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1. 发明授权

US10957471B2 Calibration system and calibrating method 有权
公开(公告)号：US10957471B2
公开(公告)日：2021-03-23
申请号：US16232484
申请日：2018-12-26
申请人： Tyco Electronics (Shanghai) Co. Ltd. , TE Connectivity Corporation , Kunshan League Automechanism Co., Ltd.
发明人： Fengchun Xie , Yingcong Deng , Dandan Zhang , Lvhai Hu , Yun Liu , Roberto Francisco-Yi Lu , Haidong Wu , Hui Xiao
IPC分类号： H01C17/24 , C23F1/14 , G01R31/01 , H01C17/26 , C23F1/08
摘要： A calibration system adapted to calibrate a resistance of an electrical device having a lead wire comprises a resistance detector adapted to detect the resistance of the electrical device, a first container containing an etching solution adapted to etch the lead wire, and a heater configured to heat the electrical device. If a first resistance of the electrical device detected by the resistance detector at a first temperature is within a first predetermined range, the electrical device is heated with the heater to a second temperature higher than the first temperature. A second resistance of the electrical device is detected by the resistance detector at the second temperature. If the second resistance is beyond a second predetermined range, the lead wire is etched by the etching solution to adjust the resistance of the electrical device until the second resistance at the second temperature is within the second predetermined range.

2. 发明授权

US10706993B2 Chip parts 有权
公开(公告)号：US10706993B2
公开(公告)日：2020-07-07
申请号：US15703954
申请日：2017-09-13
申请人： ROHM CO., LTD.
发明人： Takuma Shimoichi , Yasuhiro Kondo , Keishi Watanabe , Takamichi Torii , Katsuya Matsuura
IPC分类号： H01F27/28 , H01C1/01 , H01F27/29 , H01G4/30 , H01G4/228 , H01F17/00 , H01C1/02 , H05K1/02 , H01C17/26 , H05K1/16 , H01C1/142 , H01C7/00 , H01L23/522 , H01C13/02 , H01L49/02 , H01G4/33 , H01C1/14
摘要： A chip part is provided that includes a substrate in which an element region and an electrode region are set, an insulating film (a first insulating film and a second insulating film) which is formed on the substrate and which selectively includes an internal concave/convex structure in the electrode region on a surface, a first connection electrode and a second connection electrode which include, at a bottom portion, an anchor portion entering the concave portion of the internal concave/convex structure and which include an external concave/convex structure on a surface on the opposite side and a circuit element which is disposed in the element region and which is electrically connected to the first connection electrode and the second connection electrode.

3. 发明申请

US20200161031A1 ON-CHIP RESISTOR TRIMMING TO COMPENSATE FOR PROCESS VARIATION 审中-公开
公开(公告)号：US20200161031A1
公开(公告)日：2020-05-21
申请号：US16668023
申请日：2019-10-30
申请人： STMicroelectronics International N.V.
发明人： Mohit KAUSHIK , Anil KUMAR
IPC分类号： H01C17/26 , H01L21/66
摘要： A resistance trimming circuit has a resolution of N=X+Y bits. Included is a first circuit with M resistors, where M=2X−1, with each of the M resistors having a resistance of R*(2Y)*i, i being an index having a value ranging from 1 to 2X−1. M switches are associated with the M resistors. Each of the M resistors is coupled between a first node and its one of the M switches, and each of the M switches couples its one of the M resistors to a second node. Included is a second circuit with P resistors, where P=2Y−1, with each of the P resistors having a resistance of R*i. P switches are associated with the P resistors. Each of the P resistors is coupled between the second node and its one of the P switches, and each of the P switches selectively couples its one of the P resistors to a third node.

4. 发明授权

US09793181B2 Resistor calibration using a MOS capacitor 有权
公开(公告)号：US09793181B2
公开(公告)日：2017-10-17
申请号：US14659051
申请日：2015-03-16
申请人： STMicroelectronics (Grenoble 2) SAS
发明人： Vratislav Michal
IPC分类号： H01C10/50 , H01L21/66 , H01C17/22 , H01C17/26
CPC分类号： H01L22/14 , H01C17/22 , H01C17/26
摘要： A method for calibrating a resistance value comprises the steps of measuring a value of a reference capacitor, and adjusting a variable resistor based on the measured value of the reference capacitor. The method may more specifically comprise the steps of directing a constant current through the reference capacitor during a reference time interval; after the reference time interval, directing the constant current through the variable resistor; and varying the variable resistor value progressively by varying a control signal until a voltage of the variable resistor reaches a voltage of the reference capacitor.

5. 发明申请

US20050196909A1 Method and circuit for adjusting a resistance in an integrated circuit 有权
标题翻译：用于调整集成电路电阻的方法和电路
公开(公告)号：US20050196909A1
公开(公告)日：2005-09-08
申请号：US10737481
申请日：2003-12-16
申请人： Florian Schamberger , Jorg Peter
发明人： Florian Schamberger , Jorg Peter
IPC分类号： H01C17/26 , H01L21/02 , H01L27/08 , H01L21/82 , H01L29/00
CPC分类号： H01L28/20 , H01C17/267 , H01L27/0802
摘要： The invention relates to a method for adjusting a resistance in an integrated circuit, the resistance having a first conductive area and a second conductive area between which a dielectric area is arranged, a programming current being conducted through the resistance, the programming current being selected so as to adjust a resistance value of the resistance which is selected from a resistance range and is dependent on the programming current.
摘要翻译：本发明涉及一种用于调整集成电路中的电阻的方法，该电阻具有第一导电区域和布置介质区域的第二导电区域，编程电流通过电阻传导，编程电流被选择为调整从电阻范围选择的电阻的电阻值，并依赖于编程电流。

6. 发明申请

US20050186751A1 Method and structure for controlling surface properties of dielectric layers in a thin film component for improved trimming 有权
公开(公告)号：US20050186751A1
公开(公告)日：2005-08-25
申请号：US10653777
申请日：2003-09-02
申请人： Eric Beach , Walter Meinel , Eric Hoyt
发明人： Eric Beach , Walter Meinel , Eric Hoyt
IPC分类号： B23K26/18 , H01C17/242 , H01C17/26 , H01L21/02 , H01L21/20 , H01L21/3205 , H01L21/4763 , H01L29/00
CPC分类号： H01L28/20 , B23K26/18 , H01C17/242 , H01C17/26
摘要： A method and structure for controlling the surface properties in the dielectric layers in a thin film component can be provided for improving the trimming process of thin film element. A metal fill is configured with a uniform fill pattern beneath an array of thin film resistors, and can comprise a plurality of smaller features or peaks providing a finer fill pattern that improves the control of the topology of the dielectric layers. The fill pattern can be configured in various manners, such as fill patterns parallel to the thin film resistor, fill patterns perpendicular to the thin film resistor, or fill patterns comprising a checkerboard-like configuration. The method and device for controlling the dielectric layers can also provide for a reduction in the interferences that can be caused by reflecting back of the focused energy by comprising a dispersion arrangement configured to provide dispersive grading of the laser energy below the thin film resistor and thus reduce the interaction of reflected energy with the incident laser beam. The method also improves the contrast of the laser alignment targets with respect to their background.

7. 发明授权

US5466484A Resistor structure and method of setting a resistance value 失效
标题翻译：电阻结构和设定电阻值的方法
公开(公告)号：US5466484A
公开(公告)日：1995-11-14
申请号：US128282
申请日：1993-09-29
申请人： Gary L. Spraggins , Martin J. Abresch , William B. Newton , Renwin J. Yee
发明人： Gary L. Spraggins , Martin J. Abresch , William B. Newton , Renwin J. Yee
IPC分类号： H01C17/26 , G01K7/22 , H01L27/08 , H01L21/465 , G01K7/00 , H01C10/00 , H01L27/02
CPC分类号： G01K7/22 , H01L27/0802
摘要： A resistor structure (10) having a heating element (35) and a resistor (32), and a method of trimming the resistor (32). The heating element (35) is separated from the resistor (32) by a layer of dielectric material (19). The resistor (32) has a layer of resistive material (23) on an etch control layer (22). The resistor (32) is trimmed by providing current pulses (62) through the heating element (35). Heat generated by the current pulses flows to the resistor (32) and anneals or trims the resistor (32). A resistor trimming variable, e.g. a voltage across resistor contacts (30, 31), is monitored and the current pulses are modulated in accordance with the value of the resistor trimming variable (63). The trimming step is terminated when the desired resistance value of the resistor (32) is attained.
摘要翻译：具有加热元件（35）和电阻器（32）的电阻器结构（10）以及修整电阻器（32）的方法。加热元件（35）通过电介质材料（19）与电阻器（32）分离。电阻器（32）在蚀刻控制层（22）上具有电阻材料层（23）。通过提供通过加热元件（35）的电流脉冲（62）来修整电阻器（32）。由电流脉冲产生的热量流向电阻器（32）并退火或修整电阻器（32）。电阻修整变量，例如监视电阻触头（30,31）两端的电压，并根据电阻微调变量（63）的值调制电流脉冲。当达到电阻器（32）的期望电阻值时，修整步骤终止。

8. 发明授权

US5065221A Trimming resistor element for microelectronic circuit 失效
标题翻译：微电子电路的修正电阻元件
公开(公告)号：US5065221A
公开(公告)日：1991-11-12
申请号：US412522
申请日：1989-09-26
申请人： Kaoru Imamura
发明人： Kaoru Imamura
IPC分类号： H01C7/00 , H01C17/23 , H01C17/24 , H01C17/26 , H01L21/02 , H01L21/822 , H01L27/01 , H01L27/04
CPC分类号： H01L28/20 , H01C17/23 , H01C17/24
摘要： A trimming resistor element includes a high-resistance film of high resistivity formed on an insulation film on the main surface of a substrate, and a low-resistance region which is formed by selectively subjecting the high-resistance film to a predetermined process so as to lower the resistivity thereof. A resultant resistance of the low-resistance region and the high-resistance film can be adjusted by selectively cutting off part of the low-resistance region.

9. 发明授权

US4920635A A method of manufacturing a thermo-sensitive resistor 失效
标题翻译：一种制造热敏电阻的方法
公开(公告)号：US4920635A
公开(公告)日：1990-05-01
申请号：US212477
申请日：1988-06-28
申请人： Yasuhito Yajima
发明人： Yasuhito Yajima
IPC分类号： H05B3/42 , G01F1/68 , G01F1/692 , H01C7/02 , H01C17/24 , H01C17/26 , H05B3/20
CPC分类号： H01C17/262 , G01F1/68 , G01F1/692 , H01C17/24 , H01C17/2412 , H01C7/021 , Y10T29/49082 , Y10T29/49085
摘要： A thermo-sensitive resistor including an electrically insulating substrate, a thin-film heating resistor formed on the substrate and lead wires electrically connected to the thin-film heating resistor, wherein the resistance of the thin-film heating resistor is adjusted by increasing or decreasing a film thickness of a previously formed base thin-film heating resistor by means of an electroplating method or an electroless plating method, and thus the area for heating of the thermo-sensitive resistor can remain constant even if the resistance adjustment is performed.
摘要翻译：一种热敏电阻器，包括电绝缘基板，形成在基板上的薄膜加热电阻器和与薄膜加热电阻器电连接的引线，其中通过增加或减小来调节薄膜加热电阻器的电阻通过电镀法或化学镀法预先形成的基底薄膜加热电阻体的膜厚，因此即使进行电阻调整，热敏电阻的加热面积也保持恒定。

10. 发明授权

US4703557A Adjustment of thick film resistor (TCR) by laser annealing 失效
标题翻译：通过激光退火调整厚膜电阻（TCR）
公开(公告)号：US4703557A
公开(公告)日：1987-11-03
申请号：US916414
申请日：1986-10-07
申请人： John F. Nespor , Robert F. Gornick , Richard Y. Kwor
发明人： John F. Nespor , Robert F. Gornick , Richard Y. Kwor
IPC分类号： H01C17/232 , H01C17/26 , H01C17/06
CPC分类号： H01C17/232 , H01C17/265 , Y10T29/49099
摘要： The adjustment of the temperature coefficient of resistance (TCR) of a thick film resistor by laser annealing is disclosed. The thick film resistor is fired for a controlled time and temperature sufficient to burn off the organic material in the resistive paint, and to provide an initial adjustment of the (TCR), but prior to obtaining the desired (TCR) range. The resistor is then laser annealed to controllably adjust the (TCR) of the resistor within the desired (TCR) range. The fixture used to hold the substrate during laser annealing is preferably controllably heated to avoid thermal shock to the resistor during laser annealing. A microprocessor is preferably used to monitor the (TCR) during the laser annealing process. At least one of the laser scan speed, laser beam diameter, laser beam power, and number of annealing passes are used to controllably adjust the resistor (TCR) to within the desired (TCR) range.
摘要翻译：公开了通过激光退火调整厚膜电阻器的电阻温度系数（TCR）。烧制厚膜电阻器的时间和温度足以烧掉电阻涂料中的有机材料，并提供（TCR）的初始调整，但在获得所需的（TCR）范围之前。然后对电阻器进行激光退火，以可控制地将电阻器的（TCR）调节到期望的（TCR）范围内。用于在激光退火期间保持基板的固定装置优选地被可控地加热以避免在激光退火期间对电阻器的热冲击。优选使用微处理器来监测激光退火过程中的（TCR）。使用激光扫描速度，激光束直径，激光束功率和退火次数中的至少一个来可控地将电阻器（TCR）调节到期望的（TCR）范围内。

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