13) at the predetermined surface section by chemical vapor deposition, in particular by means of laser CVD. Applications of the method exist in repairing a holding plate (10) of a clamping device or manufacturing a holding plate (10) of a clamping device. Furthermore, a holding plate of a clamping device for holding a component, in particular a wafer, is described.

10. 发明授权

US10388551B2 Detection circuit, electrostatic holding device and method for detecting a component on an electrostatic holding device 有权
公开(公告)号：US10388551B2
公开(公告)日：2019-08-20
申请号：US15430427
申请日：2017-02-10
申请人： Berliner Glas KGaA Herbert Kubatz GmbH & Co.
发明人： Peter Preuss , Gunnar Heinze , Michael Fall , Alexander Stein
IPC分类号： H02N13/00 , H01L21/67 , H01L21/68 , G01D5/25 , G08B13/26 , G01D5/24 , H01L21/683 , H03B5/08 , H03L7/099 , G01R27/26 , H03L7/08
摘要： Detection circuit for detecting electrical capacitance of electrode device in electrostatic holding device with clamp carrier, particularly for detecting component held by holding device, includes phase control circuit couplable to electrode device and has reference oscillator device, phase comparator and VCO circuit (VCOC). Phase comparator is arranged to generate a control voltage of VCOC as a function of reference signal from reference oscillator device and of VCO feedback signal from VCOC, at least one phase control circuit is configured for controlling VCOC as a function of capacitance to be detected, and for outputting an output signal characteristic of capacitance based on control voltage of VCOC, phase control circuit is configured for connection to electrode device such that VCOC contains capacitance to be detected as frequency-determining component, and reference oscillator device is configured for generating reference signal with adjustable reference frequency. Electrostatic holding device includes at least one such detection circuit.

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