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    • 1. 发明申请
    • APPARATUS FOR PICKING, PLACING AND PRESSING SEMICONDUCTOR COMPONENTS
    • 拾取,放置和压制半导体元件的装置
    • US20140212246A1
    • 2014-07-31
    • US14164361
    • 2014-01-27
    • EXIS TECH SDN BHD
    • HENG LEE LEE
    • H01L21/677
    • H01L21/67132G01R31/26H05K13/0404H05K13/041
    • An apparatus for picking and placing or for picking and transferring or for picking, placing and pressing semiconductor components (10) is disclosed. The apparatus (10) comprises a motor for generating power to rotate a turret (6) which holds a plurality of pick up heads (7), a plurality of pressers (8), wherein each of said pressers (8) is a voice coil assembly (3) which consist of voice coil actuator assemblies (31), at least one stationary frame (1, 2) to secure said voice coil assemblies (3) and a controller means to control the direction and magnitude of displacement of said voice coil actuator assemblies (31). When current flows into voice coil in said voice coil actuator assembly (31), electromagnetic force is generated in vertical direction, forcing said actuators to press said pick up heads (7) located directly below said actuators at a particular moment, which in turn reaches to and press on wafers or semiconductor components located below said pick up heads. The pressing force, speed and direction of each actuator can be controlled individually. Furthermore, this invention includes safety measures wherein a real time actuator position feedback system is used to confirm the displacement of said actuators and an urging device (35) is used to return the actuators back to their original position in the event of power outage.
    • 公开了一种用于拾取和放置或用于拾取和转移或用于拾取,放置和按压半导体部件(10)的设备。 所述装置(10)包括用于产生动力的马达,用于旋转保持多个拾取头(7)的转台(6),多个按压器(8),其中每个所述按压件(8)是音圈 组件(3),其由音圈致动器组件(31)组成,至少一个固定框架(1,2),用于固定所述音圈组件(3);以及控制器装置,用于控制所述音圈的位移方向和幅度 致动器组件(31)。 当电流流入所述音圈致动器组件(31)中的音圈时,在垂直方向上产生电磁力,迫使所述致动器在特定时刻将位于所述致动器正下方的所述拾取头(7)按压 并且压在位于所述拾取头下方的晶片或半导体元件上。 每个执行器的按压力,速度和方向可以单独控制。 此外,本发明包括安全措施,其中使用实时致动器位置反馈系统来确认所述致动器的位移,并且在停电的情况下使用推动装置(35)使致动器返回到其原始位置。
    • 3. 发明授权
    • Apparatus for transferring and manipulating semiconductor components
    • 用于传送和操纵半导体元件的装置
    • US09443747B2
    • 2016-09-13
    • US14164361
    • 2014-01-27
    • EXIS TECH SDN BHD
    • Heng Lee Lee
    • G01R31/00H01L21/67G01R31/26H05K13/04
    • H01L21/67132G01R31/26H05K13/0404H05K13/041
    • An apparatus for picking and placing or for picking and transferring or for picking, placing and pressing semiconductor components (10) is disclosed. The apparatus (10) comprises a motor for generating power to rotate a turret (6) which holds a plurality of pick up heads (7), a plurality of pressers (8), wherein each of said pressers (8) is a voice coil assembly (3) which consist of voice coil actuator assemblies (31), at least one stationary frame (1, 2) to secure said voice coil assemblies (3) and a controller means to control the direction and magnitude of displacement of said voice coil actuator assemblies (31). When current flows into voice coil in said voice coil actuator assembly (31), electromagnetic force is generated in vertical direction, forcing said actuators to press said pick up heads (7) located directly below said actuators at a particular moment, which in turn reaches to and press on wafers or semiconductor components located below said pick up heads. The pressing force, speed and direction of each actuator can be controlled individually. Furthermore, this invention includes safety measures wherein a real time actuator position feedback system is used to confirm the displacement of said actuators and an urging device (35) is used to return the actuators back to their original position in the event of power outage.
    • 公开了一种用于拾取和放置或用于拾取和转移或用于拾取,放置和按压半导体部件(10)的设备。 所述装置(10)包括用于产生动力的马达,用于旋转保持多个拾取头(7)的转台(6),多个按压器(8),其中每个所述按压件(8)是音圈 组件(3),其由音圈致动器组件(31)组成,至少一个固定框架(1,2),用于固定所述音圈组件(3);以及控制器装置,用于控制所述音圈的位移方向和幅度 致动器组件(31)。 当电流流入所述音圈致动器组件(31)中的音圈时,在垂直方向上产生电磁力,迫使所述致动器在特定时刻将位于所述致动器正下方的所述拾取头(7)按压 并且压在位于所述拾取头下方的晶片或半导体元件上。 每个执行器的按压力,速度和方向可以单独控制。 此外,本发明包括安全措施,其中使用实时致动器位置反馈系统来确认所述致动器的位移,并且在停电的情况下使用推动装置(35)使致动器返回到其原始位置。