会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 4. 发明授权
    • Textured single crystal
    • 纹理单晶
    • US08222153B2
    • 2012-07-17
    • US13149652
    • 2011-05-31
    • Fabien LienhartGuillaume LecampFrançois-Julien Vermersch
    • Fabien LienhartGuillaume LecampFrançois-Julien Vermersch
    • H01L21/302
    • C30B33/08C30B25/186C30B29/20C30B29/403
    • A method for fabricating a textured single crystal including depositing pads made of metal on a surface of a single crystal. A protective layer is deposited on the pads and on the single crystal between the pads; and etching the surface with a first compound that etches the metal more rapidly than the protective layer is carried out. Processing continues with etching the surface with a second compound that etches the single crystal more rapidly than the protective layer; and etching the surface with a third compound that etches the protective layer more rapidly than the single crystal. The textured substrate may be used for the epitaxial growth of GaN, AlN or III-N compounds (i.e. a nitride of a metal the positive ion of which carries a +3 positive charge) in the context of the fabrication of LEDs, electronic components or solar cells.
    • 一种用于制造包含在单晶表面上由金属制成的沉积垫的纹理单晶的方法。 保护层沉积在焊盘和衬垫之间的单晶上; 并且利用蚀刻金属比保护层更快的第一化合物来蚀刻表面。 处理继续蚀刻具有比保护层更快速地蚀刻单晶的第二化合物的表面; 并用比单晶蚀刻保护层更快的第三种化合物蚀刻表面。 纹理化衬底可以用于在制造LED,电子元件或其中的GaN,AlN或III-N化合物(即其正离子携带+3正电荷的金属的氮化物)的外延生长 太阳能电池。