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1. 发明授权

US09978616B2 Pressing apparatus, substrate bonding apparatus and stacked substrate 有权
公开(公告)号：US09978616B2
公开(公告)日：2018-05-22
申请号：US14297891
申请日：2014-06-06
申请人： NIKON CORPORATION
发明人： Shigeto Izumi , Satoshi Takahashi
IPC分类号： B32B37/00 , H01L21/67 , B32B37/10 , H01L21/673 , B30B15/06 , B32B37/18 , B32B38/18
CPC分类号： H01L21/67092 , B30B15/06 , B30B15/064 , B32B37/0046 , B32B37/10 , B32B37/18 , B32B38/1841 , B32B2038/1891 , B32B2309/12 , B32B2309/14 , B32B2309/68 , B32B2457/14 , H01L21/67126 , H01L21/673 , Y10T428/31504
摘要： Moving the substrates quickly, as well as applying a large pressure to the substrates are required. A pressing apparatus for pressing a plurality of substrates stacked on one another, includes: a first stage that supports the plurality of substrates; a second stage that can sandwich the plurality of substrates between the first stage and the second stage; a driving section that moves the first stage towards the second stage so as to sandwich the plurality of substrates; and a pressing section that, when the driving section has made the first stage reach a predetermined position, applies a pressing force to the first stage to press the plurality of substrates between the first stage and the second stage, where the driving section and the pressing section are arranged next to each other so that at least part of the driving section and the pressing section overlaps in the moving direction.

2. 发明授权

US09638944B1 Systems and methods for substrate lamination 有权
公开(公告)号：US09638944B1
公开(公告)日：2017-05-02
申请号：US14270563
申请日：2014-05-06
申请人： Cameron T. McCalley , James D. Sampica , Brian K. Smith
发明人： Cameron T. McCalley , James D. Sampica , Brian K. Smith
IPC分类号： G02F1/1333
CPC分类号： G02F1/1333 , B30B5/02 , B32B37/003 , B32B37/1009 , B32B37/12 , B32B37/26 , B32B38/1841 , B32B41/00 , B32B43/006 , B32B2038/1891 , B32B2309/68 , B32B2457/20 , H01L51/5246 , H01L51/56
摘要： A method for laminating substrates to form a laminated assembly includes positioning a first substrate and a second substrate within a lamination device having a first cavity and a second cavity; pressurizing the first cavity to a first pressure to move a flexible member into contact with one of the first and second substrate; depressurizing the first cavity to move the flexible member out of contact with the one of the first and second substrate; and pressurizing a second cavity to a second pressure higher than the first pressure to apply air pressure at the second pressure to the first and second substrate to form a laminated assembly.

3. 发明申请

US20140349118A1 PRESSING APPARATUS, SUBSTRATE BONDING APPARATUS AND STACKED SUBSTRATE 有权
标题翻译：压力装置，基板粘合装置和堆叠基板
公开(公告)号：US20140349118A1
公开(公告)日：2014-11-27
申请号：US14297891
申请日：2014-06-06
申请人： NIKON CORPORATION
发明人： Shigeto Izumi , Satoshi Takahashi
IPC分类号： H01L21/67 , B32B37/18 , B32B37/10 , H01L21/673 , B32B37/00
CPC分类号： H01L21/67092 , B30B15/06 , B30B15/064 , B32B37/0046 , B32B37/10 , B32B37/18 , B32B38/1841 , B32B2038/1891 , B32B2309/12 , B32B2309/14 , B32B2309/68 , B32B2457/14 , H01L21/67126 , H01L21/673 , Y10T428/31504
摘要： Moving the substrates quickly, as well as applying a large pressure to the substrates are required. A pressing apparatus for pressing a plurality of substrates stacked on one another, includes: a first stage that supports the plurality of substrates; a second stage that can sandwich the plurality of substrates between the first stage and the second stage; a driving section that moves the first stage towards the second stage so as to sandwich the plurality of substrates; and a pressing section that, when the driving section has made the first stage reach a predetermined position, applies a pressing force to the first stage to press the plurality of substrates between the first stage and the second stage, where the driving section and the pressing section are arranged next to each other so that at least part of the driving section and the pressing section overlaps in the moving direction.
摘要翻译：需要快速移动基板以及向基板施加大的压力。一种用于按压彼此堆叠的多个基板的按压装置，包括：支撑所述多个基板的第一台; 第二阶段，其可以在所述第一阶段和所述第二阶段之间夹着所述多个基板; 驱动部，其使所述第一阶段朝向所述第二阶段移动，以夹持所述多个基板; 以及按压部，当所述驱动部使所述第一阶段到达预定位置时，向所述第一阶段施加按压力以在所述第一阶段和所述第二阶段之间按压所述多个基板，在所述第一阶段和所述第二阶段之间，截面彼此相邻布置，使得驱动部分和按压部分的至少一部分在移动方向上重叠。

4. 发明授权

US08778113B2 Method for continuously forming lamination optical function element sheet and lamination optical function element sheet forming apparatus 有权
标题翻译：用于连续地形成层压光学功能元件片和层压光学功能元件片材成形装置的方法
公开(公告)号：US08778113B2
公开(公告)日：2014-07-15
申请号：US13574748
申请日：2011-01-24
申请人： Shigeru Hosoe
发明人： Shigeru Hosoe
IPC分类号： B32B37/24
CPC分类号： B29C39/18 , B29C39/148 , B29C2035/0827 , B29D11/00288 , B29K2995/0018 , B32B27/08 , B32B37/0053 , B32B37/1284 , B32B37/203 , B32B38/06 , B32B2038/1891 , B32B2310/0831 , B32B2457/206
摘要： Provided are a method and an apparatus for continuously forming a laminated optical function element sheet which has optical function elements formed on three or more faces by laminating a first optical function element sheet which has an optical function element formed on both of the front and back faces with a second optical function element sheet which has an optical function element formed on at least one of the two faces. The method comprises a first optical function element sheet forming step of molding, forming, or printing an optical function element on both of the front and back faces of a first base film, a second optical function element sheet forming step of molding, forming or printing an optical function element on at least one of the two faces of a second base film, and a laminating and bonding step of simultaneously performing the first and second optical function element sheet forming steps to laminate and bond the formed first and second optical function element sheets and form a laminated optical function element sheet.
摘要翻译：本发明提供一种连续形成层叠光学功能元件片的方法和装置，该叠层光学功能元件片具有形成在三个或多个面上的光学功能元件，该第一光学功能元件片材具有形成在前后两面上的光学功能元件具有形成在两个面中的至少一个上的光学功能元件的第二光学功能元件片。该方法包括在第一基底膜的前表面和后表面上模制，形成或印刷光学功能元件的第一光学功能元件片材形成步骤，第二光学功能元件片材成型步骤，模制，成形或印刷在第二基膜的两个表面中的至少一个面上的光学功能元件，以及层叠和接合步骤，同时执行第一和第二光学功能元件片材形成步骤，以将形成的第一和第二光学功能元件片材并形成层压光学功能元件片。

5. 发明授权

US08766086B2 System and method for laminating photovoltaic structures 失效
标题翻译：用于层压光伏结构的系统和方法
公开(公告)号：US08766086B2
公开(公告)日：2014-07-01
申请号：US12888037
申请日：2010-09-22
申请人： Abhay Maheshwari , Raghunandan Chaware
发明人： Abhay Maheshwari , Raghunandan Chaware
IPC分类号： H01L31/0232
CPC分类号： H01L31/18 , B32B17/10018 , B32B17/10146 , B32B17/1055 , B32B17/10788 , B32B37/1009 , B32B37/1207 , B32B41/00 , B32B2038/1891 , B32B2309/02 , B32B2309/04 , B32B2309/12 , B32B2457/12 , H01L31/0543 , H02S40/22 , Y02E10/52 , Y10T156/1089
摘要： A method for forming a laminated photovoltaic structure includes providing a sheet of transparent material having light concentrating features, disposing adhesive material adjacent to the sheet of transparent material, disposing photovoltaic strips adjacent to the adhesive material, wherein the photovoltaic strips are positioned relative to the sheet of transparent material in response to exitant light characteristics of the light concentrating features, wherein photovoltaic strips are coupled via associated bus bars, wherein gap regions are located between bus bars of neighboring photovoltaic strips, disposing a rigid layer of material adjacent to the photovoltaic strips to form a composite photovoltaic structure; and thereafter laminating the composite photovoltaic structure to fill the gap regions with adhesive material and to form the laminated photovoltaic structure, wherein adhesive material adheres to the bus bars.
摘要翻译：一种形成叠层光伏结构的方法包括提供具有光聚集特征的透明材料片，将粘合剂材料设置在透明材料片附近，将光伏条放置在邻近粘合剂材料的位置，其中光伏条相对于片材透明材料响应于光聚集特征的出射光特性，其中光伏带通过相关联的母线耦合，其中间隙区域位于相邻光伏条带的汇流条之间，将邻近光伏条带的刚性材料层设置到形成复合光伏结构; 然后层叠复合光伏结构以用粘合剂材料填充间隙区域并形成层叠的光伏结构，其中粘合材料粘附到母线上。

6. 发明申请

US20130248119A1 APPARATUS AND METHOD OF SEPARATING WAFER FROM CARRIER 有权
标题翻译：从载体分离波形的装置和方法
公开(公告)号：US20130248119A1
公开(公告)日：2013-09-26
申请号：US13427724
申请日：2012-03-22
申请人： Chien Ling HWANG , Lin-Wei WANG , Chung-Shi LIU
发明人： Chien Ling HWANG , Lin-Wei WANG , Chung-Shi LIU
IPC分类号： B29C71/02
CPC分类号： H01L21/6836 , B32B37/0046 , B32B37/06 , B32B37/16 , B32B38/10 , B32B38/18 , B32B38/1858 , B32B39/00 , B32B41/00 , B32B43/006 , B32B2038/1891 , B32B2041/04 , B32B2307/202 , B32B2309/02 , B32B2457/14 , H01L21/67092 , H01L21/67109 , H01L21/67132 , H01L21/68 , H01L21/6831 , H01L21/6835 , H01L21/6838 , H01L21/68764 , H01L23/544 , H01L2221/68327 , H01L2221/6834 , H01L2221/68381 , H01L2223/54493 , H01L2924/0002 , Y10S156/93 , Y10S156/941 , Y10T156/1132 , Y10T156/1153 , Y10T156/1168 , Y10T156/12 , Y10T156/14 , Y10T156/15 , Y10T156/1911 , Y10T156/1944 , Y10T156/1978 , H01L2924/00
摘要： A method of separating a wafer from a carrier includes placing a wafer assembly on a platform. The wafer assembly includes the wafer, the carrier, and a layer of wax between the wafer and the carrier. A wafer frame is mounted on the wafer of the wafer assembly. The layer of wax is softened. The wafer and the wafer frame mounted thereon are separated, by a first robot arm, from the carrier.
摘要翻译：从载体分离晶片的方法包括将晶片组件放置在平台上。晶片组件包括晶片，载体和在晶片和载体之间的一层蜡。晶片框架安装在晶片组件的晶片上。蜡层软化。安装在其上的晶片和晶片框架由第一机器人臂从载体分离。

7. 发明授权

US08393370B2 Substrate laminating apparatus 失效
标题翻译：基板层压装置
公开(公告)号：US08393370B2
公开(公告)日：2013-03-12
申请号：US11782014
申请日：2007-07-24
申请人： Masaru Mitsumoto , Shigeo Watanabe , Tatsuhito Kunihiro
发明人： Masaru Mitsumoto , Shigeo Watanabe , Tatsuhito Kunihiro
IPC分类号： B29C65/00
CPC分类号： B32B38/18 , B32B2038/1891 , B32B2309/68 , B32B2457/20 , G02F1/1303 , G02F1/1333 , Y10T156/17
摘要： A substrate laminating apparatus which sticks substrates together in vacuum with high accuracy. The apparatus includes a first chamber into which two substrates are carried; a second chamber in which substrates are stuck together; and a third chamber which delivers a substrate laminate. The pressure level in the first chamber and the third chamber is varied from atmospheric to medium vacuum under control and that in the second chamber is varied from medium vacuum to high vacuum under control. In the second chamber, electrostatic adsorption means which can move up and down picks up an upper substrate and holds it on an upper table.
摘要翻译：一种基板层叠装置，其以真空高精度粘接基板。该装置包括：第一室，其中承载有两个基板; 第二室，其中基板粘合在一起; 以及输送基板层叠体的第三室。在第一室和第三室中的压力水平在大气压至中等真空的控制下变化，而在第二室中的压力水平在中等真空到高真空的控制下变化。在第二室中，可以上下移动的静电吸附装置拾起上基板并将其保持在上台上。

8. 发明申请

US20120312457A1 Method for Continuously forming Laminated Optical Function Element Sheet and Apparatus for Continuously forming Laminated Optical Function Element Sheet 有权
标题翻译：用于连续地形成层压光学功能元件片的方法和用于连续形成层压光学功能元件片的设备
公开(公告)号：US20120312457A1
公开(公告)日：2012-12-13
申请号：US13574748
申请日：2011-01-24
申请人： Shigeru Hosoe
发明人： Shigeru Hosoe
IPC分类号： B32B37/24 , B32B38/14 , B32B37/06
CPC分类号： B29C39/18 , B29C39/148 , B29C2035/0827 , B29D11/00288 , B29K2995/0018 , B32B27/08 , B32B37/0053 , B32B37/1284 , B32B37/203 , B32B38/06 , B32B2038/1891 , B32B2310/0831 , B32B2457/206
摘要： Provided are a method and an apparatus for continuously forming a laminated optical function element sheet which has optical function elements formed on three or more faces by laminating a first optical function element sheet which has an optical function element formed on both of the front and back faces with a second optical function element sheet which has an optical function element formed on at least one of the two faces. The method comprises a first optical function element sheet forming step of molding, forming, or printing an optical function element on both of the front and back faces of a first base film, a second optical function element sheet forming step of molding, forming or printing an optical function element on at least one of the two faces of a second base film, and a laminating and bonding step of simultaneously performing the first and second optical function element sheet forming steps to laminate and bond the formed first and second optical function element sheets and form a laminated optical function element sheet.
摘要翻译：本发明提供一种连续形成层叠光学功能元件片的方法和装置，该叠层光学功能元件片具有形成在三个或多个面上的光学功能元件，该第一光学功能元件片材具有形成在前后两面上的光学功能元件具有形成在两个面中的至少一个上的光学功能元件的第二光学功能元件片。该方法包括在第一基底膜的前表面和后表面上模制，形成或印刷光学功能元件的第一光学功能元件片材形成步骤，第二光学功能元件片材成型步骤，模制，成形或印刷在第二基膜的两个表面中的至少一个面上的光学功能元件，以及层叠和接合步骤，同时执行第一和第二光学功能元件片材形成步骤，以将形成的第一和第二光学功能元件片材并形成层压光学功能元件片。

9. 发明授权

US08136564B2 Attaching device and attaching apparatus for supporting plate, and attaching method for supporting plate 有权
标题翻译：支撑板的安装装置和安装装置以及支撑板的安装方法
公开(公告)号：US08136564B2
公开(公告)日：2012-03-20
申请号：US11633604
申请日：2006-12-04
申请人： Akihiko Nakamura , Atsushi Miyanari , Yoshihiro Inao
发明人： Akihiko Nakamura , Atsushi Miyanari , Yoshihiro Inao
IPC分类号： B32B37/10
CPC分类号： B32B38/1841 , B32B37/0046 , B32B2038/1891 , B32B2309/68 , B32B2457/14 , H01L21/68 , H01L21/68742 , Y10T156/17
摘要： An attaching device which makes it possible to accurately perform alignment when the diameters of a substrate and a supporting plate are substantially the same includes a mounting plate for mounting a semiconductor wafer thereon, a pressing plate for pressing a supporting plate onto the semiconductor wafer, and a pair of alignment members. The pair of alignment members are arranged to freely move back and forth in a horizontal direction, and blades for supporting a lower surface of the periphery of the supporting plate and pushing members for performing positioning in a state where the supporting plate is superposed on the semiconductor wafer are provided at tip ends of the alignment members.
摘要翻译：一种连接装置，其能够在基板和支撑板的直径基本相同的情况下准确地进行对准，包括用于在其上安装半导体晶片的安装板，用于将支撑板按压到半导体晶片上的按压板，以及一对对准构件。一对对准构件被布置成在水平方向上自由地前后移动，并且用于支撑支撑板的周边的下表面的叶片和用于在支撑板叠置在半导体上的状态下执行定位的推动构件晶片设置在对准构件的顶端。

10. 发明授权

US08066929B2 Method and device for placing thin material layers onto a relief mould 失效
标题翻译：将薄材料层放置在浮雕模具上的方法和装置
公开(公告)号：US08066929B2
公开(公告)日：2011-11-29
申请号：US12067517
申请日：2006-09-18
申请人： Ulrich Eberth , Hans-Martin Krafft , Martin Friedrich
发明人： Ulrich Eberth , Hans-Martin Krafft , Martin Friedrich
IPC分类号： B28B7/30
CPC分类号： B29C31/008 , B29C70/386 , B29C70/541 , B32B38/18 , B32B38/1858 , B32B2038/1891
摘要： The present invention relates to a method and a device for placing at least one material layer onto a relief mold for producing a composite material. Thereby, an elastically-reversibly deformable body with a surface relief that is designed to correspond to the relief mold is pressed against the material layer, as a result of which the surface of said body is deformed, and the material layer can be picked up. As a result of its elastically-reversible characteristics the body subsequently deforms back to its initial state so that the material layer can easily be placed onto the relief mold.
摘要翻译：本发明涉及一种用于将至少一个材料层放置在用于制造复合材料的凸版上的方法和装置。由此，将与凹凸模相对应的具有表面浮雕的弹性可逆变形体按压在材料层上，结果，所述主体的表面变形，并且可以拾取材料层。由于其弹性可逆特性，身体随后变形回到其初始状态，使得材料层可以容易地放置在浮雕模具上。

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