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    • 1. 发明授权
    • Apparatus and methods for forming thin film solar cell materials
    • 用于形成薄膜太阳能电池材料的装置和方法
    • US09385260B2
    • 2016-07-05
    • US13938288
    • 2013-07-10
    • TSMC Solar Ltd.
    • Kwang-Ming LinChi-Wei LiuWen-Cheng Kuo
    • H01L31/18H01L31/032
    • H01L31/18C23C14/5866H01L31/0322Y02E10/50Y02E10/541Y02P70/521
    • A method for forming thin film solar cell materials introducing a first inert gas mixture that includes hydrogen selenide into a chamber at a first pressure value until the chamber reaches a second pressure value and at a first temperature value, wherein the second pressure value is a predefined percentage of the first pressure value. The temperature in the chamber is increased to a second temperature value for a selenization process so that the pressure in the chamber increases to a third pressure value. Residual gas that is generated during the selenization process can be removed from the chamber. A second inert gas mixture that includes hydrogen sulfide is added into the chamber until the chamber reaches a fourth pressure value. The temperature in the chamber is increased to a third temperature value for a sulfurization process. The chamber is cooled after the sulfurization process.
    • 一种形成薄膜太阳能电池材料的方法,其将包含硒化氢的第一惰性气体混合物以第一压力值引入室中,直到室达到第二压力值和第一温度值,其中第二压力值是预定的 第一压力值的百分比。 室中的温度增加到用于硒化过程的第二温度值,使得室中的压力增加到第三压力值。 在硒化过程中产生的残余气体可以从室中除去。 将包括硫化氢的第二惰性气体混合物加入到室中,直到室达到第四压力值。 室内的温度增加到硫化过程的第三温度值。 在硫化过程后冷却室。